| Patent | Date |
|---|
Vapor deposition deposited photoresist, and manufacturing and lithography systems therefor
Grant 9,829,805 - Michaelson , et al. November 28, 2 | 2017-11-28 |
Vapor deposition deposited photoresist, and manufacturing and lithography systems therefor
Grant 9,632,411 - Michaelson , et al. April 25, 2 | 2017-04-25 |
Vapor Deposition Deposited Photoresist, And Manufacturing And Lithography Systems Therefor
App 20170068174 - Michaelson; Timothy ; et al. | 2017-03-09 |
Atomic layer deposition of hafnium or zirconium alloy films
Grant 9,236,467 - Weidman , et al. January 12, 2 | 2016-01-12 |
Vapor Deposition Deposited Photoresist, And Manufacturing And Lithography Systems Therefor
App 20140268082 - Michaelson; Timothy ; et al. | 2014-09-18 |
Activated silicon precursors for low temperature deposition
Grant 8,821,986 - Weidman , et al. September 2, 2 | 2014-09-02 |
Atomic Layer Deposition of Hafnium or Zirconium Alloy Films
App 20140231930 - Weidman; Timothy W. ; et al. | 2014-08-21 |
Enhanced vision system for screen printing pattern alignment
Grant 8,673,679 - Gallazzo , et al. March 18, 2 | 2014-03-18 |
Carbosilane Precursors For Low Temperature Film Deposition
App 20140038427 - Weidman; Timothy W. ; et al. | 2014-02-06 |
Method And Apparatus For Low Temperature ALD Deposition
App 20140023794 - Mahajani; Maitreyee ; et al. | 2014-01-23 |
Atomic layer deposition of photoresist materials and hard mask precursors
Grant 8,536,068 - Weidman , et al. September 17, 2 | 2013-09-17 |
Radiation patternable CVD film
Grant 8,465,903 - Weidman , et al. June 18, 2 | 2013-06-18 |
Methods for deposition of silicon carbide and silicon carbonitride films
Grant 8,440,571 - Weidman , et al. May 14, 2 | 2013-05-14 |
Atomic Layer Deposition Of Films Using Precursors Containing Hafnium Or Zirconium
App 20130113085 - Michaelson; Timothy ; et al. | 2013-05-09 |
Dry Etch Processes
App 20130115778 - Xue; Jun ; et al. | 2013-05-09 |
Activated Silicon Precursors For Low Temperature Deposition
App 20130071580 - Weidman; Timothy W. ; et al. | 2013-03-21 |
Carbosilane Precursors For Low Temperature Film Deposition
App 20130065404 - Weidman; Timothy W. ; et al. | 2013-03-14 |
Process For Electroless Copper Deposition On A Ruthenium Seed
App 20120315756 - Weidman; Timothy W. ; et al. | 2012-12-13 |
Electroless deposition process on a silicon contact
Grant 8,308,858 - Stewart , et al. November 13, 2 | 2012-11-13 |
Hybrid heterojunction solar cell fabrication using a doping layer mask
Grant 8,309,446 - Weidman , et al. November 13, 2 | 2012-11-13 |
Hot Wire Atomic Layer Deposition Apparatus And Methods Of Use
App 20120269967 - Yudovsky; Joseph ; et al. | 2012-10-25 |
Forming solar cells using a patterned deposition process
Grant 8,207,005 - Weidman , et al. June 26, 2 | 2012-06-26 |
Methods for oxidation of a semiconductor device
Grant 8,207,044 - Mani , et al. June 26, 2 | 2012-06-26 |
Hybrid heterojunction solar cell fabrication using a metal layer mask
Grant 8,183,081 - Weidman , et al. May 22, 2 | 2012-05-22 |
Apparatus And Methods For Deposition Of Silicon Carbide And Silicon Carbonitride Films
App 20120122302 - Weidman; Timothy W. ; et al. | 2012-05-17 |
Photoluminescence Image For Alignment Of Selective-emitter Diffusions
App 20120100666 - Gee; James M. ; et al. | 2012-04-26 |
Radiation Patternable CVD Film
App 20120088193 - Weidman; Timothy W. ; et al. | 2012-04-12 |
