| Patent | Date |
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Print check repeater defect detection
Grant 11,328,411 - Chen , et al. May 10, 2 | 2022-05-10 |
Print Check Repeater Defect Detection
App 20210342992 - Chen; Hong ; et al. | 2021-11-04 |
System, method and non-transitory computer readable medium for tuning sensitivities of, and determining a process window for, a modulated wafer
Grant 11,139,216 - Oram , et al. October 5, 2 | 2021-10-05 |
High accuracy of relative defect locations for repeater analysis
Grant 11,067,516 - Suman , et al. July 20, 2 | 2021-07-20 |
Detecting defects in a logic region on a wafer
Grant 10,923,317 - Huang , et al. February 16, 2 | 2021-02-16 |
System, Method And Non-transitory Computer Readable Medium For Tuning Sensitivies Of, And Determining A Process Window For, A Mo
App 20200258792 - A1 | 2020-08-13 |
System, method and non-transitory computer readable medium for tuning sensitivies of, and determining a process window for, a modulated wafer
Grant 10,679,909 - Oram , et al. | 2020-06-09 |
Detecting Defects In A Logic Region On A Wafer
App 20200090904 - Huang; Junqing ; et al. | 2020-03-19 |
High Accuracy Of Relative Defect Locations For Repeater Analysis
App 20200072763 - Suman; Shishir ; et al. | 2020-03-05 |
System and method for aligning semiconductor device reference images and test images
Grant 10,572,991 - Chen , et al. Feb | 2020-02-25 |
Adaptive local threshold and color filtering
Grant 10,395,359 - Huang , et al. A | 2019-08-27 |
Methods to store dynamic layer content inside a design file
Grant 10,387,601 - Jayaraman , et al. A | 2019-08-20 |
High accuracy of relative defect locations for repeater analysis
Grant 10,365,232 - Suman , et al. July 30, 2 | 2019-07-30 |
System and method for defining care areas in repeating structures of design data
Grant 10,339,262 - Huang , et al. | 2019-07-02 |
System and Method for Aligning Semiconductor Device Reference Images and Test Images
App 20190139208 - Chen; Hong ; et al. | 2019-05-09 |
High Accuracy Of Relative Defect Locations For Repeater Analysis
App 20180328860 - Suman; Shishir ; et al. | 2018-11-15 |
Defect detection and classification based on attributes determined from a standard reference image
Grant 10,127,652 - Gao , et al. November 13, 2 | 2018-11-13 |
System, Method And Non-transitory Computer Readable Medium For Tuning Sensitivies Of, And Determinng A Process Window For, A Modulated Wafer
App 20180144996 - Oram; David Craig ; et al. | 2018-05-24 |
Detecting defects on a wafer using defect-specific and multi-channel information
Grant 9,846,930 - Wu , et al. December 19, 2 | 2017-12-19 |
Adaptive Local Threshold and Color Filtering
App 20170287128 - Huang; Junqing ; et al. | 2017-10-05 |
System and Method for Defining Care Areas in Repeating Structures of Design Data
App 20170286589 - Huang; Junqing ; et al. | 2017-10-05 |
Array mode repeater detection
Grant 9,766,186 - Chen , et al. September 19, 2 | 2017-09-19 |
Repeater detection
Grant 9,766,187 - Chen , et al. September 19, 2 | 2017-09-19 |
Defect detection using structural information
Grant 9,727,047 - Luo , et al. August 8, 2 | 2017-08-08 |
Detecting defects on a wafer using defect-specific information
Grant 9,721,337 - Wu , et al. August 1, 2 | 2017-08-01 |
Adaptive local threshold and color filtering
Grant 9,704,234 - Huang , et al. July 11, 2 | 2017-07-11 |
Methods to Store Dynamic Layer Content Inside a Design File
App 20170154147 - Jayaraman; Thirupurasundari ; et al. | 2017-06-01 |
Detecting Defects on a Wafer Using Defect-Specific and Multi-Channel Information
App 20170091925 - Wu; Kenong ; et al. | 2017-03-30 |
Selecting one or more parameters for inspection of a wafer
Grant 9,601,393 - Lee , et al. March 21, 2 | 2017-03-21 |
Wafer Defect Discovery
App 20170076911 - Chen; Hong ; et al. | 2017-03-16 |
Detecting defects on a wafer using defect-specific and multi-channel information
Grant 9,552,636 - Wu , et al. January 24, 2 | 2017-01-24 |
Wafer defect discovery
Grant 9,518,934 - Chen , et al. December 13, 2 | 2016-12-13 |
Data perturbation for wafer inspection or metrology setup using a model of a difference
