| Patent | Date |
|---|
Catadioptric unit-magnification afocal pupil relay and optical imaging system employing the same
Grant 11,317,798 - Williamson May 3, 2 | 2022-05-03 |
Illumination system with curved 1d-patterned mask for use in EUV-exposure tool
Grant 11,300,884 - Smith , et al. April 12, 2 | 2022-04-12 |
Optical System For Convertible Imaging Of Posterior And Anterior Portions Of The Eye
App 20220095912 - WILLIAMSON; David M. | 2022-03-31 |
Euv lithography system for dense line patterning
Grant 11,099,483 - Flagello , et al. August 24, 2 | 2021-08-24 |
Illumination system with flat 1D-patterned mask for use in EUV-exposure tool
Grant 11,054,745 - Smith , et al. July 6, 2 | 2021-07-06 |
Ophthalmic Optical System, Ophthalmic Objective Lens, And Ophthalmic Device
App 20210093194 - MUYO; Gonzalo ; et al. | 2021-04-01 |
EUV lithography system for dense line patterning
Grant 10,890,849 - Flagello , et al. January 12, 2 | 2021-01-12 |
Extreme ultraviolet lithography system that utilizes pattern stitching
Grant 10,747,117 - Binnard , et al. A | 2020-08-18 |
Optical Objective For Operation In Euv Spectral Region
App 20200117099 - Smith; Daniel Gene ; et al. | 2020-04-16 |
Illumination System With Curved 1d-patterned Mask For Use In Euv-exposure Tool
App 20200073251 - Smith; Daniel Gene ; et al. | 2020-03-05 |
Illumination System With Flat 1d-patterned Mask For Use In Euv-exposure Tool
App 20200057373 - Smith; Daniel Gene ; et al. | 2020-02-20 |
Catadioptric imaging systems for digital scanner
Grant 10,488,638 - Williamson Nov | 2019-11-26 |
Wide-angle Pupil Relay For Cellphone-based Fundus Camera
App 20190261853 - Williamson; David M. | 2019-08-29 |
Non-telecentric multispectral stereoscopic endoscope objective
Grant 10,386,626 - Williamson A | 2019-08-20 |
Extreme Ultraviolet Lithography System That Utilizes Pattern Stitching
App 20190235393 - Binnard; Michael B. ; et al. | 2019-08-01 |
Multispectral stereoscopic endoscope system and use of same
Grant 10,359,618 - Williamson , et al. | 2019-07-23 |
Extreme ultraviolet lithography system that utilizes pattern stitching
Grant 10,295,911 - Binnard , et al. | 2019-05-21 |
High Na (numerical Aperture) Rectangular Field Euv Catoptric Projection Optics Using Tilted And Decentered Zernike Polynomial Mirror Surfaces
App 20190113723 - Williamson; David M. | 2019-04-18 |
Broadband catadioptric microscope objective with small central obscuration
Grant 10,139,610 - Williamson Nov | 2018-11-27 |
Broadband Catadioptric Microscope Objective With Small Central Obscuration
App 20180275387 - Williamson; David M. | 2018-09-27 |
Euv Lithography System For Dense Line Patterning
App 20170336715 - Flagello; Donis G. ; et al. | 2017-11-23 |
Extreme Ultraviolet Lithography System That Utilizes Pattern Stitching
App 20170336720 - Binnard; Michael B. ; et al. | 2017-11-23 |
Euv Lithography System For Dense Line Patterning
App 20170336716 - Flagello; Donis G. ; et al. | 2017-11-23 |
Catadioptric Imaging Systems For Digital Scanner
App 20170307863 - Williamson; David M. | 2017-10-26 |
Non-telecentric Multispectral Stereoscopic Endoscope Objective
App 20170235120 - Williamson; David M. | 2017-08-17 |
Multispectral Stereoscopic Endoscope System And Use Of Same
App 20170199371 - Williamson; David M. ; et al. | 2017-07-13 |
Catadioptric imaging systems for digital scanner
Grant 9,703,085 - Williamson July 11, 2 | 2017-07-11 |
Catadioptric imaging systems for digital scanner
Grant 9,638,906 - Williamson May 2, 2 | 2017-05-02 |
Methods and devices for reducing errors in Goos-Hanchen corrections of displacement data
Grant 9,335,159 - Sogard , et al. May 10, 2 | 2016-05-10 |
Catadioptric Imaging Systems For Digital Scanner
App 20150146185 - Williamson; David M. | 2015-05-28 |
Catadioptric Imaging Systems For Digital Scanner
App 20150146283 - Williamson; David M. | 2015-05-28 |
Methods And Devices For Reducing Errors In Goos-hanchen Corrections Of Displacement Data
App 20150015896 - Sogard; Michael ; et al. | 2015-01-15 |
Methods and devices for reducing errors in Goos-Hanchen corrections of displacement data
Grant 8,842,296 - Sogard , et al. September 23, 2 | 2014-09-23 |
High Na (numerical Aperture) Rectangular Field Euv Catoptric Projection Optics Using Tilted And Decentered Zernike Polynomial Mirror Surfaces
App 20140218704 - Williamson; David M. | 2014-08-07 |
High NA catadioptric imaging optics for imaging A reticle to a pair of imaging locations
Grant 8,705,170 - Williamson , et al. April 22, 2 | 2014-04-22 |
