Patent | Date |
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Sanitary installation Grant 11,268,269 - Stammel , et al. March 8, 2 | 2022-03-08 |
Projection lighting system for semiconductor lithography with an improved heat transfer Grant 10,969,699 - Weber , et al. April 6, 2 | 2021-04-06 |
Sanitary Installation App 20200378100 - STAMMEL; Thomas ;   et al. | 2020-12-03 |
Beam reverser module and optical power amplifier having such a beam reverser module Grant 10,777,958 - Schall , et al. Sept | 2020-09-15 |
Projection Lighting System For Semiconductor Lithography With An Improved Heat Transfer App 20190384187 - Weber; Ulrich ;   et al. | 2019-12-19 |
Optical element module with minimized parasitic loads Grant 10,215,948 - Kugler , et al. Feb | 2019-02-26 |
Optical assembly, projection system, metrology system and EUV lithography apparatus Grant 10,146,048 - Brehm , et al. De | 2018-12-04 |
Positioning unit and apparatus for adjustment of an optical element Grant 10,133,021 - Weber , et al. November 20, 2 | 2018-11-20 |
Beam Reverser Module and Optical Power Amplifier Having Such a Beam Reverser Module App 20180102620 - Schall; Michael ;   et al. | 2018-04-12 |
Support Elements For An Optical Element App 20180024438 - Kugler; Jens ;   et al. | 2018-01-25 |
Beam reverser module and optical power amplifier having such a beam reverser module Grant 9,843,153 - Schall , et al. December 12, 2 | 2017-12-12 |
Positioning Unit And Apparatus For Adjustment Of An Optical Element App 20170351047 - Weber; Ulrich ;   et al. | 2017-12-07 |
Actuators and microlithography projection exposure systems and methods using the same Grant 9,766,550 - Weber , et al. September 19, 2 | 2017-09-19 |
Support elements for an optical element Grant 9,709,895 - Kugler , et al. July 18, 2 | 2017-07-18 |
Positioning unit and apparatus for adjustment of an optical element Grant 9,664,873 - Weber , et al. May 30, 2 | 2017-05-30 |
Optical Assembly, Projection System, Metrology System And Euv Lithography Apparatus App 20170102539 - BREHM; Michael ;   et al. | 2017-04-13 |
Sanitary facility comprising a washstand and a support cabinet Grant 9,516,976 - Stammel , et al. December 13, 2 | 2016-12-13 |
Positioning Unit And Apparatus For Adjustment Of An Optical Element App 20160041360 - Weber; Ulrich ;   et al. | 2016-02-11 |
Actuators And Microlithography Projection Exposure Systems And Methods Using The Same App 20150370176 - Weber; Ulrich ;   et al. | 2015-12-24 |
Beam Reverser Module and Optical Power Amplifier Having Such a Beam Reverser Module App 20150340829 - Schall; Michael ;   et al. | 2015-11-26 |
Support Elements For An Optical Element App 20150316853 - Kugler; Jens ;   et al. | 2015-11-05 |
Sanitary Facility Comprising A Washstand And A Support Cabinet App 20150201812 - STAMMEL; Thomas ;   et al. | 2015-07-23 |
Positioning unit and apparatus for adjustment of an optical element Grant 9,075,174 - Weber , et al. July 7, 2 | 2015-07-07 |
Support elements for an optical element Grant 8,988,654 - Kugler , et al. March 24, 2 | 2015-03-24 |
Positioning Unit And Apparatus For Adjustment Of An Optical Element App 20140368933 - Weber; Ulrich ;   et al. | 2014-12-18 |
Positioning unit and apparatus for adjustment of an optical element Grant 8,760,777 - Weber , et al. June 24, 2 | 2014-06-24 |
Optical system with an exchangeable, manipulable correction arrangement for reducing image aberrations Grant 8,659,745 - Limbach , et al. February 25, 2 | 2014-02-25 |
Positioning Unit And Apparatus For Adjustment Of An Optical Element App 20130286490 - Weber; Ulrich ;   et al. | 2013-10-31 |
Optical System With An Exchangeable, Manipulable Correction Arrangement For Reducing Image Aberrations App 20130278911 - Limbach; Guido ;   et al. | 2013-10-24 |
Optical system with an exchangeable, manipulable correction arrangement for reducing image aberrations Grant 8,542,346 - Limbach , et al. September 24, 2 | 2013-09-24 |
Imaging device in a projection exposure facility Grant 8,514,371 - Hummel , et al. August 20, 2 | 2013-08-20 |