Grant 9,360,863 - Thattaisundaram , et al. June 7, 2 | 2016-06-07 |
Wafer Defect Discovery
App 20160123898 - Chen; Hong ; et al. | 2016-05-05 |
Defect Detection Using Structural Information
App 20160104600 - Luo; Qing ; et al. | 2016-04-14 |
Selecting parameters for defect detection methods
Grant 9,310,316 - Wu , et al. April 12, 2 | 2016-04-12 |
Detecting Defects on a Wafer Using Defect-Specific Information
App 20160071256 - Wu; Kenong ; et al. | 2016-03-10 |
Repeater Detection
App 20160061745 - Chen; Hong ; et al. | 2016-03-03 |
Array Mode Repeater Detection
App 20160061749 - Chen; Hong ; et al. | 2016-03-03 |
Detecting Defects on a Wafer Using Defect-Specific and Multi-Channel Information
App 20160027165 - Wu; Kenong ; et al. | 2016-01-28 |
Detecting defects on a wafer using defect-specific information
Grant 9,189,844 - Wu , et al. November 17, 2 | 2015-11-17 |
Wafer inspection using free-form care areas
Grant 9,171,364 - Wu , et al. October 27, 2 | 2015-10-27 |
Defect Detection And Classification Based On Attributes Determined From A Standard Reference Image
App 20150221076 - Gao; Lisheng ; et al. | 2015-08-06 |
Detecting defects on a wafer using defect-specific and multi-channel information
Grant 9,092,846 - Wu , et al. July 28, 2 | 2015-07-28 |
Region based virtual fourier filter
Grant 8,989,479 - Gao , et al. March 24, 2 | 2015-03-24 |
Adaptive Local Threshold and Color Filtering
App 20150043804 - Huang; Junqing ; et al. | 2015-02-12 |
Wafer Inspection Using Free-Form Care Areas
App 20140376802 - Wu; Kenong ; et al. | 2014-12-25 |
Detecting Defects on a Wafer Using Defect-Specific and Multi-Channel Information
App 20140219544 - Wu; Kenong ; et al. | 2014-08-07 |
Detecting Defects on a Wafer Using Defect-Specific Information
App 20140105482 - Wu; Kenong ; et al. | 2014-04-17 |
Selecting Parameters for Defect Detection Methods
App 20140072203 - Wu; Kenong ; et al. | 2014-03-13 |
Region Based Virtual Fourier Filter
App 20120141013 - Gao; Lisheng ; et al. | 2012-06-07 |
Data Perturbation for Wafer Inspection or Metrology Setup
App 20120116733 - Thattaisundaram; Govind ; et al. | 2012-05-10 |
Computer-implemented methods for detecting and/or sorting defects in a design pattern of a reticle
Grant 8,111,900 - Wu , et al. February 7, 2 | 2012-02-07 |
Selecting One or More Parameters for Inspection of a Wafer
App 20110320149 - Lee; Chris ; et al. | 2011-12-29 |
Computer-implemented Methods For Detecting And/or Sorting Defects In A Design Pattern Of A Reticle
App 20100226562 - Wu; Kenong ; et al. | 2010-09-09 |
Computer-implemented methods for detecting and/or sorting defects in a design pattern of a reticle
Grant 7,729,529 - Wu , et al. June 1, 2 | 2010-06-01 |
Methods And Systems For Binning Defects Detected On A Specimen
App 20090290784 - Lin; Jason Z. ; et al. | 2009-11-26 |
Methods and systems for binning defects detected on a specimen
Grant 7,570,800 - Lin , et al. August 4, 2 | 2009-08-04 |
Automatic supervised classifier setup tool for semiconductor defects
Grant 7,359,544 - Gao , et al. April 15, 2 | 2008-04-15 |
Methods and systems for binning defects detected on a specimen
App 20070133860 - Lin; Jason Z. ; et al. | 2007-06-14 |
Computer-implemented methods for detecting and/or sorting defects in a design pattern of a reticle
App 20060291714 - Wu; Kenong ; et al. | 2006-12-28 |
Flexible hybrid defect classification for semiconductor manufacturing
Grant 7,142,992 - Huet , et al. November 28, 2 | 2006-11-28 |
Flexible Hybrid Defect Classification For Semiconductor Manufacturing
App 20060265145 - Huet; Patrick ; et al. | 2006-11-23 |
Automatic supervised classifier setup tool for semiconductor defects
App 20040156540 - Gao, Lisheng ; et al. | 2004-08-12 |
System and method for fusing three-dimensional shape data on distorted images without correcting for distortion
Grant 6,747,646 - Gueziec , et al. June 8, 2 | 2004-06-08 |
System and method for fusing three-dimensional shape data on distorted images without correcting for distortion
App 20010021806 - Gueziec, Andre ; et al. | 2001-09-13 |
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