Patent | Date |
---|
Templates including self-assembled block copolymer films Grant 9,257,256 - Millward , et al. February 9, 2 | 2016-02-09 |
Polymeric Materials In Self-assembled Arrays And Semiconductor Structures And Methods Comprising Such Polymeric Materials App 20150137331 - Millward; Dan B. ;   et al. | 2015-05-21 |
Polymeric materials in self-assembled arrays and semiconductor structures comprising polymeric materials Grant 8,993,088 - Millward , et al. March 31, 2 | 2015-03-31 |
Method And System For Binding Halide-based Contaminants App 20140151857 - Derderian; Garo J. ;   et al. | 2014-06-05 |
Method and system for binding halide-based contaminants Grant 8,691,015 - Derderian , et al. April 8, 2 | 2014-04-08 |
Templates Including Self-assembled Block Copolymer Films App 20140060736 - Millward; Dan B. ;   et al. | 2014-03-06 |
Polymeric Materials In Self-assembled Arrays And Semiconductor Structures Comprising Polymeric Materials App 20130285214 - Millward; Dan B. ;   et al. | 2013-10-31 |
Method And System For Binding Halide-based Contaminants App 20130231240 - Derderian; Garo J. ;   et al. | 2013-09-05 |
Chemical vapor deposition of titanium Grant 8,456,007 - Sandhu , et al. June 4, 2 | 2013-06-04 |
Method and system for binding halide-based contaminants Grant 8,435,886 - Derderian , et al. May 7, 2 | 2013-05-07 |
Method And System For Binding Halide-based Contaminants App 20120276750 - Derderian; Garo J. ;   et al. | 2012-11-01 |
Method and system for binding halide-based contaminants Grant 8,216,377 - Derderian , et al. July 10, 2 | 2012-07-10 |
Method And System For Binding Halide-based Contaminants App 20110147935 - Derderian; Garo J. ;   et al. | 2011-06-23 |
Method and system for binding halide-based contaminants Grant 7,922,818 - Derderian , et al. April 12, 2 | 2011-04-12 |
Systems and methods for forming niobium and/or vanadium containing layers using atomic layer deposition Grant 7,837,797 - Derderian , et al. November 23, 2 | 2010-11-23 |
Systems And Methods For Forming Niobium And/or Vanadium Containing Layers Using Atomic Layer Deposition App 20090127105 - Derderian; Garo J. ;   et al. | 2009-05-21 |
Chemical Vapor Deposition Of Titanium App 20090039517 - Sandhu; Gurtej Singh ;   et al. | 2009-02-12 |
Methods for forming niobium and/or vanadium containing layers using atomic layer deposition Grant 7,482,037 - Derderian , et al. January 27, 2 | 2009-01-27 |
Memory device with chemical vapor deposition of titanium for titanium silicide contacts Grant 7,443,032 - Sandhu , et al. October 28, 2 | 2008-10-28 |
Plasmaless dry contact cleaning method using interhalogen compounds Grant 7,371,263 - Sandhu , et al. May 13, 2 | 2008-05-13 |
Method for binding halide-based contaminants during formation of a titanium-based film Grant 7,311,942 - Derderian , et al. December 25, 2 | 2007-12-25 |
Method of planarizing a surface Grant 7,264,742 - Westmoreland September 4, 2 | 2007-09-04 |
Systems and methods for forming niobium and/or vanadium containing layers using atomic layer deposition App 20070148932 - Derderian; Garo J. ;   et al. | 2007-06-28 |
Mixed metal nitride and boride barrier layers App 20070045856 - Vaartstra; Brian A. ;   et al. | 2007-03-01 |
High efficiency method for performing a chemical vapordeposition utilizing a nonvolatile precursor Grant 7,182,979 - Westmoreland , et al. February 27, 2 | 2007-02-27 |
Methods for planarization of group VIII metal-containing surfaces using oxidizing agents App 20060261040 - Klein; Rita J. ;   et al. | 2006-11-23 |
Method of forming barrier layers Grant 7,101,779 - Vaartstra , et al. September 5, 2 | 2006-09-05 |
