Wienecke; Joachim

Patent Applications and Registrations

Patent applications and USPTO patent grants for Wienecke; Joachim.The latest application filed is for "method and apparatus for inspecting a wafer".

Company Profile

0.18.18

Wienecke; Joachim - Jena DE

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Apparatus for inspecting a disk-like object Grant 7,489,394 - Wienecke , et al. February 10, 2	2009-02-10
Method and apparatus for high-resolution defect location and classification Grant 7,242,467 - Wienecke July 10, 2	2007-07-10
Method and apparatus for inspecting a wafer App 20070076943 - Wienecke; Joachim ; et al.	2007-04-05
System operating unit Grant 7,152,488 - Hedrich , et al. December 26, 2	2006-12-26
Apparatus for inspecting a disk-like object App 20060245965 - Wienecke; Joachim ; et al.	2006-11-02
Arrangement and method for inspecting unpatterned wafers Grant 7,084,965 - Wienecke , et al. August 1, 2	2006-08-01
Method for automatic focusing an imaging optical system on the surface of a sample Grant 7,041,952 - Iffland , et al. May 9, 2	2006-05-09
Setting module for the illumination of an optical instrument Grant 7,002,740 - Veith , et al. February 21, 2	2006-02-21
Method for determining layer thickness ranges Grant 6,985,237 - Mikkelsen , et al. January 10, 2	2006-01-10
Substrate conveying module and system made up of substrate conveying module and workstation Grant 6,962,471 - Birkner , et al. November 8, 2	2005-11-08
Method for evaluating pattern defects on a water surface Grant 6,941,009 - Wienecke September 6, 2	2005-09-06
Holding device for wafers Grant 6,918,735 - Urban , et al. July 19, 2	2005-07-19
Method and measuring instrument for determining the position of an edge of a pattern element on a substrate Grant 6,920,249 - Rinn , et al. July 19, 2	2005-07-19
System operating unit App 20040244512 - Hedrich, Roland ; et al.	2004-12-09
Method and apparatus for the determination of layer thicknesses Grant 6,826,511 - Mikkelsen , et al. November 30, 2	2004-11-30
Method and apparatus for high-resolution defect location and classification App 20040233422 - Wienecke, Joachim	2004-11-25
Method for automatic focusing App 20040169124 - Iffland, Thomas ; et al.	2004-09-02
Method for determining layer thickness ranges App 20040130726 - Mikkelsen, Hakon ; et al.	2004-07-08
Arrangement and method for illuminating a specimen field in an optical instrument Grant 6,713,746 - Veith , et al. March 30, 2	2004-03-30
Method for focusing of disk-shaped objects with patterned surfaces during imaging Grant 6,696,679 - Graef , et al. February 24, 2	2004-02-24
Holding device for wafers App 20030175106 - Urban, Karsten ; et al.	2003-09-18
Optical measurement arrangement, in particular for layer thickness measurement Grant 6,618,154 - Engel , et al. September 9, 2	2003-09-09
Method for the determination of layer thicknesses App 20030147085 - Mikkelsen, Hakon ; et al.	2003-08-07
Arrangement and method for inspecting unpatterned wafers App 20030038932 - Wienecke, Joachim ; et al.	2003-02-27
Arrangement and method for illuminating a specimen field in an optical instrument App 20030015643 - Veith, Michael ; et al.	2003-01-23
Setting module for the illumination of an optical instrument App 20030011882 - Veith, Michael ; et al.	2003-01-16
Optical measurement arrangement and method for inclination measurement Grant 6,504,608 - Hallmeyer , et al. January 7, 2	2003-01-07
Arrangement for wafer inspection App 20020187035 - Schaefer, Kersten ; et al.	2002-12-12
Method and apparatus for monitoring the light emitted from an illumination apparatus for an optical measuring instrument Grant 6,456,373 - Wienecke , et al. September 24, 2	2002-09-24
Method and measuring instrument for determining the position of an edge of a pattern element on a substrate App 20020057839 - Rinn, Klaus ; et al.	2002-05-16
Substrate conveying module and system made up of substrate conveying modile and workstation App 20020051698 - Birkner, Andreas ; et al.	2002-05-02
Spectral ellipsometer having a refractive illuminating optical system App 20020024669 - Danner, Lambert ; et al.	2002-02-28
Optical measurement arrangement, in particular for layer thickness measurement App 20020003217 - Engel, Horst ; et al.	2002-01-10
Method for evaluating pattern defects on a wafer surface App 20010036306 - Wienecke, Joachim	2001-11-01
Optical measurement arrangement and method for inclination measurement App 20010006419 - Hallmeyer, Klaus ; et al.	2001-07-05
Method for detection of defects in the inspection of structured surfaces Grant 6,075,880 - Kollhof , et al. June 13, 2	2000-06-13

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