Wright; Marilyn I.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Wright; Marilyn I..The latest application filed is for "method for reducing pattern deformation and photoresist poisoning in semiconductor device fabrication".

Company Profile

0.18.1

Wright; Marilyn I. - Austin TX
Wright; Marilyn I. - Sunnyvale CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Method and apparatus for determining grid dimensions using scatterometry Grant 7,262,864 - Markle , et al. August 28, 2	2007-08-28
Capping layer for reducing amorphous carbon contamination of photoresist in semiconductor device manufacture; and process for making same Grant 7,109,101 - Wright , et al. September 19, 2	2006-09-19
Method for patterning a feature using a trimmed hardmask Grant 6,913,958 - Plat , et al. July 5, 2	2005-07-05
Antireflective bi-layer hardmask including a densified amorphous carbon layer Grant 6,900,002 - Plat , et al. May 31, 2	2005-05-31
L-shaped spacer incorporating or patterned using amorphous carbon or CVD organic materials Grant 6,893,967 - Wright , et al. May 17, 2	2005-05-17
CVD organic polymer film for advanced gate patterning Grant 6,864,556 - You , et al. March 8, 2	2005-03-08
Method and apparatus for determining contact opening dimensions using scatterometry Grant 6,804,014 - Markle , et al. October 12, 2	2004-10-12
Method and apparatus for determining critical dimension variation in a line structure Grant 6,773,939 - Wright August 10, 2	2004-08-10
Method and apparatus for identifying misregistration in a complimentary phase shift mask process Grant 6,774,998 - Wright , et al. August 10, 2	2004-08-10
Method and apparatus for detecting necking over field/active transitions Grant 6,766,215 - Lensing , et al. July 20, 2	2004-07-20
Method for reducing pattern deformation and photoresist poisoning in semiconductor device fabrication Grant 6,764,949 - Bonser , et al. July 20, 2	2004-07-20
Method for reducing gate line deformation and reducing gate line widths in semiconductor devices Grant 6,764,947 - Chan , et al. July 20, 2	2004-07-20
Method and apparatus for performing overlay measurements using scatterometry Grant 6,716,646 - Wright , et al. April 6, 2	2004-04-06
Method and apparatus for analyzing line structures Grant 6,697,153 - Wright , et al. February 24, 2	2004-02-24
Method for reducing pattern deformation and photoresist poisoning in semiconductor device fabrication App 20040023475 - Bonser, Douglas J. ; et al.	2004-02-05
Method and apparatus for detecting necking over field/active transitions Grant 6,657,716 - Lensing , et al. December 2, 2	2003-12-02
Method and apparatus for determining column dimensions using scatterometry Grant 6,650,423 - Markle , et al. November 18, 2	2003-11-18
Method and apparatus for monitoring wafer stress Grant 6,509,201 - Wright January 21, 2	2003-01-21
Method and apparatus for determining process layer conformality Grant 6,479,309 - Wright November 12, 2	2002-11-12

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