Patent | Date |
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Wetting pretreatment for enhanced damascene metal filling Grant 10,840,101 - Mayer , et al. November 17, 2 | 2020-11-17 |
Wetting Pretreatment For Enhanced Damascene Metal Filling App 20180138044 - Mayer; Steven T. ;   et al. | 2018-05-17 |
Method And Apparatus For Electroplating Semiconductor Wafer When Controlling Cations In Electrolyte App 20180030611 - Spurlin; Tighe A. ;   et al. | 2018-02-01 |
Wetting pretreatment for enhanced damascene metal filling Grant 9,852,913 - Mayer , et al. December 26, 2 | 2017-12-26 |
Method and apparatus for electroplating semiconductor wafer when controlling cations in electrolyte Grant 9,816,196 - Spurlin , et al. November 14, 2 | 2017-11-14 |
Apparatus for wetting pretreatment for enhanced damascene metal filling Grant 9,721,800 - Mayer , et al. August 1, 2 | 2017-08-01 |
Through silicon via filling using an electrolyte with a dual state inhibitor Grant 9,593,426 - Willey , et al. March 14, 2 | 2017-03-14 |
Wetting Pretreatment For Enhanced Damascene Metal Filling App 20150179458 - Mayer; Steven T. ;   et al. | 2015-06-25 |
Through Silicon Via Filling Using An Electrolyte With A Dual State Inhibitor App 20150159289 - Willey; Mark J. ;   et al. | 2015-06-11 |
Apparatus For Wetting Pretreatment For Enhanced Damascene Metal Filling App 20150096883 - Mayer; Steven T. ;   et al. | 2015-04-09 |
Through silicon via filling using an electrolyte with a dual state inhibitor Grant 8,992,757 - Willey , et al. March 31, 2 | 2015-03-31 |
Wetting pretreatment for enhanced damascene metal filling Grant 8,962,085 - Mayer , et al. February 24, 2 | 2015-02-24 |
Process for through silicon via filling Grant 8,722,539 - Reid , et al. May 13, 2 | 2014-05-13 |
Method And Apparatus For Electroplating Semiconductor Wafer When Controlling Cations In Electrolyte App 20130284604 - Spurlin; Tighe A. ;   et al. | 2013-10-31 |
Systems and methods for monitoring plating and etching baths Grant 8,475,642 - West , et al. July 2, 2 | 2013-07-02 |
Monitoring of electroplating additives Grant 8,372,258 - Willey , et al. February 12, 2 | 2013-02-12 |
By-product Mitigation In Through-silicon-via Plating App 20120064462 - WILLEY; Mark J. ;   et al. | 2012-03-15 |
Through Silicon Via Filling Using An Electrolyte With A Dual State Inhibitor App 20110284386 - Willey; Mark J. ;   et al. | 2011-11-24 |
Monitoring of electroplating additives App 20110025338 - Willey; Mark J. ;   et al. | 2011-02-03 |
Wetting Pretreatment For Enhanced Damascene Metal Filling App 20100320609 - Mayer; Steven T. ;   et al. | 2010-12-23 |
Apparatus For Wetting Pretreatment For Enhanced Damascene Metal Filling App 20100320081 - Mayer; Steven T. ;   et al. | 2010-12-23 |
Process for through silicon via filing Grant 7,776,741 - Reid , et al. August 17, 2 | 2010-08-17 |
Process For Through Silicon Via Filing App 20100041226 - Reid; Jonathan D. ;   et al. | 2010-02-18 |
Systems And Methods For Monitoring Plating And Etching Baths App 20080264801 - West; Alan C. ;   et al. | 2008-10-30 |