| Patent | Date |
|---|
Measuring method and measuring system for interferometrically measuring the imaging quality
Grant 10,697,852 - Wegmann | 2020-06-30 |
Measuring method and measuring arrangement for an imaging optical system
Grant 10,502,545 - Wegmann , et al. Dec | 2019-12-10 |
Device and method for wavefront analysis
Grant 10,386,728 - Wegmann A | 2019-08-20 |
Measuring Method And Measuring System For Interferometrically Measuring The Imaging Quality
App 20190212226 - WEGMANN; Ulrich | 2019-07-11 |
Microlithographic projection exposure apparatus and measuring device for a projection lens
Grant 10,345,710 - Ehrmann , et al. July 9, 2 | 2019-07-09 |
Device And Method For Wavefront Analysis
App 20180299782 - Wegmann; Ulrich | 2018-10-18 |
Optical imaging device with image defect determination
Grant 9,996,014 - Freimann , et al. June 12, 2 | 2018-06-12 |
Measuring Method And Measuring Arrangement For An Imaging Optical System
App 20180087891 - WEGMANN; Ulrich ; et al. | 2018-03-29 |
Microlithographic Projection Exposure Apparatus And Measuring Device For A Projection Lens
App 20170082930 - Ehrmann; Albrecht ; et al. | 2017-03-23 |
Exposure apparatus and measuring device for a projection lens
Grant 9,436,095 - Ehrmann , et al. September 6, 2 | 2016-09-06 |
System for measuring the image quality of an optical imaging system
Grant 9,429,495 - Mengel , et al. August 30, 2 | 2016-08-30 |
Optical Imaging Device With Image Defect Determination
App 20160246182 - FREIMANN; Rolf ; et al. | 2016-08-25 |
Optical imaging device with image defect determination
Grant 9,235,131 - Freimann , et al. January 12, 2 | 2016-01-12 |
System For Measuring The Image Quality Of An Optical Imaging System
App 20140347654 - Mengel; Markus ; et al. | 2014-11-27 |
Device and method for the optical measurement of an optical system by using an immersion fluid
Grant 8,836,929 - Wegmann , et al. September 16, 2 | 2014-09-16 |
System for measuring the image quality of an optical imaging system
Grant 8,823,948 - Mengel , et al. September 2, 2 | 2014-09-02 |
Method for measuring an optical system
Grant 8,786,849 - Korb , et al. July 22, 2 | 2014-07-22 |
Optical scattering disk, use thereof, and wavefront measuring apparatus
Grant 8,654,346 - Wegmann February 18, 2 | 2014-02-18 |
Device And Method For The Optical Measurement Of An Optical System By Using An Immersion Fluid
App 20140022524 - Wegmann; Ulrich ; et al. | 2014-01-23 |
Optical Imaging Device With Image Defect Determination
App 20140016108 - FREIMANN; Rolf ; et al. | 2014-01-16 |
System For Measuring The Image Quality Of An Optical Imaging System
App 20130293869 - Mengel; Markus ; et al. | 2013-11-07 |
Method For Measuring An Optical System
App 20130271749 - KORB; Thomas ; et al. | 2013-10-17 |
Optical imaging device with image defect determination
Grant 8,537,333 - Freimann , et al. September 17, 2 | 2013-09-17 |
System for measuring the image quality of an optical imaging system
Grant 8,488,127 - Mengel , et al. July 16, 2 | 2013-07-16 |
Exposure Apparatus And Measuring Device For A Projection Lens
App 20130120723 - Ehrmann; Albrecht ; et al. | 2013-05-16 |
Exposure apparatus and measuring device for a projection lens
Grant 8,330,935 - Ehrmann , et al. December 11, 2 | 2012-12-11 |
Optical Scattering Disk, Use Thereof, And Wavefront Measuring Apparatus
App 20120242996 - WEGMANN; Ulrich | 2012-09-27 |
Optical scattering disk, use thereof, and wavefront measuring apparatus
Grant 8,199,333 - Wegmann June 12, 2 | 2012-06-12 |
Device And Method For The Optical Measurement Of An Optical System By Using An Immersion Fluid
App 20120113429 - Wegmann; Ulrich ; et al. | 2012-05-10 |
Optical apparatus and method for modifying the imaging behavior of such apparatus
Grant 8,169,595 - Schriever , et al. May 1, 2 | 2012-05-01 |
Methods and apparatus for measuring wavefronts and for determining scattered light, and related devices and manufacturing methods
Grant 8,134,716 - Emer , et al. March 13, 2 | 2012-03-13 |
Device and method for the optical measurement of an optical system by using an immersion fluid
Grant 8,120,763 - Wegmann , et al. February 21, 2 | 2012-02-21 |
Device and method for the optical measurement of an optical system, measurement structure support, and microlithographic projection exposure apparatus
Grant 8,004,690 - Wegmann August 23, 2 | 2011-08-23 |
Optical Imaging Device With Image Defect Determination
App 20110164232 - FREIMANN; Rolf ; et al. | 2011-07-07 |
Device and method for the interferometric measurement of phase masks
