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Patent applications and USPTO patent grants for Wood, II; Obert R..The latest application filed is for "extreme ultraviolet (euv) lithography mask".
Patent | Date |
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Extreme ultraviolet (EUV) lithography mask Grant 10,802,393 - Sun , et al. October 13, 2 | 2020-10-13 |
Extreme Ultraviolet (euv) Lithography Mask App 20190113836 - SUN; Lei ;   et al. | 2019-04-18 |
Pellicle with aerogel support frame Grant 9,547,232 - Levinson , et al. January 17, 2 | 2017-01-17 |
Pellicle With Aerogel Support Frame App 20160161857 - Levinson; Harry J. ;   et al. | 2016-06-09 |
Extreme Ultraviolet Lithography (euvl) Alternating Phase Shift Mask App 20140170533 - Sun; Lei ;   et al. | 2014-06-19 |
Hydrocarbon getter for lithographic exposure tools Grant 7,671,348 - Wood, II March 2, 2 | 2010-03-02 |
Lithographic Alignment Marks App 20090135390 - La Fontaine; Bruno ;   et al. | 2009-05-28 |
Hydrocarbon Getter For Lithographic Exposure Tools App 20090002647 - WOOD, II; Obert R. | 2009-01-01 |
Laser surgical system Grant 4,583,539 - Karlin , et al. April 22, 1 | 1986-04-22 |
Low voltage operation of arc discharge devices Grant 4,504,955 - Macklin , et al. March 12, 1 | 1985-03-12 |
Foil electrode SPER light source Grant 4,441,189 - Macklin , et al. April 3, 1 | 1984-04-03 |
SPER Device for material working Grant 4,411,733 - Macklin , et al. October 25, 1 | 1983-10-25 |
External control of recombination rate for electron-ion recombination lasers Grant 4,388,720 - Silfvast , et al. June 14, 1 | 1983-06-14 |
Segmented plasma excitation-recombination laser Grant 4,336,506 - Silfvast , et al. June 22, 1 | 1982-06-22 |
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