| Patent | Date |
|---|
Device for holding a template for use in imprint lithography
Grant 7,708,542 - Bailey , et al. May 4, 2 | 2010-05-04 |
Imprint Lithography Templates Having Alignment Marks
App 20090214689 - Bailey; Todd C. ; et al. | 2009-08-27 |
Apparatus For Fabricating Nanoscale Patterns In Light Curable Compositions Using An Electric Field
App 20080305440 - Willson; Carlton G. ; et al. | 2008-12-11 |
Imprint lithography template having a feature size under 250 nm
Grant 7,229,273 - Bailey , et al. June 12, 2 | 2007-06-12 |
Imprint lithography templates having alignment marks
App 20050064344 - Bailey, Todd C. ; et al. | 2005-03-24 |
Photoresist composition with photosensitive base generator
Grant 5,545,509 - Cameron , et al. August 13, 1 | 1996-08-13 |
Copolymers of 4-hydroxystyrene and alkyl substituted-4-hydroxystyrene in admixture with a photosensitizer to form a photosensitive composition
Grant 5,342,727 - Vicari , et al. August 30, 1 | 1994-08-30 |
Dry developable photoresist compositions and method for use thereof
Grant 5,322,765 - Clecak , et al. June 21, 1 | 1994-06-21 |
Process for imaging of photoresist including treatment of the photoresist with an organometallic compound
Grant 5,250,395 - Allen , et al. October 5, 1 | 1993-10-05 |
Photoacid generating composition and sensitizer therefor
Grant 5,055,439 - Allen , et al. October 8, 1 | 1991-10-08 |
Thermally stable photoresists with high sensitivity
Grant 4,939,070 - Brunsvold , et al. July 3, 1 | 1990-07-03 |
Method of creating patterned multilayer films for use in production of semiconductor circuits and systems
Grant 4,908,298 - Hefferon , et al. March 13, 1 | 1990-03-13 |
Top imaged resists
Grant 4,810,601 - Allen , et al. March 7, 1 | 1989-03-07 |
Negative resist compositions
Grant 4,800,152 - Allen , et al. January 24, 1 | 1989-01-24 |
Process for making self-aligning thin film transistors
Grant 4,767,723 - Hinsberg, III , et al. August 30, 1 | 1988-08-30 |
Process for enhancing the resistance of a resist image to reactive ion etching and to thermal flow
Grant 4,690,838 - Hiraoka , et al. September 1, 1 | 1987-09-01 |
Positive tone oxygen plasma developable photoresist
Grant 4,657,845 - Frechet , et al. April 14, 1 | 1987-04-14 |
Radiation sensitive and oxygen plasma developable resist
Grant 4,552,833 - Ito , et al. November 12, 1 | 1985-11-12 |
Positive- and negative-working resist compositions with acid generating photoinitiator and polymer with acid labile groups pendant from polymer backbone
Grant 4,491,628 - Ito , et al. January 1, 1 | 1985-01-01 |
Process for making an imaged oxygen-reactive ion etch barrier
Grant 4,464,460 - Hiraoka , et al. August 7, 1 | 1984-08-07 |
High resolution optical lithography method and apparatus having excimer laser light source and stimulated Raman shifting
Grant 4,458,994 - Jain , et al. July 10, 1 | 1984-07-10 |
Positive resist compositions
Grant 4,397,937 - Clecak , et al. August 9, 1 | 1983-08-09 |
Lithographic resist composition for a lift-off process
Grant 4,284,706 - Clecak , et al. August 18, 1 | 1981-08-18 |
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