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Patent applications and USPTO patent grants for Wen; Zhongxin.The latest application filed is for "method of cleaning an optical film-thickness measuring system".
Patent | Date |
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Method Of Cleaning An Optical Film-thickness Measuring System App 20220072590 - Takahashi; Nobuyuki ;   et al. | 2022-03-10 |
Substrate processing apparatus and method of detecting indentation formed in substrate Grant 11,221,239 - Wen , et al. January 11, 2 | 2022-01-11 |
Head height adjustment device and substrate processing apparatus provided with head height adjustment device Grant 10,556,314 - Sakugawa , et al. Feb | 2020-02-11 |
Substrate Processing Apparatus And Method Of Detecting Indentation Formed In Substrate App 20190025096 - Wen; Zhongxin ;   et al. | 2019-01-24 |
Head Height Adjustment Device And Substrate Processing Apparatus Provided With Head Height Adjustment Device App 20180001438 - SAKUGAWA; Suguru ;   et al. | 2018-01-04 |
Substrate Processing Apparatus App 20170352573 - WEN; Zhongxin ;   et al. | 2017-12-07 |
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