Wei; Shao-Chi

Patent Applications and Registrations

Patent applications and USPTO patent grants for Wei; Shao-Chi.The latest application filed is for "method for cleaning substrate, method for manufacturing photomask and method for cleaning photomask".

Company Profile

8.8.12

Wei; Shao-Chi - Hsinchu TW
WEI; SHAO-CHI - HSINCHU CITY TW
Wei; Shao-Chi - Weimar DE
Wei; Shao-Chi - Taichung TW
Wei, Shao-Chi - Taichung City TW

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Method for forming photomask and photolithography method Grant 11,307,492 - Chang , et al. April 19, 2	2022-04-19
Method For Cleaning Substrate, Method For Manufacturing Photomask And Method For Cleaning Photomask App 20220113631 - HSU; YU-HSIN ; et al.	2022-04-14
Method for cleaning substrate, method for manufacturing photomask and method for cleaning photomask Grant 11,209,736 - Hsu , et al. December 28, 2	2021-12-28
Apparatus And Method For Characterizing A Microlithographic Mask App 20210397099 - Ruoff; Johannes ; et al.	2021-12-23
Method For Forming Photomask And Photolithography Method App 20210080822 - CHANG; Shih-Ming ; et al.	2021-03-18
Cleaning Method, Semiconductor Manufacturing Method And A System Thereof App 20210057209 - WEI; SHAO-CHI ; et al.	2021-02-25
Method for forming photomask and photolithography method Grant 10,845,699 - Chang , et al. November 24, 2	2020-11-24
Photomask and fabrication method therefor Grant 10,816,891 - Chang , et al. October 27, 2	2020-10-27
Method For Cleaning Substrate, Method For Manufacturing Photomask And Method For Cleaning Photomask App 20200133118 - HSU; YU-HSIN ; et al.	2020-04-30
Method and system for processing substrate by chemical solution in semiconductor manufacturing fabrication Grant 10,508,953 - Yang , et al. Dec	2019-12-17
Mask blank and fabrication method thereof, and method of fabricating photomask Grant 10,459,332 - Chang , et al. Oc	2019-10-29
Method For Forming Photomask And Photolithography Method App 20190163051 - CHANG; Shih-Ming ; et al.	2019-05-30
Photo Mask Assembly And Optical Apparatus Including The Same App 20180299768 - Wei; Shao-Chi ; et al.	2018-10-18
Photo mask assembly and optical apparatus including the same Grant 10,101,651 - Wei , et al. October 16, 2	2018-10-16
Blank Mask And Fabrication Method Thereof, And Method Of Fabricating Photomask App 20180284601 - Chang; Hao-Ming ; et al.	2018-10-04
Method And System For Processing Substrate By Chemical Solution In Semiconductor Manufacturing Fabrication App 20180161828 - YANG; Min-An ; et al.	2018-06-14
Photomask And Fabrication Method Therefor App 20180164675 - CHANG; Hao-Ming ; et al.	2018-06-14
Method for repairing opaque defects on semiconductor mask reticles Grant 7,223,503 - Lin , et al. May 29, 2	2007-05-29
Reticle film stabilizing method App 20050260503 - Lin, Wei-Lian ; et al.	2005-11-24
Method for repairing opaque defects on semiconductor mask reticles App 20050146715 - Lin, Wei-Lian ; et al.	2005-07-07

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