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Patent applications and USPTO patent grants for Withers, Jr.; Howard Paul.The latest application filed is for "process for making trisilylamine".
Patent | Date |
---|---|
Process for making trisilylamine Grant 9,463,978 - Agarwal , et al. October 11, 2 | 2016-10-11 |
Process For Making Trisilylamine App 20160145102 - Agarwal; Rajiv Krishan ;   et al. | 2016-05-26 |
Process for making trisilylamine Grant 9,284,198 - Agarwal , et al. March 15, 2 | 2016-03-15 |
Electrolytic apparatus, system and method for the safe production of nitrogen trifluoride Grant 8,945,367 - Hart , et al. February 3, 2 | 2015-02-03 |
Process For Making Trisilylamine App 20150004089 - Agarwal; Rajiv Krishan ;   et al. | 2015-01-01 |
Aminosilanes And Methods For Making Same App 20120277457 - Lehmann; John Francis ;   et al. | 2012-11-01 |
Electrolytic Apparatus, System and Method for the Safe Production of Nitrogen Trifluoride App 20120181182 - Hart; James Joseph ;   et al. | 2012-07-19 |
Process for purification of germane Grant 7,087,102 - Withers, Jr. , et al. August 8, 2 | 2006-08-08 |
Process for the purification of NF.sub.3 Grant 7,074,378 - Hart , et al. July 11, 2 | 2006-07-11 |
Process for the reduction or elimination of NH3/HF byproduct in the manufacture of nitrogen trifluoride Grant 6,790,428 - Tsirukis , et al. September 14, 2 | 2004-09-14 |
On-line UV-Visible light halogen gas analyzer for semiconductor processing effluent monitoring Grant 6,686,594 - Ji , et al. February 3, 2 | 2004-02-03 |
Organosilicon precursors for interlayer dielectric films with low dielectric constants Grant 6,583,048 - Vincent , et al. June 24, 2 | 2003-06-24 |
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