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name:-0.0066299438476562
name:-0.0048608779907227
name:-0.0027229785919189
Woo; Hyung Je Patent Filings

Woo; Hyung Je

Patent Applications and Registrations

Patent applications and USPTO patent grants for Woo; Hyung Je.The latest application filed is for "edge uniformity tunability on bipolar electrostatic chuck".

Company Profile
1.5.6
  • Woo; Hyung Je - San Jose CA
  • Woo; Hyung Je - Morgan Hill CA
  • Woo; Hyung Je - Seongnam-si KR
  • Woo; Hyung Je - Gyeonggi-do KR
*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.
Patent Activity
PatentDate
High temperature electrostatic chuck
Grant 11,133,212 - Khaja , et al. September 28, 2
2021-09-28
Edge Uniformity Tunability On Bipolar Electrostatic Chuck
App 20210159107 - Woo; Hyung Je
2021-05-27
Reduced Defect Deposition Processes
App 20210130949 - Min; Xiaoquan ;   et al.
2021-05-06
High Temperature Electrostatic Chuck
App 20190355608 - KHAJA; Abdul Aziz ;   et al.
2019-11-21
Apparatus for treating substrate
Grant 10,103,018 - Kim , et al. October 16, 2
2018-10-16
Apparatus and method of treating a substrate
Grant 9,978,567 - Ham , et al. May 22, 2
2018-05-22
Antenna units, substrate treating apparatuses including the same, and substrate treating methods using the apparatuses
Grant 9,496,121 - Kim , et al. November 15, 2
2016-11-15
Apparatus And Method Of Treating A Substrate
App 20150214016 - HAM; Yong-Hyun ;   et al.
2015-07-30
Apparatus For Treating Substrate
App 20140034240 - KIM; Hyung Joon ;   et al.
2014-02-06
Antenna Units, Substrate Treating Apparatuses Including The Same, And Substrate Treating Methods Using The Apparatuses
App 20120305527 - Kim; Hyung Joon ;   et al.
2012-12-06

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