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Projection exposure system for semiconductor lithography, comprising elements for plasma conditioning Grant 10,712,677 - Ament , et al. | 2020-07-14 |
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Projection Exposure System For Semiconductor Lithography, Comprising Elements For Plasma Conditioning App 20190243258 - AMENT; Irene ;   et al. | 2019-08-08 |
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Method and device for connecting an optical element to a frame Grant 9,604,299 - Schoeppach , et al. March 28, 2 | 2017-03-28 |
Hybrid Imaging System And Method For Intraoperative, Interventional, And Diagnostic Applications App 20150305700 - WENDLER; Thomas ;   et al. | 2015-10-29 |
Cleaning module, EUV lithography device and method for the cleaning thereof Grant 9,046,794 - Hembacher , et al. June 2, 2 | 2015-06-02 |
Method And Device For Connecting An Optical Element To A Frame App 20150008215 - Schoeppach; Armin ;   et al. | 2015-01-08 |
EUV lithography device and method for processing an optical element Grant 8,885,141 - Singer , et al. November 11, 2 | 2014-11-11 |
Mirror for guiding a radiation bundle Grant 8,717,531 - Waldis , et al. May 6, 2 | 2014-05-06 |
Method and device for connecting an optical element to a frame Grant 8,705,006 - Schoeppach , et al. April 22, 2 | 2014-04-22 |
Animation for conveying spatial relationships in three-dimensional medical imaging Grant 8,494,250 - McDermott , et al. July 23, 2 | 2013-07-23 |
Method For Producing Facet Mirrors And Projection Exposure Apparatus App 20130100426 - Warm; Berndt ;   et al. | 2013-04-25 |
Method For Avoiding Contamination And Euv-lithography-system App 20120086925 - KRAUS; Dieter ;   et al. | 2012-04-12 |
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Cleaning Module And Euv Lithography Device With Cleaning Module App 20110058147 - Ehm; Dirk Heinrich ;   et al. | 2011-03-10 |
Cleaning Module, Euv Lithography Device And Method For The Cleaning Thereof App 20110043774 - HEMBACHER; Stefan ;   et al. | 2011-02-24 |
Mirror For Guiding A Radiation Bundle App 20100261120 - Waldis; Severin ;   et al. | 2010-10-14 |
Method And System For Removing Contaminants From A Surface App 20100071720 - Ehm; Dirk Heinrich ;   et al. | 2010-03-25 |
Method For Producing Facet Mirrors And Projection Exposure Apparatus App 20100007866 - Warm; Berndt ;   et al. | 2010-01-14 |
Animation for Conveying Spatial Relationships in Three-Dimensional Medical Imaging App 20090304250 - McDermott; Bruce A. ;   et al. | 2009-12-10 |
Method And Device For Connecting An Optical Element To A Frame App 20090244508 - Schoeppach; Armin ;   et al. | 2009-10-01 |
Particles that include a solid coating and a liquid core, preparations comprising these particles and processes for preparing these particles App 20050186155 - Raschke, Thomas ;   et al. | 2005-08-25 |
Method and device for decontaminating optical surfaces Grant 6,796,664 - Luedecke , et al. September 28, 2 | 2004-09-28 |
Method and device for decontaminating optical surfaces App 20030210458 - Luedecke, Jens ;   et al. | 2003-11-13 |
Lighting device for vehicles Grant 6,371,635 - Ott , et al. April 16, 2 | 2002-04-16 |
Lighting device for vehicles App 20010043477 - Ott, Alfred ;   et al. | 2001-11-22 |
Lighting device for the illumination of a vehicle decoupling bay and a method for providing the same App 20010014026 - Ott, Alfred ;   et al. | 2001-08-16 |