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Patent applications and USPTO patent grants for Woo; Hyung Je.The latest application filed is for "edge uniformity tunability on bipolar electrostatic chuck".
Patent | Date |
---|---|
High temperature electrostatic chuck Grant 11,133,212 - Khaja , et al. September 28, 2 | 2021-09-28 |
Edge Uniformity Tunability On Bipolar Electrostatic Chuck App 20210159107 - Woo; Hyung Je | 2021-05-27 |
Reduced Defect Deposition Processes App 20210130949 - Min; Xiaoquan ;   et al. | 2021-05-06 |
High Temperature Electrostatic Chuck App 20190355608 - KHAJA; Abdul Aziz ;   et al. | 2019-11-21 |
Apparatus for treating substrate Grant 10,103,018 - Kim , et al. October 16, 2 | 2018-10-16 |
Apparatus and method of treating a substrate Grant 9,978,567 - Ham , et al. May 22, 2 | 2018-05-22 |
Antenna units, substrate treating apparatuses including the same, and substrate treating methods using the apparatuses Grant 9,496,121 - Kim , et al. November 15, 2 | 2016-11-15 |
Apparatus And Method Of Treating A Substrate App 20150214016 - HAM; Yong-Hyun ;   et al. | 2015-07-30 |
Apparatus For Treating Substrate App 20140034240 - KIM; Hyung Joon ;   et al. | 2014-02-06 |
Antenna Units, Substrate Treating Apparatuses Including The Same, And Substrate Treating Methods Using The Apparatuses App 20120305527 - Kim; Hyung Joon ;   et al. | 2012-12-06 |
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