Wolschrijn; Bastiaan Theodoor

Patent Applications and Registrations

Patent applications and USPTO patent grants for Wolschrijn; Bastiaan Theodoor.The latest application filed is for "method for removing a contamination layer from an optical surface and arrangement therefor".

Company Profile

0.23.20

Wolschrijn; Bastiaan Theodoor - Abcoude NL
Wolschrijn; Bastiaan Theodoor - Aboude NL
Wolschrijn, Bastiaan Theodoor - Amsterdam NL

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Method for removing a contamination layer from an optical surface and arrangement therefor Grant 8,980,009 - Ehm , et al. March 17, 2	2015-03-17
Lithographic apparatus comprising an internal sensor and a mini-reactor, and method for treating a sensing surface of the internal sensor Grant 8,928,855 - Moors , et al. January 6, 2	2015-01-06
Optical arrangement, in particular projection exposure apparatus for EUV lithography, as well as reflective optical element with reduced contamination Grant 8,585,224 - Ehm , et al. November 19, 2	2013-11-19
Optical element with at least one electrically conductive region, and illumination system with the optical element Grant 8,553,200 - Wolschrijn , et al. October 8, 2	2013-10-08
Method For Removing A Contamination Layer From An Optical Surface And Arrangement Therefor App 20130186430 - Ehm; Dirk Heinrich ; et al.	2013-07-25
Optical Arrangement, In Particular Projection Exposure Apparatus For Euv Lithography, As Well As Reflective Optical Element With Reduced Contamination App 20130148200 - Ehm; Dirk Heinrich ; et al.	2013-06-13
Method for removing a contamination layer from an optical surface and arrangement therefor as well as a method for generating a cleaning gas and arrangement therefor Grant 8,419,862 - Ehm , et al. April 16, 2	2013-04-16
Optical arrangement, in particular projection exposure apparatus for EUV lithography, as well as reflective optical element with reduced contamination Grant 8,382,301 - Ehm , et al. February 26, 2	2013-02-26
Method for removing contamination on optical surfaces and optical arrangement Grant 8,279,397 - Ehm , et al. October 2, 2	2012-10-02
Optical arrangement and EUV lithography device with at least one heated optical element, operating methods, and methods for cleaning as well as for providing an optical element Grant 7,959,310 - Ehm , et al. June 14, 2	2011-06-14
Optical apparatus, lithographic apparatus and device manufacturing method Grant 7,935,218 - Moors , et al. May 3, 2	2011-05-03
Lithographic apparatus, and device manufacturing method Grant 7,928,412 - Van Herpen , et al. April 19, 2	2011-04-19
Lithographic Apparatus Comprising An Internal Sensor And A Mini-reactor, And Method For Treating A Sensing Surface Of The Internal Sensor App 20110037961 - Moors; Johannes Hubertus Josephina ; et al.	2011-02-17
Method for removing a contamination layer from an optical surface and arrangement therefor as well as a method for generating a cleaning gas and arrangement therefor App 20100288302 - Ehm; Dirk Heinrich ; et al.	2010-11-18
Radical cleaning arrangement for a lithographic apparatus Grant 7,812,330 - Banine , et al. October 12, 2	2010-10-12
Optical Element With At Least One Electrically Conductive Region, And Illumination System With The Optical Element App 20100231877 - Wolschrijn; Bastiaan Theodoor ; et al.	2010-09-16
Optical system for radiation in the EUV-wavelength range and method for measuring a contamination status of EUV-reflective elements Grant 7,763,870 - Ehm , et al. July 27, 2	2010-07-27
Lithographic device, device manufacturing method and device manufactured thereby Grant 7,684,012 - Jacobs , et al. March 23, 2	2010-03-23
Cleaning method, apparatus and cleaning system Grant 7,671,347 - Ehm , et al. March 2, 2	2010-03-02
Method For Removing Contamination On Optical Surfaces And Optical Arrangement App 20090314931 - EHM; Dirk Heinrich ; et al.	2009-12-24
Lithographic apparatus, and device manufacturing method Grant 7,629,594 - Van Herpen , et al. December 8, 2	2009-12-08
Optical Arrangement, In Particular Projection Exposure Apparatus For Euv Lithography, As Well As Reflective Optical Element With Reduced Contamination App 20090231707 - EHM; Dirk Heinrich ; et al.	2009-09-17
Lithographic Apparatus, and Device Manufacturing Method App 20090173360 - VAN HERPEN; Maarten Marinus Johannes Wilhelmus ; et al.	2009-07-09
Radical cleaning arrangement for a lithographic apparatus App 20090072168 - Banine; Vadim Yevgenyevich ; et al.	2009-03-19
Lithographic apparatus, system and device manufacturing method Grant 7,491,951 - Van Der Velden , et al. February 17, 2	2009-02-17
Radical cleaning arrangement for a lithographic apparatus Grant 7,462,850 - Banine , et al. December 9, 2	2008-12-09
Lithographic apparatus having a monitoring device for detecting contamination Grant 7,405,417 - Stevens , et al. July 29, 2	2008-07-29
Lithographic apparatus and method App 20080151201 - Storm; Arnoldus Jan ; et al.	2008-06-26
Optical Arrangement And Euv Lithography Device With At Least One Heated Optical Element, Operating Methods, And Methods For Cleaning As Well As For Providing An Optical Element App 20080143981 - EHM; Dirk Heinrich ; et al.	2008-06-19
Lithographic apparatus, and device manufacturing method App 20080083885 - Wilhelmus Van Herpen; Maarten Marinus Johannes ; et al.	2008-04-10
Cleaning method, apparatus and cleaning system App 20080083878 - Ehm; Dirk Heinrich ; et al.	2008-04-10
Lithographic apparatus and device manufacturing method Grant 7,279,690 - Bakker , et al. October 9, 2	2007-10-09
Optical apparatus, lithographic apparatus and device manufacturing method App 20070158579 - Moors; Johannes Hubertus Josephina ; et al.	2007-07-12
Radical cleaning arrangement for a lithographic apparatus App 20070145295 - Banine; Vadim Yevgenyevich ; et al.	2007-06-28
Lithographic apparatus, system and device manufacturing method App 20070146660 - Lorenz Van Der Velden; Marc Hubertus ; et al.	2007-06-28
Lithographic apparatus having a monitoring device for detecting contamination App 20070138414 - Stevens; Lucas Henricus Johannes ; et al.	2007-06-21
Lithographic projection apparatus, device manufacturing method and device manufactured thereby App 20070085984 - Banine; Vadim Yevgenyevich ; et al.	2007-04-19
Lithographic apparatus and device manufacturing method App 20060219950 - Bakker; Levinus Pieter ; et al.	2006-10-05
Method and device for measuring contamination of a surface of a component of a lithographic apparatus App 20040227102 - Kurt, Ralph ; et al.	2004-11-18

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