Plasmaless dry contact cleaning method using interhalogen compounds App 20060163200 - Sandhu; Gurtej S. ;   et al. | 2006-07-27 |
Mold for forming spacers for flat panel displays App 20060139561 - Hofmann; James J. ;   et al. | 2006-06-29 |
Plasmaless dry contact cleaning method using interhalogen compounds Grant 7,033,946 - Sandhu , et al. April 25, 2 | 2006-04-25 |
Method and system for binding halide-based contaminants App 20060070574 - Derderian; Garo J. ;   et al. | 2006-04-06 |
Systems and methods for forming niobium and/or vanadium containing layers using atomic layer deposition App 20060040480 - Derderian; Garo J. ;   et al. | 2006-02-23 |
Systems and methods for forming metal oxides using metal organo-amines and metal organo-oxides App 20050287819 - Vaartstra, Brian A. ;   et al. | 2005-12-29 |
Chemical vapor deposition of titanim App 20050255698 - Sandhu, Gurtej Singh ;   et al. | 2005-11-17 |
Systems and methods for forming metal oxides using metal organo-amines and metal organo-oxides Grant 6,958,300 - Vaartstra , et al. October 25, 2 | 2005-10-25 |
Chemical vapor deposition of titanium Grant 6,940,172 - Sandhu , et al. September 6, 2 | 2005-09-06 |
Chemical vapor deposition of titanium Grant 6,903,462 - Sandhu , et al. June 7, 2 | 2005-06-07 |
Method for making sol gel spacers for flat panel displays App 20050112298 - Hofmann, James J. ;   et al. | 2005-05-26 |
Method of planarizing a surface App 20050020078 - Westmoreland, Donald L. | 2005-01-27 |
Systems and methods for the electrolytic removal of metals from substrates App 20050016869 - Marsh, Eugene P. ;   et al. | 2005-01-27 |
Chemical vapor deposition of titanium Grant 6,830,838 - Sandhu , et al. December 14, 2 | 2004-12-14 |
Chemical vapor deposition of titanium Grant 6,830,820 - Sandhu , et al. December 14, 2 | 2004-12-14 |
Ruthenium and ruthenium dioxide removal method and material Grant 6,827,871 - Westmoreland December 7, 2 | 2004-12-07 |
Method for making sol gel spacers for flat panel displays Grant 6,812,990 - Hofmann , et al. November 2, 2 | 2004-11-02 |
Systems and methods for the electrolytic removal of metals from substrates Grant 6,783,657 - Marsh , et al. August 31, 2 | 2004-08-31 |
Compositions and methods for removing etch residue App 20040157448 - Yates, Donald L. ;   et al. | 2004-08-12 |
Method of forming barrier layers App 20040053495 - Vaartstra, Brian A. ;   et al. | 2004-03-18 |
Compositions and methods for removing etch residue Grant 6,703,319 - Yates , et al. March 9, 2 | 2004-03-09 |
Systems and methods for forming metal oxides using metal organo-amines and metal organo-oxides App 20040043630 - Vaartstra, Brian A. ;   et al. | 2004-03-04 |
Systems and methods for the electrolytic removal of metals from substrates App 20040040853 - Marsh, Eugene P. ;   et al. | 2004-03-04 |
Method and system for binding halide-based contaminants App 20040043228 - Derderian, Garo J. ;   et al. | 2004-03-04 |
Mixed metal nitride and boride barrier layers Grant 6,664,159 - Vaartstra , et al. December 16, 2 | 2003-12-16 |
Film on a surface of a mold used during semiconductor device fabrication Grant 6,607,173 - Westmoreland August 19, 2 | 2003-08-19 |
Ruthenium and ruthenium dioxide removal method and material App 20030121891 - Westmoreland, Donald L. | 2003-07-03 |
Plasmaless dry contact cleaning method using interhalogen compounds App 20030087523 - Sandhu, Gurtej S. ;   et al. | 2003-05-08 |
High efficiency method for performing a chemical vapordeposition utilizing a nonvolatile precursor App 20020192376 - Westmoreland, Donald L. ;   et al. | 2002-12-19 |
Film on a surface of a mold used during semiconductor device fabrication App 20020185584 - Westmoreland, Donald L. | 2002-12-12 |
