| Patent | Date |
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Gas injector for reaction regions
Grant 10,971,340 - Wege April 6, 2 | 2021-04-06 |
Gas injector for reaction regions
App 20200185198 - Wege; Stephan | 2020-06-11 |
Method of forming a self-aligned stack gate structure for use in a non-volatile memory array
Grant 9,570,581 - Toren , et al. February 14, 2 | 2017-02-14 |
Method of Forming A Self-Aligned Stack Gate Structure For Use In A Non-volatile Memory Array
App 20160225878 - Toren; Willem-Jan ; et al. | 2016-08-04 |
Self-aligned stack gate structure for use in a non-volatile memory array and a method of forming such structure
Grant 9,330,922 - Toren , et al. May 3, 2 | 2016-05-03 |
Self-Aligned Stack Gate Structure For Use In A Non-volatile Memory Array And A Method Of Forming Such Structure
App 20130234223 - Toren; Willem-Jan ; et al. | 2013-09-12 |
Method of preparing a coating solution and a corresponding use of the coating solution for coating a substrate
Grant 7,879,395 - Klipp , et al. February 1, 2 | 2011-02-01 |
Methods For Forming High Aspect Ratio Features On A Substrate
App 20100330805 - DOAN; KENNY LINH ; et al. | 2010-12-30 |
Method of preventing etch profile bending and bowing in high aspect ratio openings by treating a polymer formed on the opening sidewalls
Grant 7,846,846 - Bera , et al. December 7, 2 | 2010-12-07 |
Method for forming a structure on a substrate and device
Grant 7,737,049 - Manger , et al. June 15, 2 | 2010-06-15 |
Method for Manufacturing Contact Openings, Method for Manufacturing an Integrated Circuit, an Integrated Circuit
App 20090321940 - Kunkel; Gerhard ; et al. | 2009-12-31 |
Methods of Manufacturing a Semiconductor Device
App 20090239314 - Haberjahn; Martin ; et al. | 2009-09-24 |
Methods of Double Patterning, Photo Sensitive Layer Stack for Double Patterning and System for Double Patterning
App 20090219496 - Kamm; Frank-Michael ; et al. | 2009-09-03 |
Method of Fabricating an Integrated Circuit
App 20090166318 - Seitz; Mihel ; et al. | 2009-07-02 |
Apparatus for processing a substrate
Grant 7,544,270 - Wege , et al. June 9, 2 | 2009-06-09 |
Method for Processing a Spacer Structure, Method of Manufacturing an Integrated Circuit, Semiconductor Device and Intermediate Structure with at Least One Spacer Structure
App 20090127722 - Noelscher; Christoph ; et al. | 2009-05-21 |
Method of Fabricating an Integrated Circuit
App 20090115027 - Wege; Stephan | 2009-05-07 |
Method for Manufacturing a Structure, Semiconductor Device and Structure on a Substrate
App 20090102023 - Wege; Stephan ; et al. | 2009-04-23 |
Method Of Preventing Etch Profile Bending And Bowing In High Aspect Ratio Openings By Treating A Polymer Formed On The Opening Sidewalls
App 20090081876 - BERA; Kallol ; et al. | 2009-03-26 |
Method for Forming a Structure on a Substrate and Device
App 20090033362 - Manger; Dirk ; et al. | 2009-02-05 |
Photolithographic patterning process using a carbon hard mask layer of diamond-like hardness produced by a plasma-enhanced deposition process
Grant 7,368,390 - Czech , et al. May 6, 2 | 2008-05-06 |
Method of preparing a coating solution and a corresponding use of the coating solution for coating a substrate
App 20080090101 - Klipp; Andreas ; et al. | 2008-04-17 |
Method and device for depositing a protective layer during an etching procedure
App 20070232070 - Wege; Stephan ; et al. | 2007-10-04 |
Fabrication method for a semiconductor structure
Grant 7,265,023 - Haupt , et al. September 4, 2 | 2007-09-04 |
Method for the treatment of material, in particular in the fabrication of semiconductor components
App 20070123045 - Wege; Stephan ; et al. | 2007-05-31 |
Apparatus for processing a substrate
App 20070111339 - Wege; Stephan ; et al. | 2007-05-17 |
Method for production of a semiconductor structure
Grant 7,141,507 - Genz , et al. November 28, 2 | 2006-11-28 |
Method for fabricating a semiconductor structure
Grant 7,105,404 - Seitz , et al. September 12, 2 | 2006-09-12 |
