Wong; Kwok Manus
Patent Applications and Registrations
Patent applications and USPTO patent grants for Wong; Kwok Manus.The latest application filed is for "substrate support having fluid channel".
- Wong; Kwok Manus - San Jose CA
| Patent | Date |
|---|---|
| Substrate support having fluid channel Grant 8,279,577 - Nguyen , et al. October 2, 2 | 2012-10-02 |
| Substrate Support Having Fluid Channel App 20110024047 - NGUYEN; Andrew ; et al. | 2011-02-03 |
| Substrate support having heat transfer system Grant 7,768,765 - Nguyen , et al. August 3, 2 | 2010-08-03 |
| Substrate Support Having Heat Transfer System App 20070165356 - Nguyen; Andrew ; et al. | 2007-07-19 |
| Substrate support having heat transfer system Grant 7,221,553 - Nguyen , et al. May 22, 2 | 2007-05-22 |
| Heated catalytic treatment of an effluent gas from a substrate fabrication process Grant 6,824,748 - Kaushal , et al. November 30, 2 | 2004-11-30 |
| Substrate support having heat transfer system App 20040212947 - Nguyen, Andrew ; et al. | 2004-10-28 |
| Method and apparatus for heating a semiconductor wafer plasma reactor vacuum chamber Grant 6,759,624 - Kumar , et al. July 6, 2 | 2004-07-06 |
| Treatment of hazardous gases in effluent Grant 6,673,323 - Bhatnagar , et al. January 6, 2 | 2004-01-06 |
| Method and apparatus for heating a semiconductor wafer plasma reactor vacuum chamber App 20030209526 - Kumar, Ananda H. ; et al. | 2003-11-13 |
| Method and apparatus for improving exhaust gas consumption in an exhaust conduit Grant 6,642,489 - Ramaswamy , et al. November 4, 2 | 2003-11-04 |
| Plasma processing chamber having magnetic assembly and method App 20030192646 - Wu, Robert W. ; et al. | 2003-10-16 |
| Plasma chamber support with coupled electrode Grant 6,494,958 - Shamouilian , et al. December 17, 2 | 2002-12-17 |
| Heated catalytic treatment of an effluent gas from a substrate fabrication process App 20020182131 - Kaushal, Tony S. ; et al. | 2002-12-05 |
| Plasma chamber support having dual electrodes Grant 6,478,924 - Shamouilian , et al. November 12, 2 | 2002-11-12 |
| Method and apparatus for improving exhaust gas consumption in an exhaust conduit App 20020088797 - Ramaswamy, Kartik ; et al. | 2002-07-11 |
| Erosion resistant gas energizer Grant 6,391,146 - Bhatnagar , et al. May 21, 2 | 2002-05-21 |
| Porous ceramic liner for a plasma source Grant 6,367,412 - Ramaswamy , et al. April 9, 2 | 2002-04-09 |
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