Wu; Dee

Patent Applications and Registrations

Patent applications and USPTO patent grants for Wu; Dee.The latest application filed is for "bottom electrode assembly, plasma processing apparatus, and method of replacing focus ring".

Company Profile

5.3.11

Wu; Dee - Shanghai CN
Wu; Dee - Edmond OK

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Uniform pumping dual-station vacuum processor Grant 11,387,084 - Gong , et al. July 12, 2	2022-07-12
Plasma reactor and heating apparatus therefor Grant 11,363,680 - Zhao , et al. June 14, 2	2022-06-14
Corrosion-resistant structure for a gas delivery system in a plasma processing apparatus Grant 11,348,763 - Lian , et al. May 31, 2	2022-05-31
Bottom Electrode Assembly, Plasma Processing Apparatus, And Method Of Replacing Focus Ring App 20220165551 - PEI; Jiangtao ; et al.	2022-05-26
Plasma Processing Apparatus And Method Of Adjusting The Same App 20220157570 - WANG; Mingming ; et al.	2022-05-19
Control Method For Multi-zone Active-matrix Temperature Control In Plasma Processing Apparatus App 20220005677 - Ni; Tuqiang ; et al.	2022-01-06
Electrostatic Chuck, Method Of Manufacturing Electrostatic Chuck, And Plasma Processing Apparatus App 20210118716 - YE; Rubin ; et al.	2021-04-22
Corrosion-resistant Structure For A Gas Delivery System In A Plasma Processing Apparatus App 20200381213 - LIAN; Zengdi ; et al.	2020-12-03
Temperature Control Apparatus for Semiconductor Processing Equipment, And Temperature Control Method for The Same App 20200211873 - Zhao; Kui ; et al.	2020-07-02
Plasma Reactor and Heating Apparatus Therefor App 20200214087 - Zhao; Kui ; et al.	2020-07-02
Uniform Pumping Dual-station Vacuum Processor App 20190139745 - GONG; Yuejun ; et al.	2019-05-09
Electrode Structure For Icp Etcher App 20170186585 - Zuo; Rason ; et al.	2017-06-29
Multi-zone Active-matrix Temperature Control System And Temperature Control Method, And Electrostatic Chuck And Plasma Processing Apparatus Apply Thereof App 20170186592 - Ni; Tuqiang ; et al.	2017-06-29
Image Segmentation System And Method App 20100189319 - Wu; Dee ; et al.	2010-07-29

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