| Patent | Date |
|---|
Method for Removal of Carbon from an Organosilicate Material
App 20130295334 - Wu; Aiping ; et al. | 2013-11-07 |
Process for restoring dielectric properties
Grant 8,283,260 - Weigel , et al. October 9, 2 | 2012-10-09 |
Aminosilanes for shallow trench isolation films
Grant 7,999,355 - Weigel , et al. August 16, 2 | 2011-08-16 |
Method for Removal of Carbon From An Organosilicate Material
App 20100151206 - Wu; Aiping ; et al. | 2010-06-17 |
Process For Restoring Dielectric Properties
App 20100041234 - Weigel; Scott Jeffrey ; et al. | 2010-02-18 |
Aminosilanes for Shallow Trench Isolation Films
App 20100009546 - Weigel; Scott Jeffrey ; et al. | 2010-01-14 |
Compositions for Preparing Low Dielectric Materials Containing Solvents
App 20090298671 - Weigel; Scott Jeffrey ; et al. | 2009-12-03 |
Activated chemical process for enhancing material properties of dielectric films
Grant 7,500,397 - Weigel , et al. March 10, 2 | 2009-03-10 |
Compositions for preparing low dielectric materials
Grant 7,482,676 - Peterson , et al. January 27, 2 | 2009-01-27 |
Aerosol misted deposition of low dielectric organosilicate films
Grant 7,446,055 - Weigel , et al. November 4, 2 | 2008-11-04 |
Photoimprintable Low Dielectric Constant Material and Method for Making and Using Same
App 20080264672 - Markley; Thomas John ; et al. | 2008-10-30 |
Adsorbents, methods of preparation, and methods of use thereof
Grant 7,442,232 - White , et al. October 28, 2 | 2008-10-28 |
Method for characterizing porous low dielectric constant films
Grant 7,421,885 - Kitzhoffer , et al. September 9, 2 | 2008-09-09 |
Activated Chemical Process for Enhancing Material Properties of Dielectric Films
App 20080199977 - Weigel; Scott Jeffrey ; et al. | 2008-08-21 |
Low Temperature Sol-Gel Silicates As Dielectrics or Planarization Layers For Thin Film Transistors
App 20080012074 - Braymer; Thomas Albert ; et al. | 2008-01-17 |
Curing Dielectric Films Under A Reducing Atmosphere
App 20070299239 - Weigel; Scott Jeffrey ; et al. | 2007-12-27 |
Photodefinable low dielectric constant material and method for making and using same
App 20070299176 - Markley; Thomas John ; et al. | 2007-12-27 |
Low dielectric materials and methods for making same
Grant 7,307,343 - Kirner , et al. December 11, 2 | 2007-12-11 |
Compositions for preparing low dielectric materials
Grant 7,294,585 - Peterson , et al. November 13, 2 | 2007-11-13 |
Ionic additives for extreme low dielectric constant chemical formulations
Grant 7,265,062 - Mandal , et al. September 4, 2 | 2007-09-04 |
Top coat for lithography processes
App 20070196773 - Weigel; Scott Jeffrey ; et al. | 2007-08-23 |
Low dielectric materials and methods for making same
Grant 7,186,613 - Kirner , et al. March 6, 2 | 2007-03-06 |
Compositions for preparing low dielectric materials
App 20060249713 - Peterson; Brian Keith ; et al. | 2006-11-09 |
Compositions for preparing low dielectric materials
App 20060249818 - Peterson; Brian Keith ; et al. | 2006-11-09 |
Compositions for preparing low dielectric materials
Grant 7,122,880 - Peterson , et al. October 17, 2 | 2006-10-17 |
Aerosol misted deposition of low dielectric organosilicate films
App 20060211271 - Weigel; Scott Jeffrey ; et al. | 2006-09-21 |
Method for defining a feature on a substrate
App 20060183055 - O'Neill; Mark Leonard ; et al. | 2006-08-17 |
Adsorbents, methods of preparation, and methods of use thereof
App 20060144227 - White; MarkG ; et al. | 2006-07-06 |
Method for characterizing porous low dielectric constant films
App 20060005608 - Kitzhoffer; Ronald Joseph ; et al. | 2006-01-12 |
Low dielectric materials and methods for making same
App 20050260420 - Collins, Martha Jean ; et al. | 2005-11-24 |
Mesoporous films having reduced dielectric constants
Grant 6,942,918 - MacDougall , et al. September 13, 2 | 2005-09-13 |
Solvents and methods using same for removing silicon-containing residues from a substrate
App 20050196535 - Weigel, Scott Jeffrey ; et al. | 2005-09-08 |
Compositions for preparing low dielectric materials containing solvents
App 20050196974 - Weigel, Scott Jeffrey ; et al. | 2005-09-08 |
Low dielectric materials and methods for making same
App 20050116346 - Kirner, John Francis ; et al. | 2005-06-02 |
Mesoporous films having reduced dielectric constants
Grant 6,818,289 - MacDougall , et al. November 16, 2 | 2004-11-16 |
Apparatus and method of research for creating and testing thin films
App 20040071888 - Chondroudis, Konstantinos ; et al. | 2004-04-15 |
Compositions for preparing low dielectric materials
App 20040048960 - Peterson, Brian Keith ; et al. | 2004-03-11 |
Low dielectric materials and methods for making same
App 20030224156 - Kirner, John Francis ; et al. | 2003-12-04 |
Mesoporous films having reduced dielectric constants
App 20030157311 - MacDougall, James Edward ; et al. | 2003-08-21 |
Mesoporous films having reduced dielectric constants
Grant 6,592,980 - MacDougall , et al. July 15, 2 | 2003-07-15 |
Mesoporous films having reduced dielectric constants
App 20020102396 - MacDougall, James Edward ; et al. | 2002-08-01 |
Mesoporous films having reduced dielectric constants
Grant 6,365,266 - MacDougall , et al. April 2, 2 | 2002-04-02 |
Carbon dioxide adsorbents containing magnesium oxide suitable for use at high temperatures
Grant 6,280,503 - Mayorga , et al. August 28, 2 | 2001-08-28 |
Gas separation with lithium-containing ZSM-2 metallosilicates
Grant 5,779,766 - Weigel , et al. July 14, 1 | 1998-07-14 |
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