| Patent | Date |
|---|
Method and system for tool condition monitoring based on a simulated inline measurement
Grant 10,047,439 - Tsai , et al. August 14, 2 | 2018-08-14 |
Real-time calibration for wafer processing chamber lamp modules
Grant 9,698,065 - Chang , et al. July 4, 2 | 2017-07-04 |
Systems and associated methods for tuning processing tools
Grant 9,519,285 - Tsai , et al. December 13, 2 | 2016-12-13 |
Integrated circuit manufacturing tool condition monitoring system and method
Grant 9,349,660 - Tsai , et al. May 24, 2 | 2016-05-24 |
Real-Time Calibration for Wafer Processing Chamber Lamp Modules
App 20160027708 - Chang; Chih-Tien ; et al. | 2016-01-28 |
Semiconductor processing dispatch control
Grant 9,158,301 - Wu , et al. October 13, 2 | 2015-10-13 |
Real-time calibration for wafer processing chamber lamp modules
Grant 9,159,597 - Chang , et al. October 13, 2 | 2015-10-13 |
Semiconductor Processing Dispatch Control
App 20140303765 - Wu; Sunny ; et al. | 2014-10-09 |
Tool Optimizing Tuning Systems And Associated Methods
App 20140207271 - Tsai; Po-Feng ; et al. | 2014-07-24 |
Semiconductor processing dispatch control
Grant 8,781,614 - Wu , et al. July 15, 2 | 2014-07-15 |
E-chuck with automated clamped force adjustment and calibration
Grant 8,685,759 - Wang , et al. April 1, 2 | 2014-04-01 |
Adaptive And Automatic Determination Of System Parameters
App 20140074258 - TSAI; Po-Feng ; et al. | 2014-03-13 |
Adaptive and automatic determination of system parameters
Grant 8,606,387 - Tsai , et al. December 10, 2 | 2013-12-10 |
Real-time Calibration For Wafer Processing Chamber Lamp Modules
App 20130306621 - Chang; Chih-Tien ; et al. | 2013-11-21 |
Method And System For Tool Condition Monitoring
App 20130150997 - Tsai; Po-Feng ; et al. | 2013-06-13 |
Integrated Circuit Manufacturing Tool Condition Monitoring System And Method
App 20130144419 - Tsai; Po-Feng ; et al. | 2013-06-06 |
Device performance parmeter tuning method and system
Grant 8,452,439 - Wu , et al. May 28, 2 | 2013-05-28 |
Semiconductor Processing Dispatch Control
App 20130013097 - Wu; Sunny ; et al. | 2013-01-10 |
Semiconductor processing dispatch control
Grant 8,295,965 - Wu , et al. October 23, 2 | 2012-10-23 |
Device Performance Parmeter Tuning Method And System
App 20120239178 - Wu; Sunny ; et al. | 2012-09-20 |
System and method for implementing wafer acceptance test ("WAT") advanced process control ("APC") with routing model
Grant 8,219,341 - Tsen , et al. July 10, 2 | 2012-07-10 |
Physical failure analysis guiding methods
Grant 8,205,173 - Wu , et al. June 19, 2 | 2012-06-19 |
Adaptive And Automatic Determination Of System Parameters
App 20120130525 - TSAI; Po-Feng ; et al. | 2012-05-24 |
System and method for implementing a wafer acceptance test ("WAT") advanced process control ("APC") with novel sampling policy and architecture
Grant 8,108,060 - Tsen , et al. January 31, 2 | 2012-01-31 |
Semiconductor Processing Dispatch Control
App 20120016509 - Wu; Sunny ; et al. | 2012-01-19 |
Physical Failure Analysis Guiding Methods
App 20110314336 - Wu; Sunny ; et al. | 2011-12-22 |
Method for a bin ratio forecast at new tape out stage
Grant 8,082,055 - Lin , et al. December 20, 2 | 2011-12-20 |
Method for bin-based control
Grant 8,041,451 - Wu , et al. October 18, 2 | 2011-10-18 |
E-chuck With Automated Clamped Force Adjustment And Calibration
App 20110042006 - Wang; Jo Fei ; et al. | 2011-02-24 |
Method For A Bin Ratio Forecast At New Tape Out Stage
App 20110010215 - Lin; Chun-Hsien ; et al. | 2011-01-13 |
E-chuck for automated clamped force adjustment and calibration
Grant 7,851,233 - Wang , et al. December 14, 2 | 2010-12-14 |
System And Method For Implementing A Wafer Acceptance Test ("wat") Advanced Process Control ("apc") With Novel Sampling Policy And Architecture
App 20100292824 - Tsen; Andy ; et al. | 2010-11-18 |
Method For Bin-based Control
App 20100268367 - Wu; Sunny ; et al. | 2010-10-21 |
System And Method For Implementing Wafer Acceptance Test ("wat") Advanced Process Control ("apc") With Routing Model
App 20100250172 - Tsen; Andy ; et al. | 2010-09-30 |
E-chuck For Automated Clamped Force Adjustment And Calibration
App 20100248398 - Wang; Jo Fei ; et al. | 2010-09-30 |
Surface modification of a porous organic material through the use of a supercritical fluid
Grant 7,354,623 - Wang , et al. April 8, 2 | 2008-04-08 |
Method and apparatus to enable accurate wafer prediction
Grant 7,144,297 - Lin , et al. December 5, 2 | 2006-12-05 |
Method And Apparatus To Enable Accurate Wafer Prediction
App 20060252348 - Lin; Chun-Hsien ; et al. | 2006-11-09 |
Advanced process control approach for Cu interconnect wiring sheet resistance control
Grant 7,083,495 - Lin , et al. August 1, 2 | 2006-08-01 |
Novel method and apparatus for integrating fault detection and real-time virtual metrology in an advanced process control framework
App 20060129257 - Chen; Ping-Hsu ; et al. | 2006-06-15 |
Micro-etching method to replicate alignment marks for semiconductor wafer photolithography
App 20050282396 - Lin, Yu-Liang ; et al. | 2005-12-22 |
Surface modification of a porous organic material through the use of a supercritical fluid
App 20050260402 - Wang, Ching-Ya ; et al. | 2005-11-24 |
Advanced process control approach for Cu interconnect wiring sheet resistance control
App 20050112997 - Lin, Chun Hsien ; et al. | 2005-05-26 |
Method and apparatus for controlling spatial distribution of RF power and plasma density
App 20050031796 - Wu, Sunny ; et al. | 2005-02-10 |
Multi-phase pressure control valve for process chamber
Grant 6,843,264 - Chang , et al. January 18, 2 | 2005-01-18 |
Multi - phase pressure control valve for process chamber
App 20040118464 - Chang, Chih-Tien ; et al. | 2004-06-24 |
Swivel mechanism for a monitor of a laptop computer
Grant 5,016,849 - Wu May 21, 1 | 1991-05-21 |
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