Patent | Date |
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Intermediate layout for resolution enhancement in semiconductor fabrication Grant 7,979,811 - Wu , et al. July 12, 2 | 2011-07-12 |
Incrementally resolved phase-shift conflicts in layouts for phase-shifted features Grant 7,827,518 - Wu , et al. November 2, 2 | 2010-11-02 |
Method for increasing cell uniformity in an integrated circuit by adjusting cell inputs to design process App 20100107133 - Nakagawa; O. Samuel ;   et al. | 2010-04-29 |
Intermediate Layout for Resolution Enhancement in Semiconductor Fabrication App 20080216047 - Wu; Shao-Po ;   et al. | 2008-09-04 |
Intermediate layout for resolution enhancement in semiconductor fabrication Grant 7,404,173 - Wu , et al. July 22, 2 | 2008-07-22 |
Flexible shape identification for optical proximity correction in semiconductor fabrication Grant 7,337,424 - Wu , et al. February 26, 2 | 2008-02-26 |
Incrementally Resolved Phase-Shift Conflicts In Layouts For Phase-Shifted Features App 20070245291 - Wu; Shao-Po ;   et al. | 2007-10-18 |
Incrementally resolved phase-shift conflicts in layouts for phase-shifted features Grant 7,281,226 - Wu , et al. October 9, 2 | 2007-10-09 |
Resolving phase-shift conflicts in layouts using weighted links between phase shifters Grant 7,216,331 - Wu , et al. May 8, 2 | 2007-05-08 |
Flexible shape identification for optical proximity correction in semiconductor fabrication App 20060236287 - Wu; Shao-Po ;   et al. | 2006-10-19 |
Method and platform for integrated physical verifications and manufacturing enhancements Grant 7,100,134 - Wu , et al. August 29, 2 | 2006-08-29 |
Method for providing flexible and dynamic reporting capability using simulation tools Grant 7,085,698 - Tsai , et al. August 1, 2 | 2006-08-01 |
Method and apparatus for selective, incremental, reconfigurable and reusable semiconductor manufacturing resolution-enhancements App 20050229130 - Wu, Shao-Po ;   et al. | 2005-10-13 |
Intermediate layout for resolution enhancement in semiconductor fabrication App 20050229131 - Wu, Shao-Po ;   et al. | 2005-10-13 |
Resolving phase-shift conflicts in layouts using weighted links between phase shifters Grant 6,901,575 - Wu , et al. May 31, 2 | 2005-05-31 |
Resolving phase-shift conflicts in layouts using weighted links between phase shifters App 20050060682 - Wu, Shao-Po ;   et al. | 2005-03-17 |
Method and platform for integrated physical verifications and manufacturing enhancements App 20050044514 - Wu, Shao-Po ;   et al. | 2005-02-24 |
Alternating phase shift masking for multiple levels of masking resolution Grant 6,846,596 - Wu January 25, 2 | 2005-01-25 |
Method and apparatus for resolving coloring conflicts between phase shifters Grant 6,698,007 - Wu , et al. February 24, 2 | 2004-02-24 |
Alternating phase shift masking for multiple levels of masking resolution App 20030211401 - Wu, Shao-Po | 2003-11-13 |
Conflict sensitive compaction for resolving phase-shift conflicts in layouts for phase-shifted features Grant 6,622,288 - Wang , et al. September 16, 2 | 2003-09-16 |
Facilitating an adjustable level of phase shifting during an optical lithography process for manufacturing an integrated circuit Grant 6,605,481 - Wu , et al. August 12, 2 | 2003-08-12 |
Incrementally resolved phase-shift conflicts in layouts for phase-shifted features App 20030135839 - Wu, Shao-Po ;   et al. | 2003-07-17 |
Method and apparatus for reducing color conflicts during trim generation for phase shifters Grant 6,593,038 - Cho , et al. July 15, 2 | 2003-07-15 |
Incrementally resolved phase-shift conflicts in layouts for phase-shifted features Grant 6,584,610 - Wu , et al. June 24, 2 | 2003-06-24 |
Method for providing flexible and dynamic reporting capability using simulation tools App 20030115034 - Tsai, Chi-Ming ;   et al. | 2003-06-19 |
Method and apparatus for resolving coloring conflicts between phase shifters App 20030070155 - Wu, Shao-Po ;   et al. | 2003-04-10 |
Method and apparatus for using phase shifter cutbacks to resolve phase shifter conflicts App 20020164532 - Cho, Seonghun ;   et al. | 2002-11-07 |
Method and apparatus for reducing color conflicts during trim generation for phase shifters App 20020164533 - Cho, Seonghun ;   et al. | 2002-11-07 |
Resolving phase-shift conflicts in layouts using weighted links between phase shifters App 20020083410 - Wu, Shao-Po ;   et al. | 2002-06-27 |