Patent | Date |
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Reactive sputtering with HIPIMS Grant 11,380,530 - Weichart , et al. July 5, 2 | 2022-07-05 |
Radiation heater arrangement Grant 11,143,416 - Weichart , et al. October 12, 2 | 2021-10-12 |
Reactive Sputtering With Hipims App 20200388474 - Weichart; Juergen ;   et al. | 2020-12-10 |
Reactive sputtering with HIPIMs Grant 10,784,092 - Weichart , et al. Sept | 2020-09-22 |
Method of sputtering and sputter system Grant 10,202,682 - Rieschl , et al. Feb | 2019-02-12 |
In-situ conditioning for vacuum processing of polymer substrates Grant 9,719,177 - Weichart August 1, 2 | 2017-08-01 |
Method Of Sputtering And Sputter System App 20170204511 - Rieschl; Sven Uwe ;   et al. | 2017-07-20 |
Apparatus for sputtering and a method of fabricating a metallization structure Grant 9,644,261 - Weichart , et al. May 9, 2 | 2017-05-09 |
Electro-static Chuck With Radiofrequency Shunt App 20170117174 - WEICHART; Juergen ;   et al. | 2017-04-27 |
Method of HIPIMS sputtering and HIPIMS sputter system Grant 9,624,572 - Rieschl , et al. April 18, 2 | 2017-04-18 |
Radiation Heater Arrangement App 20160169536 - Weichart; Juergen ;   et al. | 2016-06-16 |
Method Of Hipims Sputtering And Hipims Sputter System App 20150368792 - Rieschl; Sven Uwe ;   et al. | 2015-12-24 |
Magnetron source and method of manufacturing Grant 8,852,412 - Weichart October 7, 2 | 2014-10-07 |
Apparatus For Sputtering And A Method Of Fabricating A Metallization Structure App 20140158530 - Weichart; Juergen ;   et al. | 2014-06-12 |
Apparatus for sputtering and a method of fabricating a metallization structure Grant 8,691,058 - Weichart , et al. April 8, 2 | 2014-04-08 |
Method of magnetron sputtering and a method for determining a power modulation compensation function for a power supply applied to a magnetron sputtering source Grant 8,574,409 - Kadlec , et al. November 5, 2 | 2013-11-05 |
In-situ Conditioning For Vacuum Processing Of Polymer Substrates App 20130248358 - Weichart; Juergen | 2013-09-26 |
Method Of Magnetron Sputtering And A Method For Determining A Power Modulation Compensation Function For A Power Supply Applied To A Magnetron Sputtering Source App 20120279851 - Kadlec; Stanislav ;   et al. | 2012-11-08 |
Method of magnetron sputtering and a method for determining a power modulation compensation function for a power supply applied to a magnetron sputtering source Grant 8,246,794 - Kadlec , et al. August 21, 2 | 2012-08-21 |
Magnetron Source And Method Of Manufacturing App 20110192715 - Weichart; Juergen | 2011-08-11 |
Apparatus For Sputtering And A Method Of Fabricating A Metallization Structure App 20090263966 - Weichart; Juergen ;   et al. | 2009-10-22 |
Method Of Magnetron Sputtering And A Method For Determining A Power Modulation Compensation Function For A Power Supply Applied To A Magnetron Sputtering Source App 20090173621 - Kadlec; Stanislav ;   et al. | 2009-07-09 |
Reactive Sputtering With Hipims App 20090173622 - Weichart; Juergen ;   et al. | 2009-07-09 |
Vacuum treatment chamber and method for treating surfaces Grant 6,814,838 - Weichart November 9, 2 | 2004-11-09 |
Vacuum treatment chamber and method for treating surfaces App 20020000368 - Weichart, Juergen | 2002-01-03 |
Hf-plasma Coating Chamber Or Pecvd Coating Chamber, Its Use And Method Of Plating Cds Using The Chamber App 20010007245 - WEICHART, JUERGEN | 2001-07-12 |
Apparatus for plasma treatment of fine grained materials Grant 5,670,065 - Bickmann , et al. September 23, 1 | 1997-09-23 |