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Frame assembly, lithographic apparatus and device manufacturing method Grant 11,269,262 - Butler , et al. March 8, 2 | 2022-03-08 |
Pneumatic support device and lithographic apparatus with pneumatic support device Grant 11,169,450 - Butler , et al. November 9, 2 | 2021-11-09 |
Frame Assembly, Lithographic Apparatus and Device Manufacturing Method App 20210240090 - BUTLER; Hans ;   et al. | 2021-08-05 |
Positioning device, lithographic apparatus, method for compensating a balance mass torque and device manufacturing method Grant 10,962,890 - Simons , et al. March 30, 2 | 2021-03-30 |
Lithographic apparatus, lithographic projection apparatus and device manufacturing method Grant 10,955,761 - Butler , et al. March 23, 2 | 2021-03-23 |
Pneumatic Support Device and Lithographic Apparatus with Pneumatic Support Device App 20210080834 - BUTLER; Hans ;   et al. | 2021-03-18 |
Lithographic apparatus and device manufacturing method Grant 10,866,529 - Butler , et al. December 15, 2 | 2020-12-15 |
Positioning Device, Lithographic Apparatus, Method for Compensating a Balance Mass Torque and Device Manufacturing Method App 20200363732 - SIMONS; Wilhelmus Franciscus Johannes ;   et al. | 2020-11-19 |
Lithographic apparatus, lithographic projection apparatus and device manufacturing method Grant 10,838,312 - Starreveld , et al. November 17, 2 | 2020-11-17 |
Lithographic Apparatus, Lithographic Projection Apparatus and Device Manufacturing Method App 20200209757 - BUTLER; Hans ;   et al. | 2020-07-02 |
Lithographic apparatus having an active base frame support Grant 10,578,983 - Butler , et al. | 2020-03-03 |
Lithographic Apparatus, Lithographic Projection Apparatus And Device Manufacturing Method App 20200057379 - STARREVELD; Jeroen Pieter ;   et al. | 2020-02-20 |
Bearing Device, Magnetic Gravity Compensator, Vibration Isolation System, Lithographic Apparatus, Method To Control A Gravity Co App 20200049203 - KIMMAN; Maarten Hartger ;   et al. | 2020-02-13 |
Lithographic Apparatus, Lithographic Projection Apparatus And Device Manufacturing Method App 20200050120 - BUTLER; Hans ;   et al. | 2020-02-13 |
Lithographic apparatus and device manufacturing method Grant 10,503,086 - Butler , et al. Dec | 2019-12-10 |
Lithographic Apparatus And Device Manufacturing Method App 20190354021 - BUTLER; Hans ;   et al. | 2019-11-21 |
Lithographic apparatus and device manufacturing method Grant 10,209,634 - Butler , et al. Feb | 2019-02-19 |
Lithographic Apparatus And Device Manufacturing Method App 20190011838 - BUTLER; Hans ;   et al. | 2019-01-10 |
Lithographic Apparatus Having An Active Base Frame Support App 20180373156 - BUTLER; Hans ;   et al. | 2018-12-27 |
Lithographic Apparatus And Device Manufacturing Method App 20180017879 - BUTLER; Hans ;   et al. | 2018-01-18 |
Radiation source Grant 9,500,953 - Hoogkamp , et al. November 22, 2 | 2016-11-22 |
Projection system and lithographic apparatus Grant 9,164,401 - Loopstra , et al. October 20, 2 | 2015-10-20 |
Positioning system, lithographic apparatus and device manufacturing method Grant 9,122,173 - Butler , et al. September 1, 2 | 2015-09-01 |
Lithographic apparatus and device manufacturing method Grant 8,908,144 - Groeneveld , et al. December 9, 2 | 2014-12-09 |
Radiation Source App 20140333915 - Hoogkamp; Jan Frederik ;   et al. | 2014-11-13 |
Lithographic apparatus and a method to compensate for the effect of disturbances on the projection system of a lithographic apparatus Grant 8,300,208 - Loopstra , et al. October 30, 2 | 2012-10-30 |
Lithographic apparatus and device manufacturing method Grant 8,289,498 - Loopstra , et al. October 16, 2 | 2012-10-16 |
Positioning System, Lithographic Apparatus and Device Manufacturing Method App 20120147355 - BUTLER; Hans ;   et al. | 2012-06-14 |
Positioning system, lithographic apparatus and device manufacturing method Grant 8,144,310 - Butler , et al. March 27, 2 | 2012-03-27 |
Projection System and Lithographic Apparatus App 20110170078 - Loopstra; Erik Roelof ;   et al. | 2011-07-14 |
Lithographic Apparatus and A Method to Compensate for the Effect of Disturbances on the Projection System of a Lithographic Apparatus App 20100149516 - LOOPSTRA; Erik Roelof ;   et al. | 2010-06-17 |