Westerlaken; Jan Steven Christiaan
Patent Applications and Registrations
Patent applications and USPTO patent grants for Westerlaken; Jan Steven Christiaan.The latest application filed is for "prolonging optical element lifetime in an euv lithography system".
Company Profile
11.26.30
- Westerlaken; Jan Steven Christiaan - Heesch NL
Patent Activity
| Patent | Date |
|---|---|
| Prolonging Optical Element Lifetime In An Euv Lithography System App 20220291591 - Ma; Yue ; et al. | 2022-09-15 |
| Contamination Trap App 20220197158 - DERKS; Sander Catharina Reinier ; et al. | 2022-06-23 |
| Prolonging optical element lifetime in an EUV lithography system Grant 11,340,532 - Ma , et al. May 24, 2 | 2022-05-24 |
| Prolonging Optical Element Lifetime In An Euv Lithography System App 20210109452 - Ma; Yue ; et al. | 2021-04-15 |
| Lithographic apparatus Grant 10,788,763 - Westerlaken , et al. September 29, 2 | 2020-09-29 |
| Support apparatus, lithographic apparatus and device manufacturing method Grant 10,747,125 - Lafarre , et al. A | 2020-08-18 |
| Lithographic apparatus and device manufacturing method Grant 10,620,553 - Westerlaken , et al. | 2020-04-14 |
| Lithographic apparatus and device manufacturing method Grant 10,495,985 - Nakiboglu , et al. De | 2019-12-03 |
| Lithographic Apparatus And Device Manufacturing Method App 20190235398 - WESTERLAKEN; Jan Steven Christiaan ; et al. | 2019-08-01 |
| Support Apparatus, Lithographic Apparatus And Device Manufacturing Method App 20190072863 - Lafarre; Raymond Wilhelmus Louis ; et al. | 2019-03-07 |
| Lithographic apparatus and device manufacturing method Grant 10,216,102 - Westerlaken , et al. Feb | 2019-02-26 |
| Lithographic Apparatus And Device Manufacturing Method App 20190041761 - NAKIBOGLU; Gunes ; et al. | 2019-02-07 |
| Lithographic apparatus, and device manufacturing method Grant 10,191,393 - Westerlaken , et al. Ja | 2019-01-29 |
| Thermal conditioning unit, lithographic apparatus and device manufacturing method Grant 10,191,395 - Jacobs , et al. Ja | 2019-01-29 |
| Lithographic apparatus and device manufacturing method Grant 10,133,197 - Nakiboglu , et al. November 20, 2 | 2018-11-20 |
| Support apparatus, lithographic apparatus and device manufacturing method Grant 10,120,292 - Lafarre , et al. November 6, 2 | 2018-11-06 |
| Conditioning system and lithographic apparatus comprising a conditioning system Grant 10,114,298 - Westerlaken , et al. October 30, 2 | 2018-10-30 |
| Lithographic apparatus and device manufacturing method Grant 10,114,295 - Nakiboglu , et al. October 30, 2 | 2018-10-30 |
| Lithographic apparatus and method in a lithographic process Grant 10,095,130 - Kroes , et al. October 9, 2 | 2018-10-09 |
| Gas flow optimization in reticle stage environment Grant 10,031,428 - Cuypers , et al. July 24, 2 | 2018-07-24 |
| Thermal Conditioning Unit, Lithographic Apparatus And Device Manufacturing Method App 20180164704 - JACOBS; Johannes Henricus Wilhelmus ; et al. | 2018-06-14 |
| Lithographic Apparatus And Device Manufacturing Method App 20180164705 - WESTERLAKEN; Jan Steven Christiaan ; et al. | 2018-06-14 |
| Sensor, lithographic apparatus and device manufacturing method Grant 9,971,254 - Laurent , et al. May 15, 2 | 2018-05-15 |
| Lithographic Apparatus And Method In A Lithographic Process App 20180113389 - KROES; Johannes Pieter ; et al. | 2018-04-26 |
| Lithographic Apparatus, And Device Manufacturing Method App 20180059555 - WESTERLAKEN; Jan Steven Christiaan ; et al. | 2018-03-01 |
