WITTY; Derek R.

Patent Applications and Registrations

Patent applications and USPTO patent grants for WITTY; Derek R..The latest application filed is for "adaptive slurry dispense system".

Company Profile

0.45.61

WITTY; Derek R. - Fremont CA
Witty; Derek R - Fremont CA US
Witty; Derek R. - San Jose CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Adaptive Slurry Dispense System App 20220193858 - DESHPANDE; Sameer ; et al.	2022-06-23
Conformal amorphous carbon for spacer and spacer protection applications Grant 10,236,182 - Kim , et al.	2019-03-19
Ultra-conformal carbon film deposition Grant 10,074,534 - Behera , et al. September 11, 2	2018-09-11
PEALD of films comprising silicon nitride Grant 9,984,868 - Nguyen , et al. May 29, 2	2018-05-29
Ultra-conformal Carbon Film Deposition App 20170301537 - BEHERA; Swayambhu P. ; et al.	2017-10-19
Ultra-conformal carbon film deposition Grant 9,721,784 - Behera , et al. August 1, 2	2017-08-01
Conformal Amorphous Carbon For Spacer And Spacer Protection Applications App 20170170015 - KIM; Sungjin ; et al.	2017-06-15
Conformal amorphous carbon for spacer and spacer protection applications Grant 9,570,303 - Kim , et al. February 14, 2	2017-02-14
Apparatus and method for substrate clamping in a plasma chamber Grant 9,337,072 - Balasubramanian , et al. May 10, 2	2016-05-10
Ultra-conformal Carbon Film Deposition Layer-by-layer Deposition Of Carbon-doped Oxide Films App 20160005596 - BEHERA; Swayambhu P. ; et al.	2016-01-07
Conformal Amorphous Carbon For Spacer And Spacer Protection Applications App 20150279676 - KIM; Sungjin ; et al.	2015-10-01
Conformal Amorphous Carbon For Spacer And Spacer Protection Applications App 20140349490 - Kim; Sungjin ; et al.	2014-11-27
PEALD of Films Comprising Silicon Nitride App 20140273529 - Nguyen; Victor ; et al.	2014-09-18
Vbd And Tddb Improvement Thru Interface Engineering App 20140273516 - XIA; Li-Qun ; et al.	2014-09-18
Copper oxide removal techniques Grant 8,758,638 - Ye , et al. June 24, 2	2014-06-24
Deposition of an amorphous carbon layer with high film density and high etch selectivity Grant 8,679,987 - Reilly , et al. March 25, 2	2014-03-25
Plasma-enhanced chemical vapor deposition of crystalline germanium Grant 8,598,020 - Nguyen , et al. December 3, 2	2013-12-03
Low temperature plasma enhanced chemical vapor deposition of conformal silicon carbon nitride and silicon nitride films Grant 8,586,487 - Nguyen , et al. November 19, 2	2013-11-19
Deposition Of An Amorphous Carbon Layer With High Film Density And High Etch Selectivity App 20130302996 - REILLY; Patrick ; et al.	2013-11-14
Boron film interface engineering Grant 8,563,090 - Balseanu , et al. October 22, 2	2013-10-22
Method of forming flash memory with ultraviolet treatment Grant 8,501,568 - Balseanu , et al. August 6, 2	2013-08-06
Engineering Dielectric Films For Cmp Stop App 20130189841 - Balseanu; Mihaela ; et al.	2013-07-25
Conformal Amorphous Carbon For Spacer And Spacer Protection Applications App 20130189845 - Kim; Sungjin ; et al.	2013-07-25
Low Temperature Plasma Enhanced Chemical Vapor Deposition Of Conformal Silicon Carbon Nitride And Silicon Nitride Films App 20130183835 - Nguyen; Victor ; et al.	2013-07-18
Air gap integration scheme Grant 8,389,376 - Demos , et al. March 5, 2	2013-03-05
Silicon dioxide layer deposited with BDEAS Grant 8,343,881 - Lee , et al. January 1, 2	2013-01-01
Method for depositing boron-rich films for lithographic mask applications Grant 8,337,950 - Nguyen , et al. December 25, 2	2012-12-25
Copper Oxide Removal Techniques App 20120289049 - YE; WEIFENG ; et al.	2012-11-15
Adhesion Improvement Of Dielectric Barrier To Copper By The Addition Of Thin Interface Layer App 20120276301 - Lee; Yong-Won ; et al.	2012-11-01
Methods to improve the in-film defectivity of PECVD amorphous carbon films Grant 8,282,734 - Padhi , et al. October 9, 2	2012-10-09
