Wirth; Paul

Patent Applications and Registrations

Patent applications and USPTO patent grants for Wirth; Paul.The latest application filed is for "mass flow control based on micro-electromechanical devices".

Company Profile

3.6.14

Wirth; Paul - Kalispell MT
Wirth; Paul - Kalispel MT
Wirth; Paul - Columbia Falls MT

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Mass Flow Control Based On Micro-electromechanical Devices App 20220083081 - Merry; Nir ; et al.	2022-03-17
Servo Control Of A Lift Apparatus And Methods Of Use Thereof App 20210265194 - Wirth; Paul ; et al.	2021-08-26
Calibration Of An Aligner Station Of A Processing System App 20210057256 - Bergantz; Nicholas Michael ; et al.	2021-02-25
Walking beam chamber Grant 10,923,374 - Wirth February 16, 2	2021-02-16
Walking Beam Chamber App 20210028040 - Wirth; Paul	2021-01-28
Microelectronic substrate electro processing system Grant 10,837,119 - Moore , et al. November 17, 2	2020-11-17
Microelectronic Substrate Electro Processing System App 20180298513 - Moore; Robert B. ; et al.	2018-10-18
Microelectronic substrate electro processing system Grant 10,087,544 - Moore , et al. October 2, 2	2018-10-02
Microelectronic Substrate Electro Processing System App 20160298255 - Moore; Robert B. ; et al.	2016-10-13
Microelectronic substrate electro processing system Grant 9,399,827 - Moore , et al. July 26, 2	2016-07-26
Anneal module for semiconductor wafers Grant 9,245,767 - Francischetti , et al. January 26, 2	2016-01-26
Anneal Module For Semiconductor Wafers App 20150069043 - Francischetti; Vincent Steffan ; et al.	2015-03-12
Microelectronic Substrate Electro Processing System App 20140318977 - Moore; Robert B. ; et al.	2014-10-30
Integrated tool assemblies with intermediate processing modules for processing of microfeature workpieces Grant 7,531,060 - Wirth , et al. May 12, 2	2009-05-12
Transfer devices and methods for handling microfeature workpieces within an environment of a processing machine App 20070020080 - Wirth; Paul	2007-01-25
End-effectors and associated control and guidance systems and methods App 20070014656 - Harris; Randy A. ; et al.	2007-01-18
Integrated tool assemblies with intermediate processing modules for processing of microfeature workpieces App 20070009344 - Wirth; Paul ; et al.	2007-01-11
Transfer devices and methods for handling microfeature workpieces within an environment of a processing machine App 20060177296 - Wirth; Paul	2006-08-10
End-effectors for handling microfeature workpieces App 20060043750 - Wirth; Paul	2006-03-02
Modular tool unit for processing of microfeature workpieces App 20060045666 - Harris; Randy A. ; et al.	2006-03-02

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