| Patent | Date |
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Device for changing a surface shape of an optical element via electron irradiation
Grant 10,551,747 - Pauls , et al. Fe | 2020-02-04 |
Device For Changing A Surface Shape Of An Optical Element Via Electron Irradiation
App 20190018324 - Pauls; Walter ; et al. | 2019-01-17 |
Wavefront correction element for use in an optical system
Grant 10,151,922 - Banyay , et al. Dec | 2018-12-11 |
Wavefront Correction Element For Use In An Optical System
App 20180059413 - BANYAY; Matus ; et al. | 2018-03-01 |
Method for operating a data receiver and data receiver, in particular in a vehicle
Grant 9,179,176 - Hehn , et al. November 3, 2 | 2015-11-03 |
Substrate for mirrors for EUV lithography
Grant 8,976,927 - Ekstein , et al. March 10, 2 | 2015-03-10 |
Reflective Optical Element for the EUV Wavelength Range, Method for Producing and for Correcting Such an Element, Projection Lens for Microlithography Comprising Such an Element, and Projection Exposure Apparatus for Microlithography Comprising Such a Projection Lens
App 20140307308 - WEISS; Markus ; et al. | 2014-10-16 |
Method For Operating A Data Receiver And Data Receiver, In Particular In A Vehicle
App 20140298391 - Hehn; Thorsten ; et al. | 2014-10-02 |
Substrate For Mirrors For Euv Lithography
App 20130170056 - EKSTEIN; Claudia ; et al. | 2013-07-04 |
Irradiation with high energy ions for surface structuring and treatment of surface proximal sections of optical elements
Grant 8,466,047 - Weiser , et al. June 18, 2 | 2013-06-18 |
Substrates And Mirrors For Euv Microlithography, And Methods For Producing Them
App 20120212721 - CLAUSS; Wilfried ; et al. | 2012-08-23 |
Irradiation With High Energy Ions For Surface Structuring And Treatment Of Surface Proximal Sections Of Optical Elements
App 20120206795 - WEISER; Martin ; et al. | 2012-08-16 |
Irradiation with high energy ions for surface structuring and treatment of surface proximal sections of optical elements
Grant 8,163,632 - Weiser , et al. April 24, 2 | 2012-04-24 |
Removing reflective layers from EUV mirrors
Grant 7,919,004 - Weiser , et al. April 5, 2 | 2011-04-05 |
Removing Reflective Layers From Euv Mirrors
App 20100027106 - WEISER; Martin ; et al. | 2010-02-04 |
Mirror for use in a projection exposure apparatus
Grant 7,481,543 - Dinger , et al. January 27, 2 | 2009-01-27 |
Irradiation With High Energy Ions For Surface Structuring And Treatment Of Surface Proximal Sections Of Optical Elements
App 20080149858 - Weiser; Martin ; et al. | 2008-06-26 |
Method of manufacturing an optical element
Grant 7,118,449 - Dinger , et al. October 10, 2 | 2006-10-10 |
Reflecting device for electromagnetic waves
Grant 7,077,533 - Weiser , et al. July 18, 2 | 2006-07-18 |
Doped alloys for electrical interconnects, methods of production and uses thereof
App 20060113683 - Dean; Nancy ; et al. | 2006-06-01 |
Substrate material for X-ray optical components
Grant 7,031,428 - Dinger , et al. April 18, 2 | 2006-04-18 |
Catadioptric objective
Grant 6,842,294 - Holderer , et al. January 11, 2 | 2005-01-11 |
Substrate material for X-ray optical components
App 20040202278 - Dinger, Udo ; et al. | 2004-10-14 |
Reflecting device for electromagnetic waves
App 20040174624 - Weiser, Martin ; et al. | 2004-09-09 |
Catadioptric objective
App 20020181125 - Holderer, Hubert ; et al. | 2002-12-05 |
Method for monitoring deformations with light waveguides
Grant 5,044,205 - Wolff , et al. September 3, 1 | 1991-09-03 |
Anchoring of tension members
Grant 4,443,132 - Kotulla , et al. April 17, 1 | 1984-04-17 |
Anchorage devices for a tension wire bundle of tension wires
Grant 4,367,568 - Weiser January 11, 1 | 1983-01-11 |
Reinforcement of armored earth work constructions
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