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Multi-bed rapid cycle kinetic PSA Grant 10,744,450 - Bhadra , et al. A | 2020-08-18 |
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Pressure swing adsorption process Grant 9,381,460 - Weist, Jr. , et al. July 5, 2 | 2016-07-05 |
Three-in-one drum Grant 9,224,371 - Wu , et al. December 29, 2 | 2015-12-29 |
Pressure Swing Adsorption Process App 20140373713 - Weist, JR.; Edward Landis ;   et al. | 2014-12-25 |
Materials and Methods of Forming Controlled Void App 20140363950 - Vrtis; Raymond Nicholas ;   et al. | 2014-12-11 |
Materials and methods of forming controlled void Grant 8,846,522 - Vrtis , et al. September 30, 2 | 2014-09-30 |
Materials and Methods of Forming Controlled Void App 20130157435 - Vrtis; Raymond Nicholas ;   et al. | 2013-06-20 |
Materials and methods of forming controlled void Grant 8,399,349 - Vrtis , et al. March 19, 2 | 2013-03-19 |
Selective etching and formation of xenon difluoride Grant 8,278,222 - Wu , et al. October 2, 2 | 2012-10-02 |
Selective Etching and Formation of Xenon Difluoride App 20100022095 - Wu; Dingjun ;   et al. | 2010-01-28 |
Adsorbent for water removal from ammonia Grant 7,446,078 - Dong , et al. November 4, 2 | 2008-11-04 |
Removal of transition metal ternary and/or quaternary barrier materials from a substrate Grant 7,371,688 - Ji , et al. May 13, 2 | 2008-05-13 |
Method for etching high dielectric constant materials and for cleaning deposition chambers for high dielectric constant materials Grant 7,357,138 - Ji , et al. April 15, 2 | 2008-04-15 |
Detecting the endpoint of a cleaning process App 20080047579 - Ji; Bing ;   et al. | 2008-02-28 |
Materials And Methods Of Forming Controlled Void App 20080038934 - VRTIS; RAYMOND NICHOLAS ;   et al. | 2008-02-14 |
Method for removing titanium dioxide deposits from a reactor Grant 7,267,842 - Wu , et al. September 11, 2 | 2007-09-11 |
Selective etching of titanium nitride with xenon difluoride App 20070117396 - Wu; Dingjun ;   et al. | 2007-05-24 |
Purification of hydride gases Grant 7,160,360 - Wu , et al. January 9, 2 | 2007-01-09 |
Method and process for reactive gas cleaning of tool parts App 20060254613 - Wu; Dingjun ;   et al. | 2006-11-16 |
Method to protect internal components of semiconductor processing equipment using layered superlattice materials Grant 7,119,032 - Ji , et al. October 10, 2 | 2006-10-10 |
Method for cleaning deposition chambers for high dielectric constant materials Grant 7,055,263 - Wu , et al. June 6, 2 | 2006-06-06 |
Method to protect internal components of semiconductor processing equipment using layered superlattice materials App 20060040508 - Ji; Bing ;   et al. | 2006-02-23 |
Process for titanium nitride removal App 20060016783 - Wu; Dingjun ;   et al. | 2006-01-26 |
Method for enhancing fluorine utilization App 20060017043 - Wu; Dingjun ;   et al. | 2006-01-26 |
Method for removing titanium dioxide deposits from a reactor App 20050202167 - Wu, Dingjun ;   et al. | 2005-09-15 |
Process For Removing Water From Ammonia App 20050120581 - Chiang, Robert Ling ;   et al. | 2005-06-09 |
Purification of hydride gases App 20050120877 - Wu, Dingjun ;   et al. | 2005-06-09 |
Method for cleaning deposition chambers for high dielectric constant materials App 20050108892 - Wu, Dingjun ;   et al. | 2005-05-26 |
Removal of transition metal ternary and/or quaternary barrier materials from a substrate App 20050112901 - Ji, Bing ;   et al. | 2005-05-26 |
Method for etching high dielectric constant materials and for cleaning deposition chambers for high dielectric constant materials App 20040129671 - Ji, Bing ;   et al. | 2004-07-08 |
Adsorbent for moisture removal from fluorine-containing fluids Grant 6,709,487 - Dong , et al. March 23, 2 | 2004-03-23 |
Method for etching high dielectric constant materials and for cleaning deposition chambers for high dielectric constant materials App 20040011380 - Ji, Bing ;   et al. | 2004-01-22 |
Adsorbent for water removal from ammonia App 20040009873 - Dong, Chun Christine ;   et al. | 2004-01-15 |