Patent | Date |
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Lithography system with an embedded cleaning module Grant 11,378,894 - Chien , et al. July 5, 2 | 2022-07-05 |
System and method for performing lithography process in semiconductor device fabrication Grant 10,976,672 - Wu , et al. April 13, 2 | 2021-04-13 |
Semiconductor integrated circuit fabrication with pattern-reversing process Grant 10,685,846 - Chien , et al. | 2020-06-16 |
Lithography System With An Embedded Cleaning Module App 20200064747 - Chien; Shang-Chieh ;   et al. | 2020-02-27 |
Electronic system sharing power with doorbell and power-supply method thereof Grant 10,559,171 - Wu Feb | 2020-02-11 |
Lithography system with an embedded cleaning module Grant 10,459,353 - Chien , et al. Oc | 2019-10-29 |
System And Method For Performing Lithography Process In Semiconductor Device Fabrication App 20190250522 - WU; Jui-Ching ;   et al. | 2019-08-15 |
System and method for performing lithography process in semiconductor device fabrication Grant 10,274,838 - Wu , et al. | 2019-04-30 |
Particle removal system and method thereof Grant 10,067,418 - Chang , et al. September 4, 2 | 2018-09-04 |
Electronic System Sharing Power With Doorbell And Power-supply Method Thereof App 20180190083 - WU; Jui-Ching | 2018-07-05 |
Rotary EUV collector Grant 9,665,007 - Chien , et al. May 30, 2 | 2017-05-30 |
Lens Focusing Method And Optical Module App 20170052385 - WU; JUI-CHING ;   et al. | 2017-02-23 |
System, method and reticle for improved pattern quality in extreme ultraviolet (EUV) lithography and method for forming the reticle Grant 9,558,944 - Hsu , et al. January 31, 2 | 2017-01-31 |
Rotary Euv Collector App 20160370705 - Chien; Shang-Chieh ;   et al. | 2016-12-22 |
Reticle pod Grant 9,412,632 - Lee , et al. August 9, 2 | 2016-08-09 |
System And Method For Performing Lithography Process In Semiconductor Device Fabrication App 20160054664 - Wu; Jui-Ching ;   et al. | 2016-02-25 |
Method for integrated circuit patterning Grant 9,229,326 - Lu , et al. January 5, 2 | 2016-01-05 |
Semiconductor Integrated Circuit Fabrication With Pattern-Reversing Process App 20150332922 - Chien; Ming-Chin ;   et al. | 2015-11-19 |
Particle Removal System And Method Thereof App 20150323862 - Chang; Shu-Hao ;   et al. | 2015-11-12 |
Lithography layer with quenchers to prevent pattern collapse Grant 9,159,559 - Chien , et al. October 13, 2 | 2015-10-13 |
Method for Integrated Circuit Patterning App 20150262836 - LU; YEN-CHENG ;   et al. | 2015-09-17 |
System, Method And Reticle For Improved Pattern Quality In Extreme Ultraviolet (euv) Lithography And Method For Forming The Reticle App 20150255272 - HSU; Chia-Hao ;   et al. | 2015-09-10 |
Method for Lithography Patterning App 20150241776 - Chien; Shang-Chieh ;   et al. | 2015-08-27 |
System, method and reticle for improved pattern quality in extreme ultraviolet (EUV) lithography and method for forming the reticle Grant 9,046,776 - Hsu , et al. June 2, 2 | 2015-06-02 |
Rotary Euv Collector App 20150085264 - Chien; Shang-Chieh ;   et al. | 2015-03-26 |
System And Method For Performing Lithography Process In Semiconductor Device Fabrication App 20140347644 - Wu; Jui-Ching ;   et al. | 2014-11-27 |
Lithography System with an Embedded Cleaning Module App 20140268074 - Chien; Shang-Chieh ;   et al. | 2014-09-18 |
Method and Structure to Improve Process Window for Lithography App 20140256146 - Chien; Shang-Chieh ;   et al. | 2014-09-11 |
System, Method And Reticle For Improved Pattern Quality In Extreme Ultraviolet (euv) Lithography And Method For Forming The Reticle App 20140218714 - HSU; Chia-Hao ;   et al. | 2014-08-07 |
Reticle Pod App 20140116920 - Lee; Tsung-Yen ;   et al. | 2014-05-01 |
Patterning process and materials for lithography Grant 8,563,231 - Wang , et al. October 22, 2 | 2013-10-22 |
Patterning Process And Materials For Lithography App 20130075364 - Wang; Chien-Wei ;   et al. | 2013-03-28 |