Atomic Layer Deposition Of Photoresist Materials And Hard Mask Precursors
App 20120088369 - Weidman; Timothy W. ; et al. | 2012-04-12 |
Enhanced Vision System For Screen Printing Pattern Alignment
App 20120040490 - Gallazzo; Marco ; et al. | 2012-02-16 |
Oxide Nitride Stack For Backside Reflector Of Solar Cell
App 20110272008 - Mungekar; Hemant P. ; et al. | 2011-11-10 |
Methods For Oxidation Of A Semiconductor Device
App 20110217850 - MANI; RAJESH ; et al. | 2011-09-08 |
Forming Solar Cells Using A Patterned Deposition Process
App 20110183458 - WEIDMAN; Timothy W. ; et al. | 2011-07-28 |
Back contact solar cells using printed dielectric barrier
Grant 7,951,637 - Weidman , et al. May 31, 2 | 2011-05-31 |
Methods for oxidation of a semiconductor device
Grant 7,947,561 - Mani , et al. May 24, 2 | 2011-05-24 |
Solar Cell Contact Formation Process Using A Patterned Etchant Material
App 20110104850 - WEIDMAN; Timothy W. ; et al. | 2011-05-05 |
Solar cell contact formation process using a patterned etchant material
Grant 7,888,168 - Weidman , et al. February 15, 2 | 2011-02-15 |
Apparatus for electroless deposition of metals onto semiconductor substrates
Grant 7,827,930 - Lubomirsky , et al. November 9, 2 | 2010-11-09 |
Curing methods for silicon dioxide multi-layers
Grant 7,825,044 - Mallick , et al. November 2, 2 | 2010-11-02 |
Curing Methods For Silicon Dioxide Multi-layers
App 20100255655 - Mallick; Abhijit Basu ; et al. | 2010-10-07 |
Curing methods for silicon dioxide thin films deposited from alkoxysilane precursor with harp II process
Grant 7,745,352 - Mallick , et al. June 29, 2 | 2010-06-29 |
Electroless Deposition Process On A Silicon Contact
App 20100107927 - Stewart; Michael P. ; et al. | 2010-05-06 |
Back Contact Solar Cell Modules
App 20100051085 - Weidman; Timothy W. ; et al. | 2010-03-04 |
Back Contact Solar Cells Using Printed Dielectric Barrier
App 20100055822 - Weidman; Timothy W. ; et al. | 2010-03-04 |
Electroless deposition process on a silicon contact
Grant 7,659,203 - Stewart , et al. February 9, 2 | 2010-02-09 |
Process for electroless copper deposition
Grant 7,651,934 - Lubomirsky , et al. January 26, 2 | 2010-01-26 |
Hybrid Heterojunction Solar Cell Fabrication Using A Doping Layer Mask
App 20100015756 - Weidman; Timothy W. ; et al. | 2010-01-21 |
Hybrid Heterojunction Solar Cell Fabrication Using A Metal Layer Mask
App 20100015751 - Weidman; Timothy W. ; et al. | 2010-01-21 |
Methods For Oxidation Of A Semiconductor Device
App 20090233453 - MANI; RAJESH ; et al. | 2009-09-17 |
Solar Cell Contact Formation Process Using A Patterned Etchant Material
App 20090142880 - Weidman; Timothy W. ; et al. | 2009-06-04 |
Crystalline Solar Cell Metallization Methods
App 20090139568 - Weidman; Timothy W. ; et al. | 2009-06-04 |
Raman spectroscopy as integrated chemical metrology
Grant 7,542,132 - Fang , et al. June 2, 2 | 2009-06-02 |
Contact metallization scheme using a barrier layer over a silicide layer
Grant 7,514,353 - Weidman , et al. April 7, 2 | 2009-04-07 |
Curing Methods For Silicon Dioxide Thin Films Deposited From Alkoxysilane Precursor With Harp Ii Process
App 20090061647 - Mallick; Abhijit Basu ; et al. | 2009-03-05 |
Measurement techniques for controlling aspects of a electroless deposition process
Grant 7,465,358 - Weidman , et al. December 16, 2 | 2008-12-16 |
Ruthenium containing layer deposition method
Grant 7,438,949 - Weidman October 21, 2 | 2008-10-21 |
Integrated Magnetic Features