Mixed metal nitride and boride barrier layers App 20020163025 - Vaartstra, Brian A. ;   et al. | 2002-11-07 |
Ruthenium and ruthenium dioxide removal method and material Grant 6,451,214 - Westmoreland September 17, 2 | 2002-09-17 |
Film on a surface of a mold used during semiconductor device fabrication Grant 6,446,933 - Westmoreland September 10, 2 | 2002-09-10 |
Mixed metal nitride and boride barrier layers Grant 6,445,023 - Vaartstra , et al. September 3, 2 | 2002-09-03 |
Ruthenium and ruthenium dioxide removal method and material App 20020056829 - Westmoreland, Donald L. | 2002-05-16 |
Ruthenium and ruthenium dioxide removal method and material App 20020056697 - Westmoreland, Donald L. | 2002-05-16 |
Ruthenium and ruthenium dioxide removal method and material App 20020056701 - Westmoreland, Donald L. | 2002-05-16 |
Chemical vapor deposition of titanium App 20020017724 - Sandhu, Gurtej Singh ;   et al. | 2002-02-14 |
Chemical vapor deposition of titanium App 20020006525 - Sandhu, Gurtej Singh ;   et al. | 2002-01-17 |
Plasmaless Dry Contact Cleaning Method Using Interhalogen Compounds App 20020004308 - SANDHU, GURTEJ S. ;   et al. | 2002-01-10 |
Chemical vapor deposition of titanium App 20020000263 - Sandhu, Gurtej Singh ;   et al. | 2002-01-03 |
Chemical vapor deposition of titanium App 20020000662 - Sandhu, Gurtej Singh ;   et al. | 2002-01-03 |
Chemical vapor deposition of titanium Grant 6,284,316 - Sandhu , et al. September 4, 2 | 2001-09-04 |
Chemical Vapor Deposition Apparatus With Liquid Feed App 20010001949 - WESTMORELAND, DONALD L. ;   et al. | 2001-05-31 |
System for wafer cleaning Grant 6,235,145 - Li , et al. May 22, 2 | 2001-05-22 |
Chamber and cleaning process therefor Grant 6,201,219 - Sandhu , et al. March 13, 2 | 2001-03-13 |
Method of inhibiting deposition of material on an internal wall of a chemical vapor deposition reactor Grant 6,162,499 - Sandhu , et al. December 19, 2 | 2000-12-19 |
Method of reducing carbon incorporation into films produced by chemical vapor deposition involving titanium organometallic and metal-organic precursor compounds Grant 5,902,651 - Westmoreland , et al. May 11, 1 | 1999-05-11 |
Plasmaless dry contact cleaning method using interhalogen compounds Grant 5,888,906 - Sandhu , et al. March 30, 1 | 1999-03-30 |
Method of inhibiting deposition of material on an internal wall of a chemical vapor deposition reactor Grant 5,824,365 - Sandhu , et al. October 20, 1 | 1998-10-20 |
Method of wafer cleaning, and system and cleaning solution regarding same Grant 5,783,495 - Li , et al. July 21, 1 | 1998-07-21 |
Method of reducing carbon incorporation into films produced by chemical vapor deposition involving titanium organometallic and metal-organic precursor compounds Grant 5,693,377 - Westmoreland , et al. December 2, 1 | 1997-12-02 |
Vapor delivery system for solid precursors and method regarding same Grant 5,674,574 - Atwell , et al. October 7, 1 | 1997-10-07 |
Reductive elimination chemical vapor deposition processes utilizing organometallic precursor compounds in semiconductor wafer processing Grant 5,384,289 - Westmoreland January 24, 1 | 1995-01-24 |
Method and appartus for subliming precursors Grant 5,377,429 - Sandhu , et al. January 3, 1 | 1995-01-03 |
Semiconductor processing method of etching insulating inorganic metal oxide materials and method of cleaning metals from the surface of semiconductor wafers Grant 5,368,687 - Sandhu , et al. November 29, 1 | 1994-11-29 |
Methods of chemical-mechanical polishing insulating inorganic metal oxide materials Grant 5,318,927 - Sandhu , et al. June 7, 1 | 1994-06-07 |
Titanium/aluminum/nitrogen material for semiconductor devices Grant 5,231,306 - Meikle , et al. July 27, 1 | 1993-07-27 |