Patent | Date |
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Block polymers for sub-10 nm patterning Grant 10,239,982 - Willson , et al. | 2019-03-26 |
Polylactide/silicon-containing block copolymers for nanolithography Grant 9,834,700 - Ellison , et al. December 5, 2 | 2017-12-05 |
Block Polymers for Sub-10 NM Patterning App 20170240681 - Willson; Carlton Grant ;   et al. | 2017-08-24 |
Anhydride copolymer top coats for orientation control of thin film block copolymers Grant 9,314,819 - Willson , et al. April 19, 2 | 2016-04-19 |
Method of automatic fluid dispensing for imprint lithography processes Grant 9,223,202 - Choi , et al. December 29, 2 | 2015-12-29 |
Anhydride Copolymer Top Coats for Orientation Control of Thin Film Block Copolymers App 20150370159 - Willson; Carlton Grant ;   et al. | 2015-12-24 |
Polylactide/Silicon-Containing Block Copolymers for Nanolithography App 20150353763 - Ellison; Christopher J. ;   et al. | 2015-12-10 |
Anhydride copolymer top coats for orientation control of thin film block copolymers Grant 9,157,008 - Willson , et al. October 13, 2 | 2015-10-13 |
Polylactide/silicon-containing block copolymers for nanolithography Grant 9,120,117 - Ellison , et al. September 1, 2 | 2015-09-01 |
Surface Treatments for Alignment of Block Copolymers App 20150240110 - Willson; Carlton Grant ;   et al. | 2015-08-27 |
Using Chemical Vapor Deposited Films to Control Domain Orientation in Block Copolymer Thin Films App 20150232689 - Willson; Carlton Grant ;   et al. | 2015-08-20 |
Fluorinated silazane release agents in nanoimprint lithography Grant 8,926,888 - Willson , et al. January 6, 2 | 2015-01-06 |
Anhydride Copolymer Top Coats for Orientation Control of Thin Film Block Copolymers App 20130344242 - Willson; Carlton Grant ;   et al. | 2013-12-26 |
Polylactide/Silicon-containing Block Copolymers for Nanolithography App 20130266780 - Ellison; Christopher John ;   et al. | 2013-10-10 |
Using Chemical Vapor Deposited Films To Control Domain Orientation In Block Copolymer Thin Films App 20130209757 - Willson; Carlton Grant ;   et al. | 2013-08-15 |
Fluorinated Silazane Release Agents In Nanoimprint Lithography App 20120217676 - Willson; Carlton Grant ;   et al. | 2012-08-30 |
Step and Flash Imprint Lithography App 20120133078 - Willson; Carlton Grant ;   et al. | 2012-05-31 |
Device for holding a template for use in imprint lithography Grant 8,033,814 - Bailey , et al. October 11, 2 | 2011-10-11 |
Compositions for dark-field polymerization and method of using the same for imprint lithography processes Grant 7,906,060 - Willson , et al. March 15, 2 | 2011-03-15 |
Apparatus for imprint lithography using an electric field App 20100053578 - Sreenivasan; Sidlgata V. ;   et al. | 2010-03-04 |
Method for fabricating nanoscale patterns in light curable compositions using an electric field Grant 6,964,793 - Willson , et al. November 15, 2 | 2005-11-15 |
Step and flash imprint lithography App 20050236739 - Willson, Carlton Grant ;   et al. | 2005-10-27 |
Method for imprint lithography using an electric field Grant 6,908,861 - Sreenivasan , et al. June 21, 2 | 2005-06-21 |
Lithographic template and method of formation and use Grant 6,890,688 - Mancini , et al. May 10, 2 | 2005-05-10 |
Apparatus for fabricating nanoscale patterns in light curable compositions using an electric field App 20040200411 - Willson, Carlton Grant ;   et al. | 2004-10-14 |
Step and flash imprint lithography Grant 6,719,915 - Willson , et al. April 13, 2 | 2004-04-13 |
Method and system for imprint lithography using an electric field App 20040009673 - Sreenivasan, Sidlgata V. ;   et al. | 2004-01-15 |
Low viscosity high resolution patterning material App 20030235787 - Watts, Michael P.C. ;   et al. | 2003-12-25 |
Method and system for fabricating nanoscale patterns in light curable compositions using an electric field App 20030215577 - Willson, Carlton Grant ;   et al. | 2003-11-20 |
Lithographic template and method of formation and use App 20030113638 - Mancini, David P. ;   et al. | 2003-06-19 |
Step and flash imprint lithography Grant 6,334,960 - Willson , et al. January 1, 2 | 2002-01-01 |
Step and flash imprint lithography App 20010040145 - Willson, Carlton Grant ;   et al. | 2001-11-15 |