App 20080079530 - Weidman; Timothy W. | 2008-04-03 |
Raman Spectroscopy As Integrated Chemical Metrology
App 20080024762 - FANG; HONGBIN ; et al. | 2008-01-31 |
Method Of Forming A Reliable Electrochemical Capacitor
App 20070271751 - WEIDMAN; Timothy W. | 2007-11-29 |
Reliable Fuel Cell Electrode Design
App 20070243452 - Weidman; Timothy W. ; et al. | 2007-10-18 |
Patterned Electroless Metallization Processes For Large Area Electronics
App 20070190362 - WEIDMAN; Timothy W. | 2007-08-16 |
Method Of Selectively Depositing A Thin Film Material At A Semiconductor Interface
App 20070108404 - Stewart; Michael P. ; et al. | 2007-05-17 |
Integrated Electroless Deposition System
App 20070111519 - Lubomirsky; Dmitry ; et al. | 2007-05-17 |
Process for electroless copper deposition
App 20070099422 - Wijekoon; Kapila ; et al. | 2007-05-03 |
Composition and method for selectively removing native oxide from silicon-containing surfaces
App 20070099806 - Stewart; Michael P. ; et al. | 2007-05-03 |
Process for electroless copper deposition
App 20070004201 - Lubomirsky; Dmitry ; et al. | 2007-01-04 |
Electroless deposition process on a silicon contact
App 20060264043 - Stewart; Michael P. ; et al. | 2006-11-23 |
Electroless deposition processes and compositions for forming interconnects
App 20060252252 - Zhu; Zhize ; et al. | 2006-11-09 |
Contact metallization scheme using a barrier layer over a silicide layer
App 20060251800 - Weidman; Timothy W. ; et al. | 2006-11-09 |
In-situ silicidation metallization process
App 20060251801 - Weidman; Timothy W. ; et al. | 2006-11-09 |
Electroless deposition process on a silicide contact
App 20060246217 - Weidman; Timothy W. ; et al. | 2006-11-02 |
Process for electroless copper deposition on a ruthenium seed
App 20060246699 - Weidman; Timothy W. ; et al. | 2006-11-02 |
Deposition of an intermediate catalytic layer on a barrier layer for copper metallization
App 20060240187 - Weidman; Timothy W. | 2006-10-26 |
Ruthenium layer deposition apparatus and method
App 20060162658 - Weidman; Timothy W. | 2006-07-27 |
Ruthenium containing layer deposition method
App 20060165892 - Weidman; Timothy W. | 2006-07-27 |
Integrated electroless deposition system
App 20060033678 - Lubomirsky; Dmitry ; et al. | 2006-02-16 |
Apparatus for electroless deposition of metals onto semiconductor substrates
App 20050263066 - Lubomirsky, Dmitry ; et al. | 2005-12-01 |
Method and apparatus for selectively changing thin film composition during electroless deposition in a single chamber
App 20050181226 - Weidman, Timothy W. ; et al. | 2005-08-18 |
Measurement techniques for controlling aspects of a electroless deposition process
App 20050084615 - Weidman, Timothy W. ; et al. | 2005-04-21 |
Mesoporous films having reduced dielectric constants
Grant 6,818,289 - MacDougall , et al. November 16, 2 | 2004-11-16 |
Mesoporous films having reduced dielectric constants
App 20030157311 - MacDougall, James Edward ; et al. | 2003-08-21 |
Mesoporous films having reduced dielectric constants
Grant 6,592,980 - MacDougall , et al. July 15, 2 | 2003-07-15 |
Energy sensitive materials and methods for their use
Grant 5,635,338 - Joshi , et al. June 3, 1 | 1997-06-03 |
Energy sensitive materials and methods for their use
Grant 5,439,780 - Joshi , et al. August 8, 1 | 1995-08-08 |
Silicon network polymers
Grant 4,921,321 - Weidman May 1, 1 | 1990-05-01 |
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