loadpatents
Patent applications and USPTO patent grants for Weissenrieder; Karl-Stefan.The latest application filed is for "optical assembly having a thermally conductive component".
Patent | Date |
---|---|
Optical assembly having a thermally conductive component Grant 11,194,119 - Kaller , et al. December 7, 2 | 2021-12-07 |
Optical Assembly Having A Thermally Conductive Component App 20200103771 - Kaller; Julian ;   et al. | 2020-04-02 |
Optical assembly having a thermally conductive component Grant 10,509,336 - Kaller , et al. Dec | 2019-12-17 |
Microlithographic Projection Exposure Apparatus App 20170322343 - Kamenov; Vladimir ;   et al. | 2017-11-09 |
Optical Assembly Having A Thermally Conductive Component App 20170261867 - Kaller; Julian ;   et al. | 2017-09-14 |
Microlithographic projection exposure apparatus Grant 9,733,395 - Kamenov , et al. August 15, 2 | 2017-08-15 |
Micromirror arrangement having a coating and method for the production thereof Grant 8,928,980 - Weissenrieder , et al. January 6, 2 | 2015-01-06 |
Microlithographic Projection Exposure Apparatus App 20140320955 - Kamenov; Vladimir ;   et al. | 2014-10-30 |
Micromirror Arrangement Having A Coating And Method For The Production Thereof App 20120182606 - WEISSENRIEDER; Karl-Stefan ;   et al. | 2012-07-19 |
Microlithographic Projection Exposure Apparatus App 20110222043 - Kamenov; Vladimir ;   et al. | 2011-09-15 |
Microlithographic projection exposure apparatus App 20080297754 - Kamenov; Vladimir ;   et al. | 2008-12-04 |
Projection Objective For Immersion Lithography App 20080297745 - WEISSENRIEDER; Karl-Stefan ;   et al. | 2008-12-04 |
Projection objective for immersion lithography Grant 7,460,206 - Weissenrieder , et al. December 2, 2 | 2008-12-02 |
Projection Objective For Immersion Lithography App 20080291419 - Weissenrieder; Karl-Stefan ;   et al. | 2008-11-27 |
Projection objective for immersion lithography App 20050225737 - Weissenrieder, Karl-Stefan ;   et al. | 2005-10-13 |
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