Wilcoxson; Mark H.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Wilcoxson; Mark H..The latest application filed is for "electrostatic chuck with flexible wafer temperature control".

Company Profile

2.13.16

Wilcoxson; Mark H. - Oakland CA
Wilcoxson; Mark H. - Piedmont CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Mask shrink layer for high aspect ratio dielectric etch Grant 10,431,458 - Hudson , et al. O	2019-10-01
Technique to deposit metal-containing sidewall passivation for high aspect ratio cylinder etch Grant 10,170,323 - Hudson , et al. J	2019-01-01
Electrostatic Chuck With Flexible Wafer Temperature Control App 20180286642 - MATYUSHKIN; Alexander ; et al.	2018-10-04
Technique To Deposit Metal-containing Sidewall Passivation For High Aspect Ratio Cylinder Etch App 20170170026 - Hudson; Eric A. ; et al.	2017-06-15
Technique to deposit metal-containing sidewall passivation for high aspect ratio cylinder etch Grant 9,620,377 - Hudson , et al. April 11, 2	2017-04-11
Mask Shrink Layer For High Aspect Ratio Dielectric Etch App 20170076945 - Hudson; Eric A. ; et al.	2017-03-16
Mask shrink layer for high aspect ratio dielectric etch Grant 9,543,148 - Hudson , et al. January 10, 2	2017-01-10
Technique To Deposit Metal-containing Sidewall Passivation For High Aspect Ratio Cylinder Etch App 20160163558 - Hudson; Eric A. ; et al.	2016-06-09
Method and apparatus for pattern collapse free wet processing of semiconductor devices Grant 8,440,573 - Mikhaylichenko , et al. May 14, 2	2013-05-14
Methods for Using Proximity Head With Configurable Delivery App 20120199164 - Wilcoxson; Mark H. ; et al.	2012-08-09
Apparatus for isolated bevel edge clean and method for using the same Grant 8,127,395 - Yoon , et al. March 6, 2	2012-03-06
Method And Apparatus For Pattern Collapse Free Wet Processing Of Semiconductor Devices App 20110183522 - Mikhaylichenko; Katrina ; et al.	2011-07-28
Apparatus for isolated bevel edge clean and method for using the same App 20090113656 - Yoon; Hyungsuk Alexander ; et al.	2009-05-07
Proximity Head With Configurable Delivery App 20080149147 - Wilcoxson; Mark H. ; et al.	2008-06-26
Plasma in-situ treatment of chemically amplified resist Grant 7,347,915 - Keil , et al. March 25, 2	2008-03-25
Method for plasma stripping using periodic modulation of gas chemistry and hydrocarbon addition Grant 7,294,580 - Yun , et al. November 13, 2	2007-11-13
Plasma in-situ treatment of chemically amplified resist Grant 7,022,611 - Keil , et al. April 4, 2	2006-04-04
Materials and gas chemistries for processing systems App 20060011583 - Bailey; Andrew D. III ; et al.	2006-01-19
Method for producing a semiconductor device Grant 6,873,112 - Wilcoxson , et al. March 29, 2	2005-03-29
Method for plasma stripping using periodic modulation of gas chemistry and hydrocarbon addition App 20040224520 - Yun, Seokmin ; et al.	2004-11-11
Method for producing a semiconductor device App 20040216676 - Wilcoxson, Mark H. ; et al.	2004-11-04
Antenna for producing uniform process rates Grant 6,744,213 - Wilcoxson , et al. June 1, 2	2004-06-01
Materials and gas chemistries for processing systems App 20040011467 - Hemker, David J. ; et al.	2004-01-22
Antenna for producing uniform process rates App 20030189524 - Wilcoxson, Mark H. ; et al.	2003-10-09
Plasma Processing System With Dynamic Gas Distribution Control App 20030155079 - BAILEY, ANDREW D. III ; et al.	2003-08-21
Method and apparatus for producing uniform process rates App 20030145952 - Wilcoxson, Mark H. ; et al.	2003-08-07
Method and apparatus for producing uniform process rates Grant 6,518,705 - Wilcoxson , et al. February 11, 2	2003-02-11
Method And Apparatus For Producing Uniform Process Rates App 20020175869 - Wilcoxson, Mark H. ; et al.	2002-11-28

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