| Thermal conditioning unit, lithographic apparatus and device manufacturing method Grant 9,891,541 - Jacobs , et al. February 13, 2 | 2018-02-13 |
| Lithographic apparatus and device manufacturing method Grant 9,891,542 - Westerlaken , et al. February 13, 2 | 2018-02-13 |
| Lithographic apparatus and device manufacturing method Grant 9,885,964 - Westerlaken , et al. February 6, 2 | 2018-02-06 |
| Sensor, Lithographic Apparatus And Device Manufacturing Method App 20170363964 - LAURENT; Thibault Simon Mathieu ; et al. | 2017-12-21 |
| Stage system and lithographic apparatus comprising such stage system Grant 9,785,060 - Beerens , et al. October 10, 2 | 2017-10-10 |
| Lithographic Apparatus And Device Manufacturing Method App 20170261864 - NAKIBOGLU; Gunes ; et al. | 2017-09-14 |
| Sensor, lithographic apparatus and device manufacturing method Grant 9,753,382 - Laurent , et al. September 5, 2 | 2017-09-05 |
| Lithographic Apparatus And Device Manufacturing Method App 20170242349 - Westerlaken; Jan Steven Christiaan ; et al. | 2017-08-24 |
| Conditioning System And Lithographic Apparatus Comprising A Conditioning System App 20170199470 - WESTERLAKEN; Jan Steven Christiaan ; et al. | 2017-07-13 |
| Lithographic Apparatus And Device Manufacturing Method App 20170160653 - NAKIBOGLU; Gunes ; et al. | 2017-06-08 |
| Support Apparatus, Lithographic Apparatus And Device Manufacturing Method App 20170090304 - Lafarre; Raymond Wilhelmus Louis ; et al. | 2017-03-30 |
| Lithographic Apparatus App 20170068175 - WESTERLAKEN; Jan Steven Christiaan ; et al. | 2017-03-09 |
| Lithographic apparatus and device manufacturing method Grant 9,529,277 - Westerlaken , et al. December 27, 2 | 2016-12-27 |
| Lithographic apparatus Grant 9,513,568 - Westerlaken , et al. December 6, 2 | 2016-12-06 |
| Support apparatus, lithographic apparatus and device manufacturing method Grant 9,507,275 - Lafarre , et al. November 29, 2 | 2016-11-29 |
| Gas Flow Optimization in Reticle Stage Environment App 20150355557 - CUYPERS; Koen ; et al. | 2015-12-10 |
| Stage System And Lithographic Apparatus Comprising Such Stage System App 20150227060 - Beerens; Ruud Antonius Catharina Maria ; et al. | 2015-08-13 |
| Lithographic Apparatus And Device Manufacturing Method App 20150185624 - WESTERLAKEN; Jan Steven Christiaan ; et al. | 2015-07-02 |
| Lithographic Apparatus App 20150168854 - Westerlaken; Jan Steven Christiaan ; et al. | 2015-06-18 |
| Support Apparatus, Lithographic Apparatus And Device Manufacturing Method App 20150109599 - Koevoets; Adrianus Hendrik ; et al. | 2015-04-23 |
| Lithographic apparatus and device manufacturing method Grant 8,988,650 - Westerlaken , et al. March 24, 2 | 2015-03-24 |
| Sensor, Lithographic Apparatus And Device Manufacturing Method App 20150077728 - Laurent; Thibault Simon Mathieu ; et al. | 2015-03-19 |
| Thermal Conditioning Unit, Lithographic Apparatus And Device Manufacturing Method App 20150070666 - Jacobs; Johannes Henricus Wilhelmus ; et al. | 2015-03-12 |
| Lithographic Apparatus And Device Manufacturing Method App 20130107236 - WESTERLAKEN; Jan Steven Christiaan ; et al. | 2013-05-02 |
| Lithographic Apparatus and Substrate Handling Method App 20130077078 - LAFARRE; Raymond Wilhelmus Louis ; et al. | 2013-03-28 |
| Lithographic Apparatus And Device Manufacturing Method App 20120052447 - WESTERLAKEN; Jan Steven Christiaan ; et al. | 2012-03-01 |
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