Method of forming a non-volatile memory having a silicon nitride charge trap layer Grant 8,252,653 - Balseanu , et al. August 28, 2	2012-08-28
Method For Depositing An Amorphous Carbon Film With Improved Density And Step Coverage App 20120208373 - PADHI; DEENESH ; et al.	2012-08-16
Methods To Improve The In-film Defectivity Of Pecvd Amorphous Carbon Films App 20120204795 - Padhi; Deenesh ; et al.	2012-08-16
Method To Increase Silicon Nitride Tensile Stress Using Nitrogen Plasma In-situ Treatment And Ex-situ Uv Cure App 20120196450 - Balseanu; Mihaela ; et al.	2012-08-02
Dual Delivery Chamber Design App 20120097330 - Iyengar; Prahallad ; et al.	2012-04-26
Boron nitride and boron-nitride derived materials deposition method Grant 8,148,269 - Balseanu , et al. April 3, 2	2012-04-03
Method to increase silicon nitride tensile stress using nitrogen plasma in-situ treatment and ex-situ UV cure Grant 8,138,104 - Balseanu , et al. March 20, 2	2012-03-20
Plasma-enhanced Chemical Vapor Deposition Of Crystalline Germanium App 20110315992 - Nguyen; Victor T. ; et al.	2011-12-29
Method of depositing boron nitride and boron nitride-derived materials Grant 8,084,105 - Huh , et al. December 27, 2	2011-12-27
Silicon Dioxide Layer Deposited With Bdeas App 20110298099 - LEE; Yong-Won ; et al.	2011-12-08
Methods to obtain low k dielectric barrier with superior etch resistivity Grant 7,964,442 - Xu , et al. June 21, 2	2011-06-21
Method For Depositing An Amorphous Carbon Film With Improved Density And Step Coverage App 20110104400 - Padhi; Deenesh ; et al.	2011-05-05
Apparatus And Method For Substrate Clamping In A Plasma Chamber App 20110090613 - Balasubramanian; Ganesh ; et al.	2011-04-21
Methods and systems for forming at least one dielectric layer Grant 7,871,926 - Xia , et al. January 18, 2	2011-01-18
Method for depositing an amorphous carbon film with improved density and step coverage Grant 7,867,578 - Padhi , et al. January 11, 2	2011-01-11
Method of forming non-volatile memory having charge trap layer with compositional gradient Grant 7,816,205 - Balseanu , et al. October 19, 2	2010-10-19
Method to deposit functionally graded dielectric films via chemical vapor deposition using viscous precursors Grant 7,802,538 - Padhi , et al. September 28, 2	2010-09-28
Engineering Boron-rich Films For Lithographic Mask Applications App 20100233633 - Nguyen; Victor ; et al.	2010-09-16
Method to increase the compressive stress of PECVD dielectric films Grant 7,790,635 - Balseanu , et al. September 7, 2	2010-09-07
Novel Air Gap Integration Scheme App 20100151671 - Demos; Alexandros T. ; et al.	2010-06-17
Boron derived materials deposition method Grant 7,704,816 - Huh , et al. April 27, 2	2010-04-27
Non-volatile Memory Having Charge Trap Layer With Compositional Gradient App 20100096688 - Balseanu; Mihaela ; et al.	2010-04-22
Flash Memory With Treated Charge Trap Layer App 20100099247 - Balseanu; Mihaela ; et al.	2010-04-22
Boron Film Interface Engineering App 20100098884 - BALSEANU; MIHAELA ; et al.	2010-04-22
Non-volatile Memory Having Silicon Nitride Charge Trap Layer App 20100096687 - BALSEANU; Mihaela ; et al.	2010-04-22
Air gap integration scheme Grant 7,670,924 - Demos , et al. March 2, 2	2010-03-02
Multi-stage curing of low K nano-porous films Grant 7,611,996 - Schmitt , et al. November 3, 2	2009-11-03
Adhesion And Electromigration Improvement Between Dielectric And Conductive Layers App 20090269923 - Lee; Sang M. ; et al.	2009-10-29
Boron Nitride And Boron-nitride Derived Materials Deposition Method App 20090263972 - Balseanu; Mihaela ; et al.	2009-10-22
Techniques promoting adhesion of porous low K film to underlying barrier layer Grant 7,547,643 - Schmitt , et al. June 16, 2	2009-06-16
Adhesion Improvement Of Dielectric Barrier To Copper By The Addition Of Thin Interface Layer App 20090107626 - Lee; Yong-Won ; et al.	2009-04-30
Methods and Systems for Forming at Least One Dielectric Layer App 20090104764 - Xia; Li-Qun ; et al.	2009-04-23
