Patent | Date |
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Light Source Module & Analytical Instrument For Analyzing A Sample App 20200056985 - Durrer; Fabian ;   et al. | 2020-02-20 |
Optics for analysis of microwells Grant 10,564,102 - Wietzorrek Feb | 2020-02-18 |
Characterizing The Emission Properties Of Samples App 20180172600 - Wietzorrek; Joachim | 2018-06-21 |
Optics For Analysis Of Microwells App 20170241912 - Wietzorrek; Joachim | 2017-08-24 |
Array optics Grant 9,506,865 - Furlan , et al. November 29, 2 | 2016-11-29 |
Apparatus for photometric measurement of biological liquids Grant 9,115,395 - Wietzorrek August 25, 2 | 2015-08-25 |
Apparatus For Photometric Measurement Of Biological Liquids App 20150064699 - Wietzorrek; Joachim | 2015-03-05 |
Light source module and analytical instrument for analyzing a sample App 20140093948 - Durrer; Fabian ;   et al. | 2014-04-03 |
Array Optics App 20140038190 - Furlan; Alan ;   et al. | 2014-02-06 |
Illumination system for microlithography Grant 7,911,584 - Singer , et al. March 22, 2 | 2011-03-22 |
Excitation and imaging optics for fluorescence detection Grant 7,906,767 - Furlan , et al. March 15, 2 | 2011-03-15 |
Excitation and Imaging Optics for Fluorescence Detection App 20100019157 - Furlan; Alan ;   et al. | 2010-01-28 |
Lithography lens system and projection exposure system provided with at least one lithography lens system of this type Grant 7,551,361 - Rostalski , et al. June 23, 2 | 2009-06-23 |
Illumination System Particularly For Microlithography App 20090015812 - Schultz; Joerg ;   et al. | 2009-01-15 |
Illumination system particularly for microlithography Grant 7,443,948 - Schultz , et al. October 28, 2 | 2008-10-28 |
Optical system having an optical element that can be brought into at least two positions Grant 7,362,414 - Singer , et al. April 22, 2 | 2008-04-22 |
Collector with fastening devices for fastening mirror shells App 20080042079 - Singer; Wolfgang ;   et al. | 2008-02-21 |
Collector with fastening devices for fastening mirror shells Grant 7,321,126 - Singer , et al. January 22, 2 | 2008-01-22 |
EUV-lithography apparatus having a chamber for cleaning an optical element App 20070283591 - Singer; Wolfgang ;   et al. | 2007-12-13 |
Microlithographic Projection Exposure Apparatus App 20070285644 - Brotsack; Markus ;   et al. | 2007-12-13 |
Lithography Lens System And Projection Exposure System Provided With At Least One Lithography Lens System Of This Type App 20070258134 - Rostalski; Hans-Juergen ;   et al. | 2007-11-08 |
Illumination system for microlithography App 20070058274 - Singer; Wolfgang ;   et al. | 2007-03-15 |
Illumination system with field mirrors for producing uniform scanning energy App 20070030948 - Singer; Wolfgang ;   et al. | 2007-02-08 |
Collector with fastening devices for fastening mirror shells App 20060291062 - Singer; Wolfgang ;   et al. | 2006-12-28 |
Illumination system particularly for microlithography App 20060245540 - Schultz; Jorg ;   et al. | 2006-11-02 |
Illumination system with field mirrors for producing uniform scanning energy Grant 7,126,137 - Singer , et al. October 24, 2 | 2006-10-24 |
Collector with fastening devices for fastening mirror shells Grant 7,091,505 - Singer , et al. August 15, 2 | 2006-08-15 |
Illumination system particularly for microlithography Grant 7,006,595 - Singer , et al. February 28, 2 | 2006-02-28 |
Optical system having an optical element that can be brought into at least two positions App 20060001854 - Singer; Wolfgang ;   et al. | 2006-01-05 |
Collector with fastening devices for fastening mirror shells App 20040227103 - Singer, Wolfgang ;   et al. | 2004-11-18 |
Illumination system particularly for microlithography App 20030086524 - Schultz, Jorg ;   et al. | 2003-05-08 |