Process for producing an etching mask on a microstructure, in particular a semiconductor structure with trench capacitors, and corresponding use of the etching mask
Grant 7,037,777 - Moll , et al. May 2, 2 | 2006-05-02 |
Fabrication method for a semiconductor structure
App 20050245042 - Haupt, Moritz ; et al. | 2005-11-03 |
Method and device for monitoring the etching operation for a regular depth structure in a semiconductor substrate
App 20050239223 - Mantz, Ulrich ; et al. | 2005-10-27 |
Method for fabricating a semiconductor structure
App 20050202626 - Seitz, Mihel ; et al. | 2005-09-15 |
Method for production of a semiconductor structure
App 20050196952 - Genz, Oliver ; et al. | 2005-09-08 |
Production method for a semiconductor component
Grant 6,919,269 - Schneegans , et al. July 19, 2 | 2005-07-19 |
Photolithographic method for forming a structure in a semiconductor substrate
App 20050148193 - Kirchhoff, Markus ; et al. | 2005-07-07 |
Photolithographic patterning process using a carbon hard mask layer of diamond-like hardness produced by a plasma-enhanced deposition process
App 20050112506 - Czech, Gunter ; et al. | 2005-05-26 |
Method for etching high-aspect-ratio features
Grant 6,897,155 - Kumar , et al. May 24, 2 | 2005-05-24 |
CMP process
Grant 6,821,894 - Lahnor , et al. November 23, 2 | 2004-11-23 |
Process for producing an etching mask on a microstructure, in particular a semiconductor structure with trench capacitors, and corresponding use of the etching mask
App 20040203238 - Moll, Hans-Peter ; et al. | 2004-10-14 |
Method for fabricating a semiconductor structure
App 20040192060 - Stegemann, Maik ; et al. | 2004-09-30 |
Production method for a semiconductor component
App 20040147102 - Schneegans, Manfred ; et al. | 2004-07-29 |
Method for etching high-aspect-ratio features
App 20040033697 - Kumar, Ajay ; et al. | 2004-02-19 |
CVD method of producing in situ-doped polysilicon layers and polysilicon layered structures
Grant 6,693,022 - Dreybrodt , et al. February 17, 2 | 2004-02-17 |
Method and device for producing a metal/metal contact in a multilayer metallization of an integrated circuit
Grant 6,596,625 - Schneegans , et al. July 22, 2 | 2003-07-22 |
Method for manufacturing a conductor structure for an integrated circuit
Grant 6,541,372 - Wege , et al. April 1, 2 | 2003-04-01 |
Method of producing doped polysilicon layers and polysilicon layered structures
App 20030017684 - Dreybrodt, Joerg ; et al. | 2003-01-23 |
Method of structuring layers with a polysilicon layer and an overlying metal or metal silicide layer using a three step etching process with fluorine, chlorine, bromine containing gases
Grant 6,479,373 - Dreybrodt , et al. November 12, 2 | 2002-11-12 |
Method for fabricating a trench isolation for electrically active components
App 20020086478 - Uhlig, Ines ; et al. | 2002-07-04 |
CMP process
App 20020036181 - Lahnor, Peter ; et al. | 2002-03-28 |
Method and device for producing a metal/metal contact in a multilayer metallization of an integrated circuit
App 20020022342 - Schneegans, Manfred ; et al. | 2002-02-21 |
Method of producing doped polysilicon layers and polysilicon layered structrues and method of structuring layers and layered structures which comprise polysilicon layers
App 20020016044 - Dreybrodt, Joerg ; et al. | 2002-02-07 |
Method of processing organic antireflection layers
App 20020011462 - Richter, Harald ; et al. | 2002-01-31 |
Method of structuring a metal-containing layer
App 20020011461 - Wege, Stephan ; et al. | 2002-01-31 |
Method for manufacturing a conductor structure for an integrated circuit
App 20020009876 - Wege, Stephan ; et al. | 2002-01-24 |
Method of producing a semiconductor device
App 20010006830 - Neu, Achim ; et al. | 2001-07-05 |
Dielectric filling of electrical wiring planes
App 20010004539 - Kirchhoff, Markus ; et al. | 2001-06-21 |
Metallization etching techniques for reducing post-etch corrosion of metal lines
Grant 6,177,353 - Gutsche , et al. January 23, 2 | 2001-01-23 |
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