Methods For High Temperature Deposition Of An Amorphous Carbon Layer App 20090093128 - SEAMONS; MARTIN JAY ; et al.	2009-04-09
Method For Forming An Air Gap In Multilevel Interconnect Structure App 20090093100 - Xia; Li-Qun ; et al.	2009-04-09
Methods To Obtain Low K Dielectric Barrier With Superior Etch Resistivity App 20090093132 - XU; HUIWEN ; et al.	2009-04-09
Methods to improve the in-film defectivity of PECVD amorphous carbon films Grant 7,514,125 - Padhi , et al. April 7, 2	2009-04-07
Formation of low K material utilizing process having readily cleaned by-products Grant 7,501,354 - Ho , et al. March 10, 2	2009-03-10
Methods To Improve The In-film Defectivity Of Pecvd Amorphous Carbon Films App 20090044753 - Padhi; Deenesh ; et al.	2009-02-19
Boron Derived Materials Deposition Method App 20090017640 - Huh; Jeong-Uk ; et al.	2009-01-15
Boron Nitride And Boron Nitride-derived Materials Deposition Method App 20080292798 - Huh; Jeong-Uk ; et al.	2008-11-27
Plasma-induced Charge Damage Control For Plasma Enhanced Chemical Vapor Deposition Processes App 20080254233 - LEE; KWANGDUK DOUGLAS ; et al.	2008-10-16
Novel Air Gap Integration Scheme App 20080182404 - DEMOS; ALEXANDROS T. ; et al.	2008-07-31
Method For Depositing An Amorphous Carbon Film With Improved Density And Step Coverage App 20080153311 - Padhi; Deenesh ; et al.	2008-06-26
Method To Increase The Compressive Stress Of Pecvd Dielectric Films App 20080146007 - Balseanu; Mihaela ; et al.	2008-06-19
Multi-stage Curing Of Low K Nano-porous Films App 20080099920 - Schmitt; Francimar ; et al.	2008-05-01
Apparatus And Method For Substrate Clamping In A Plasma Chamber App 20080084650 - Balasubramanian; Ganesh ; et al.	2008-04-10
Method To Increase Silicon Nitride Tensile Stress Using Nitrogen Plasma In-situ Treatment And Ex-situ Uv Cure App 20080020591 - Balseanu; Mihaela ; et al.	2008-01-24
Methods To Improve The In-film Defectivity Of Pecvd Amorphous Carbon Films App 20070295272 - Padhi; Deenesh ; et al.	2007-12-27
Method To Deposit Functionally Graded Dielectric Films Via Chemical Vapor Deposition Using Viscous Precursors App 20070079753 - Padhi; Deenesh ; et al.	2007-04-12
Method to deposit functionally graded dielectric films via chemical vapor deposition using viscous precursors Grant 7,166,544 - Padhi , et al. January 23, 2	2007-01-23
In-situ oxide capping after CVD low k deposition Grant 7,112,541 - Xia , et al. September 26, 2	2006-09-26
Formation of low K material utilizing process having readily cleaned by-products App 20060160374 - Ho; Dustin W. ; et al.	2006-07-20
Tensile and compressive stressed materials for semiconductors App 20060105106 - Balseanu; Mihaela ; et al.	2006-05-18
High-power dielectric seasoning for stable wafer-to-wafer thickness uniformity of dielectric CVD films App 20060093756 - Rajagopalan; Nagarajan ; et al.	2006-05-04
Post treatment of low k dielectric films Grant 7,018,941 - Cui , et al. March 28, 2	2006-03-28
Method to deposit functionally graded dielectric films via chemical vapor deposition using viscous precursors App 20060046520 - Padhi; Deenesh ; et al.	2006-03-02
In-situ oxide capping after CVD low k deposition App 20050250348 - Xia, Li-Qun ; et al.	2005-11-10
Post Treatment Of Low K Dielectric Films App 20050239293 - Cui, Zhenjiang ; et al.	2005-10-27
Multi-stage curing of low K nano-porous films App 20050230834 - Schmitt, Francimar ; et al.	2005-10-20
Techniques promoting adhesion of porous low K film to underlying barrier layer App 20050233591 - Schmitt, Francimar ; et al.	2005-10-20
Method of operating high density plasma CVD reactor with combined inductive and capacitive coupling Grant 6,465,051 - Sahin , et al. October 15, 2	2002-10-15
Nitrogen Treatment Of Polished Halogen-doped Silicon Glass App 20010033900 - M'SAAD, HICHEM ; et al.	2001-10-25

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