Grant 7,911,624 - Haidner , et al. March 22, 2 | 2011-03-22 |
System For Measuring The Image Quality Of An Optical Imaging System
App 20100315651 - Mengel; Markus ; et al. | 2010-12-16 |
System for measuring the image quality of an optical imaging system
Grant 7,796,274 - Mengel , et al. September 14, 2 | 2010-09-14 |
System for measuring the image quality of an optical imaging system
Grant 7,760,366 - Mengel , et al. July 20, 2 | 2010-07-20 |
Exposure Apparatus And Measuring Device For A Projection Lens
App 20100141912 - Ehrmann; Albrecht ; et al. | 2010-06-10 |
Method of manufacturing a miniaturized device
Grant 7,623,218 - Wegmann , et al. November 24, 2 | 2009-11-24 |
Device And Method For The Optical Measurement Of An Optical System By Using An Immersion Fluid
App 20090257049 - Wegmann; Ulrich ; et al. | 2009-10-15 |
Method of optimizing imaging performance
Grant 7,570,345 - Reisinger , et al. August 4, 2 | 2009-08-04 |
Optical Apparatus And Method For Modifying The Imaging Behavior Of Such Apparatus
App 20090174876 - Schriever; Martin ; et al. | 2009-07-09 |
Device and Method for the Optical Measurement of an Optical System, Measurement Structure Support, and Microlithographic Projection Exposure Apparatus
App 20090116036 - Wegmann; Ulrich | 2009-05-07 |
Optical Scattering Disk, Use Thereof, And Wavefront Measuring Apparatus
App 20090051927 - Wegmann; Ulrich | 2009-02-26 |
Device And Method For The Optical Measurement Of An Optical System By Using An Immersion Fluid
App 20090021726 - Wegmann; Ulrich ; et al. | 2009-01-22 |
Microlithographic Projection Exposure Apparatus And Measuring Device For A Projection Lens
App 20080309894 - Ehrmann; Albrecht ; et al. | 2008-12-18 |
Method for improving the imaging properties of a projection objective for a microlithographic projection exposure apparatus
Grant 7,456,933 - Wegmann , et al. November 25, 2 | 2008-11-25 |
System for Measuring the Image Quality of an Optical Imaging System
App 20080252876 - Mengel; Markus ; et al. | 2008-10-16 |
Apparatus For Polarization-specific Examination, Optical Imaging System, And Calibration Method
App 20080252888 - WEGMANN; Ulrich ; et al. | 2008-10-16 |
Optical measuring apparatus and operating method for imaging error correction in an optical imaging system
Grant 7,436,521 - Emer , et al. October 14, 2 | 2008-10-14 |
Device and Method for the Interferometric Measurement of Phase Masks
App 20080231862 - Haidner; Helmut ; et al. | 2008-09-25 |
Methods and Apparatus For Measuring Wavefronts and For Determining Scattered Light, and Related Devices and Manufacturing Methods
App 20080231840 - Emer; Wolfgang ; et al. | 2008-09-25 |
Device and method for wavefront measurement of an optical imaging system by means of phase-shifting interferometry
Grant 7,417,745 - Haidner , et al. August 26, 2 | 2008-08-26 |
Device and method for the optical measurement of an optical system by using an immersion fluid
Grant 7,408,652 - Wegmann , et al. August 5, 2 | 2008-08-05 |
System For Measuring The Image Quality Of An Optical Imaging System
App 20080180688 - Mengel; Markus ; et al. | 2008-07-31 |
Apparatus For Wavefront Detection
App 20080144043 - WEGMANN; Ulrich ; et al. | 2008-06-19 |
Device And Method For The Determination Of Imaging Errors And Microlithography Projection Exposure System
App 20080130012 - WEGMANN; Ulrich ; et al. | 2008-06-05 |
Method and apparatus for determining telecentricity and microlithography projection exposure apparatus
Grant 7,365,861 - Wegmann April 29, 2 | 2008-04-29 |
Method and apparatus for setting optical imaging properties by means of radiation treatment
Grant 7,352,452 - Wegmann , et al. April 1, 2 | 2008-04-01 |
Apparatus and method for measuring the wavefront of an optical system
Grant 7,336,371 - Haidner , et al. February 26, 2 | 2008-02-26 |
Apparatus for wavefront detection
Grant 7,333,216 - Wegmann , et al. February 19, 2 | 2008-02-19 |
Method For Structuring A Substrate Using Multiple Exposure
App 20080036982 - Wegmann; Ulrich ; et al. | 2008-02-14 |
Method And Apparatus For Determining The Influencing Of The State Of Polarization By An Optical System, And An Analyser
App 20080037905 - Wegmann; Ulrich ; et al. | 2008-02-14 |
Method of optimizing imaging performance
App 20080007706 - Reisinger; Gerd ; et al. | 2008-01-10 |
Method and system for measuring the imaging quality of an optical imaging system
Grant 7,307,707 - Wegmann December 11, 2 | 2007-12-11 |
Device and method for the determination of imaging errors and microlithography projection exposure system
Grant 7,301,646 - Wegmann , et al. November 27, 2 | 2007-11-27 |