Methods And Devices For Reducing Errors In Goos-hanchen Corrections Of Displacement Data
App 20130293900 - Sogard; Michael ; et al. | 2013-11-07 |
High NA annular field catoptric projection optics using Zernike polynomial mirror surfaces
Grant 8,317,344 - Williamson , et al. November 27, 2 | 2012-11-27 |
Exposure apparatus that utilizes multiple masks
Grant 8,305,559 - Williamson , et al. November 6, 2 | 2012-11-06 |
Variable attenuator device and method
Grant 8,116,342 - Smith , et al. February 14, 2 | 2012-02-14 |
High NA Annular Field Catoptric Projection Optics using Zernike Polynomial Mirror Surfaces
App 20110299184 - Williamson; David M. ; et al. | 2011-12-08 |
System and Method Configured to Provide Predetermined Depth Of Focus and to Control Irradiance Distribution
App 20110299056 - Williamson; David M. ; et al. | 2011-12-08 |
Identifying redundant alarms by determining coefficients of correlation between alarm categories
Grant 7,936,260 - Williamson , et al. May 3, 2 | 2011-05-03 |
Network based method of providing access to information
Grant 7,909,245 - Chaskin , et al. March 22, 2 | 2011-03-22 |
Identifying Redundant Alarms by Determining Coefficients of Correlation Between Alarm Categories
App 20100109860 - Williamson; David M. ; et al. | 2010-05-06 |
Projection optical system and method for photolithography and exposure apparatus and method using same
Grant 7,701,640 - Omura , et al. April 20, 2 | 2010-04-20 |
Optical Imaging System and Method for Imaging Up to Four Reticles to a Single Imaging Location
App 20100091257 - Williamson; David M. ; et al. | 2010-04-15 |
System and Method Producing Data For Correcting Autofocus Error in An Imaging Optical System
App 20100059657 - Smith; Daniel G. ; et al. | 2010-03-11 |
High NA Catadioptric Imaging Optics For Imaging A reticle to a Pair of Imaging Locations
App 20100053738 - Williamson; David M. ; et al. | 2010-03-04 |
Exposure Apparatus That Utilizes Multiple Masks
App 20090316131 - Williamson; David M. ; et al. | 2009-12-24 |
Apparatus For Scanning Sites On A Wafer Along A Short Dimension Of The Sites
App 20090305171 - Goodwin; Eric Peter ; et al. | 2009-12-10 |
Exposure Apparatus With A Scanning Illumination Beam
App 20090303454 - Binnard; Michael B. ; et al. | 2009-12-10 |
Imaging optical system configured with through the lens optics for producing control information
Grant 7,612,892 - Smith , et al. November 3, 2 | 2009-11-03 |
193nm Immersion Microscope
App 20090262417 - Smith; Daniel G. ; et al. | 2009-10-22 |
Network based method of providing access to information
Grant 7,527,192 - Chaskin , et al. May 5, 2 | 2009-05-05 |
Variable Attenuator Device and Method
App 20080240182 - Smith; Daniel G. ; et al. | 2008-10-02 |
Projection optical system and method for photolithography and exposure apparatus and method using same
Grant 7,362,508 - Omura , et al. April 22, 2 | 2008-04-22 |
System and method for designing an optical element
App 20080079928 - Smith; Daniel G. ; et al. | 2008-04-03 |
Projection optical system and method for photolithography and exposure apparatus and method using same
App 20080068724 - Omura; Yasuhiro ; et al. | 2008-03-20 |
Projection optical system and method for photolithography and exposure apparatus and method using same
App 20080049306 - Omura; Yasuhiro ; et al. | 2008-02-28 |
Projection optical system and method for photolithography and exposure apparatus and method using same
App 20080049336 - Omura; Yasuhiro ; et al. | 2008-02-28 |
Imaging optical system configured with through the lens optics for producing control information
App 20070080281 - Smith; Daniel G. ; et al. | 2007-04-12 |
Catadioptric 1x projection system and method
App 20060158615 - Williamson; David M. | 2006-07-20 |
Projection optical system and method for photolithography and exposure apparatus and method using same
App 20050248856 - Omura, Yasuhiro ; et al. | 2005-11-10 |
On-axix mask and wafer alignment system
Grant 5,966,216 - Galburt , et al. October 12, 1 | 1999-10-12 |
Four mirror EUV projection optics
Grant 5,956,192 - Williamson September 21, 1 | 1999-09-21 |
High numerical aperture ring field optical reduction system
Grant 5,815,310 - Williamson September 29, 1 | 1998-09-29 |
Catadioptric optical reduction system with high numerical aperture
Grant 5,537,260 - Williamson July 16, 1 | 1996-07-16 |
Optical reduction system
Grant 4,953,960 - Williamson September 4, 1 | 1990-09-04 |
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