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Patent applications and USPTO patent grants for Wong; Yuen-Kui.The latest application filed is for "plasma reactor with heated source of a polymer-hardening precursor material".
Patent | Date |
---|---|
Plasma reactor with heated source of a polymer-hardening precursor material Grant 6,036,877 - Collins , et al. March 14, 2 | 2000-03-14 |
Dry-etching of indium and tin oxides Grant 6,036,876 - Chen , et al. March 14, 2 | 2000-03-14 |
Dry-etch of indium and tin oxides with C2H5I gas Grant 5,843,277 - Goto , et al. December 1, 1 | 1998-12-01 |
High-rate dry-etch of indium and tin oxides by hydrogen and halogen radicals such as derived from HCl gas Grant 5,607,602 - Su , et al. March 4, 1 | 1997-03-04 |
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