Weiher; Susan
Patent Applications and Registrations
Patent applications and USPTO patent grants for Weiher; Susan.The latest application filed is for "tool health information monitoring and tool performance analysis in semiconductor processing".
- Weiher; Susan - Bannewitz DE
| Patent | Date |
|---|---|
| Tool health information monitoring and tool performance analysis in semiconductor processing Grant 7,454,312 - Weiher , et al. November 18, 2 | 2008-11-18 |
| Tool health information monitoring and tool performance analysis in semiconductor processing App 20070219738 - Weiher; Susan ; et al. | 2007-09-20 |
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