| Patent | Date |
|---|
Wrench
App 20220266425 - Widmann; Amir ; et al. | 2022-08-25 |
Methods and systems for creating or performing a dynamic sampling scheme for a process during which measurements are performed on wafers
Grant 10,649,447 - Izikson , et al. | 2020-05-12 |
Methods and Systems for Creating or Performing a Dynamic Sampling Scheme for a Process During Which Measurements Are Performed on Wafers
App 20170255188 - Izikson; Pavel ; et al. | 2017-09-07 |
Methods and systems for creating or performing a dynamic sampling scheme for a process during which measurements are performed on wafers
Grant 9,651,943 - Izikson , et al. May 16, 2 | 2017-05-16 |
Method and system for universal target based inspection and metrology
Grant 9,576,861 - Park , et al. February 21, 2 | 2017-02-21 |
Material handling with dedicated automated material handling system
Grant 9,558,978 - Widmann , et al. January 31, 2 | 2017-01-31 |
Method for estimating and correcting misregistration target inaccuracy
Grant 9,329,033 - Amit , et al. May 3, 2 | 2016-05-03 |
Inspection guided overlay metrology
Grant 9,170,209 - Chang , et al. October 27, 2 | 2015-10-27 |
Feedforward/feedback litho process control of stress and overlay
Grant 9,116,442 - Adel , et al. August 25, 2 | 2015-08-25 |
Inspecting a wafer and/or predicting one or more characteristics of a device being formed on a wafer
Grant 8,948,495 - Marcuccilli , et al. February 3, 2 | 2015-02-03 |
Unique mark and method to determine critical dimension uniformity and registration of reticles combined with wafer overlay capability
Grant 8,804,137 - Choi , et al. August 12, 2 | 2014-08-12 |
Method and System for Universal Target Based Inspection and Metrology
App 20140199791 - Park; Allen ; et al. | 2014-07-17 |
Method For Estimating And Correcting Misregistration Target Inaccuracy
App 20140060148 - Amit; Eran ; et al. | 2014-03-06 |
Advanced process control optimization
Grant 8,655,469 - Choi , et al. February 18, 2 | 2014-02-18 |
Inspecting a Wafer and/or Predicting One or More Characteristics of a Device Being Formed on a Wafer
App 20140037187 - Marcuccilli; Gino ; et al. | 2014-02-06 |
Efficient Material Handling In Semiconductor Wafer Processing
App 20130294871 - WIDMANN; AMIR ; et al. | 2013-11-07 |
Inspection guided overlay metrology
Grant 8,559,001 - Chang , et al. October 15, 2 | 2013-10-15 |
Methods and Systems for Creating or Performing a Dynamic Sampling Scheme for a Process During Which Measurements Are Performed on Wafers
App 20120208301 - Izikson; Pavel ; et al. | 2012-08-16 |
Methods and systems for creating or performing a dynamic sampling scheme for a process during which measurements are performed on wafers
Grant 8,175,831 - Izikson , et al. May 8, 2 | 2012-05-08 |
Feedforward/feedback Litho Process Control Of Stress And Overlay
App 20120094400 - Adel; Michael ; et al. | 2012-04-19 |
Feedforward/feedback litho process control of stress and overlay
Grant 8,111,376 - Adel , et al. February 7, 2 | 2012-02-07 |
Advanced Process Control Optimization
App 20120022679 - Choi; DongSub ; et al. | 2012-01-26 |
Waferless recipe optimization
Grant 8,045,786 - Widmann , et al. October 25, 2 | 2011-10-25 |
Inspection Guided Overlay Metrology
App 20110170091 - Chang; Ellis ; et al. | 2011-07-14 |
Computer-implemented methods, carrier media, and systems for creating a metrology target structure design for a reticle layout
Grant 7,925,486 - Smith , et al. April 12, 2 | 2011-04-12 |
Unique Mark And Method To Determine Critical Dimension Uniformity And Registration Of Reticles Combined With Wafer Overlay Capability
App 20110051150 - Choi; DongSub ; et al. | 2011-03-03 |
Method and system for optimizing alignment performance in a fleet of exposure tools
Grant 7,679,069 - Adel , et al. March 16, 2 | 2010-03-16 |
Techniques for determining overlay and critical dimension using a single metrology tool
Grant 7,561,282 - Widmann July 14, 2 | 2009-07-14 |
Feedforward/feedback Litho Process Control Of Stress And Overlay
App 20080316442 - Adel; Michael ; et al. | 2008-12-25 |
Methods And Systems For Creating Or Performing A Dynamic Sampling Scheme For A Process During Which Measurements Are Performed On Wafers
App 20080286885 - Izikson; Pavel ; et al. | 2008-11-20 |
Waferless Recipe Optimization
App 20080094639 - Widmann; Amir ; et al. | 2008-04-24 |
Method And System For Optimizing Alignment Performance In A Fleet Of Exposure Tools
App 20080073589 - Adel; Michael E. ; et al. | 2008-03-27 |
Computer-implemented Methods, Carrier Media, And Systems For Creating A Metrology Target Structure Design For A Reticle Layout
App 20070276634 - Smith; Mark ; et al. | 2007-11-29 |
Iced film substrate cleaning
Grant 6,864,458 - Widmann , et al. March 8, 2 | 2005-03-08 |
Iced Film Substrate Cleaning
App 20040140298 - Widmann, Amir ; et al. | 2004-07-22 |
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