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Patent applications and USPTO patent grants for Willis; James E..The latest application filed is for "methods and apparatus for using an optically tunable soft mask to create a profile library".
Patent | Date |
---|---|
Methods and apparatus for changing the optical properties of resists Grant 7,763,404 - Willis , et al. July 27, 2 | 2010-07-27 |
Methods and apparatus for using an optically tunable soft mask to create a profile library Grant 7,555,395 - Willis , et al. June 30, 2 | 2009-06-30 |
Fault detection and classification (FDC) using a run-to-run controller Grant 7,477,960 - Willis , et al. January 13, 2 | 2009-01-13 |
Method for data pre-population Grant 7,437,199 - Willis , et al. October 14, 2 | 2008-10-14 |
Methods And Apparatus For Using An Optically Tunable Soft Mask Profile Library App 20080077352 - Willis; James E. ;   et al. | 2008-03-27 |
Accuracy Of Optical Metrology Measurements App 20080076046 - Willis; James E. ;   et al. | 2008-03-27 |
Accuracy Of Optical Metrology Measurements App 20080074678 - Willis; James E. ;   et al. | 2008-03-27 |
Accuracy Of Optical Metrology Measurements App 20080074677 - Willis; James E. ;   et al. | 2008-03-27 |
Methods And Apparatus For Changing The Optical Properties Of Resists App 20080076045 - Willis; James E. ;   et al. | 2008-03-27 |
Methods And Apparatus For Using An Optically Tunable Soft Mask To Create A Profile Library App 20080077362 - Willis; James E. ;   et al. | 2008-03-27 |
Creating an optically tunable anti-reflective coating Grant 7,300,730 - Willis , et al. November 27, 2 | 2007-11-27 |
Method for automatic configuration of processing system Grant 7,213,478 - Harada , et al. May 8, 2 | 2007-05-08 |
Fault detection and classification (FDC) using a run-to-run controller App 20060184264 - Willis; James E. ;   et al. | 2006-08-17 |
R2R controller to automate the data collection during a DOE App 20060079983 - Willis; James E. | 2006-04-13 |
Method for automatic configuration of processing system App 20050015176 - Harada, Satoshi ;   et al. | 2005-01-20 |
Method for data pre-population App 20040243256 - Willis, James E. ;   et al. | 2004-12-02 |
Exercise system Grant 5,743,838 - Willis April 28, 1 | 1998-04-28 |
Glass composition determination method and apparatus Grant 5,663,997 - Willis , et al. September 2, 1 | 1997-09-02 |
Method for constructing a reversible duffle bag Grant 5,047,001 - Willis September 10, 1 | 1991-09-10 |
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