Method and apparatus for determining the influencing of the state of polarization by an optical system; and an analyser
Grant 7,286,245 - Wegmann , et al. October 23, 2 | 2007-10-23 |
Method of producing an optical imaging system
Grant 7,283,204 - Wegmann October 16, 2 | 2007-10-16 |
Apparatus for polarization-specific examination, optical imaging system, and calibration method
Grant 7,277,182 - Wegmann , et al. October 2, 2 | 2007-10-02 |
Method of optimizing imaging performance
Grant 7,233,386 - Reisinger , et al. June 19, 2 | 2007-06-19 |
Method of determining optical properties and projection exposure system comprising a wavefront detection system
Grant 7,230,220 - Lauer , et al. June 12, 2 | 2007-06-12 |
Microlithographic Projection Exposure Apparatus And Measuring Device For A Projection Lens
App 20070070316 - Ehrmann; Albrecht ; et al. | 2007-03-29 |
Interferometric Measuring Device And Projection Exposure Installation Comprising Such Measuring Device
App 20070046912 - Schriever; Martin ; et al. | 2007-03-01 |
Interferometric measuring device and projection exposure installation comprising such measuring device
Grant 7,158,237 - Schriever , et al. January 2, 2 | 2007-01-02 |
Method and system for measuring the imaging quality of an optical imaging system
App 20060244950 - Wegmann; Ulrich | 2006-11-02 |
Method of determining optical properties and projection exposure system comprising a wavefront detection system
App 20060231731 - Lauer; Steffen ; et al. | 2006-10-19 |
Apparatus and method for measuring an optical imaging system, and detector unit
Grant 7,088,458 - Wegmann August 8, 2 | 2006-08-08 |
Method and system for measuring the imaging quality of an optical imaging system
Grant 7,075,633 - Wegmann July 11, 2 | 2006-07-11 |
Method of manufacturing a miniaturized device
App 20060139583 - Wegmann; Ulrich ; et al. | 2006-06-29 |
Optical measuring apparatus and operating method for an optical imaging system
App 20060119838 - Emer; Wolfgang ; et al. | 2006-06-08 |
Method and apparatus for setting optical imaging properties by means of radiation treatment
App 20060118703 - Wegmann; Ulrich ; et al. | 2006-06-08 |
Method for improving the imaging properties of a projection objective for a microlithographic projection exposure apparatus
App 20060077371 - Wegmann; Ulrich ; et al. | 2006-04-13 |
Moire method and measuring system for measuring the distortion of an optical imaging system
Grant 7,019,824 - Wegmann , et al. March 28, 2 | 2006-03-28 |
Method and apparatus for determining telecentricity and microlithography projection exposure apparatus
App 20060012799 - Wegmann; Ulrich | 2006-01-19 |
Measuring method and measuring system for measuring the imaging quality of an optical imaging system
App 20060001861 - Wegmann; Ulrich | 2006-01-05 |
Interferometric measuring device and projection exposure installation comprising such measuring device
App 20050264827 - Schriever, Martin ; et al. | 2005-12-01 |
Device and method for the optical measurement of an optical system, a container therefor, and a microlithography projection exposure machine
App 20050243328 - Wegmann, Ulrich ; et al. | 2005-11-03 |
Method of optimizing imaging performance
App 20050237506 - Reisinger, Gerd ; et al. | 2005-10-27 |
Device and method for the determination of imaging errors and microlithography projection exposure system
App 20050190376 - Wegmann, Ulrich ; et al. | 2005-09-01 |
Device for polarization-specific examination, an optical imaging system and a calibration method
App 20050146789 - Wegmann, Ulrich ; et al. | 2005-07-07 |
Moire method and measuring system for measuring the distortion of an optical imaging system
App 20050122506 - Wegmann, Ulrich ; et al. | 2005-06-09 |
Device and method for wavefront measurement of an optical imaging system by means of phase-shifting interferometry
App 20050007602 - Haidner, Helmut ; et al. | 2005-01-13 |
Illuminating system having a diffuser element
App 20050002102 - Wegmann, Ulrich ; et al. | 2005-01-06 |
Method of producing an optical imaging system
App 20040169836 - Wegmann, Ulrich | 2004-09-02 |
Method and apparatus for determining the influencing of the state of polarization by an optical system; and an analyser
App 20040114150 - Wegmann, Ulrich ; et al. | 2004-06-17 |
Method and system for measuring the imaging quality of an optical imaging system
App 20030137655 - Wegmann, Ulrich | 2003-07-24 |
Apparatus for wavefront detection
App 20020001088 - Wegmann, Ulrich ; et al. | 2002-01-03 |
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