Holding arrangement for an optical element Grant 8,508,868 - Weber , et al. August 13, 2 | 2013-08-13 |
Positioning unit and alignment device for an optical element Grant 8,493,674 - Kugler , et al. July 23, 2 | 2013-07-23 |
Holding arrangement for an optical element Grant 8,456,771 - Weber , et al. June 4, 2 | 2013-06-04 |
Positioning Unit And Alignment Device For An Optical Element App 20130135760 - Weber; Ulrich ;   et al. | 2013-05-30 |
Optical Element Module With Minimized Parasitic Loads App 20130100547 - Kugler; Jens ;   et al. | 2013-04-25 |
Positioning unit and alignment device for an optical element Grant 8,416,515 - Weber , et al. April 9, 2 | 2013-04-09 |
Optical element module with minimized parasitic loads Grant 8,351,139 - Kugler , et al. January 8, 2 | 2013-01-08 |
Holding Arrangement For An Optical Element App 20120154935 - Weber; Ulrich ;   et al. | 2012-06-21 |
Actuators And Microlithography Projection Exposure Systems And Methods Using The Same App 20120147344 - Weber; Ulrich ;   et al. | 2012-06-14 |
Holding Arrangement For An Optical Element App 20120140341 - Weber; Ulrich ;   et al. | 2012-06-07 |
Support Elements For An Optical Element App 20120067833 - Kugler; Jens ;   et al. | 2012-03-22 |
Positioning Unit And Alignment Device For An Optical Element App 20120019798 - Weber; Ulrich ;   et al. | 2012-01-26 |
Positioning unit and alignment device for an optical element Grant 8,035,903 - Weber , et al. October 11, 2 | 2011-10-11 |
Replacement device for an optical element Grant 8,027,024 - Gellrich , et al. September 27, 2 | 2011-09-27 |
Guidance System For A Medical Facility App 20110214588 - Grubling; Peter ;   et al. | 2011-09-08 |
Imaging Device In A Projection Exposure Facility App 20110199597 - Hummel; Wolfgang ;   et al. | 2011-08-18 |
Optical element module Grant 7,986,472 - Kugler , et al. July 26, 2 | 2011-07-26 |
Imaging device in a projection exposure facility Grant 7,961,294 - Hummel , et al. June 14, 2 | 2011-06-14 |
Actuators And Microlithography Projection Exposure Systems And Methods Using The Same App 20110128521 - Weber; Ulrich ;   et al. | 2011-06-02 |
Positioning Unit And Alignment Device For An Optical Element App 20100245847 - Weber; Ulrich ;   et al. | 2010-09-30 |
Optical Element Module With Minimized Parasitic Loads App 20100214675 - Kugler; Jens ;   et al. | 2010-08-26 |
Reflecting optical element with eccentric optical passageway Grant 7,760,327 - Scherle , et al. July 20, 2 | 2010-07-20 |
Positioning unit and alignment device for an optical element Grant 7,738,193 - Weber , et al. June 15, 2 | 2010-06-15 |
Imaging device in a projection exposure machine Grant 7,710,542 - Hummel , et al. May 4, 2 | 2010-05-04 |
Optical System With An Exchangeable, Manipulable Correction Arrangement For Reducing Image Aberrations App 20090244509 - Limbach; Guido ;   et al. | 2009-10-01 |
Device for preventing the displacement of an optical element Grant 7,564,636 - Zengerling , et al. July 21, 2 | 2009-07-21 |
Imaging Device in a Projection Exposure Machine App 20090141258 - Back; Stephan ;   et al. | 2009-06-04 |
Support device for positioning an optical element Grant 7,515,359 - Kugler , et al. April 7, 2 | 2009-04-07 |
Imaging Device In A Projection Exposure Facility App 20090040487 - Hummel; Wolfgang ;   et al. | 2009-02-12 |
Imaging device in a projection exposure machine Grant 7,486,382 - Back , et al. February 3, 2 | 2009-02-03 |
Energy filter device Grant 7,482,605 - Kraft , et al. January 27, 2 | 2009-01-27 |
Replacement Device For An Optical Element App 20080174758 - Gellrich; Bernhard ;   et al. | 2008-07-24 |
Imaging Device In A Projection Exposure Machine App 20080174757 - Hummel; Wolfgang ;   et al. | 2008-07-24 |
Stateful firewall clustering for processing-intensive network applications App 20080098113 - Hansen; Gert ;   et al. | 2008-04-24 |
Device for the low-deformation mounting of a rotationally asymmetric optical element Grant 7,362,520 - Weber April 22, 2 | 2008-04-22 |
Imaging device in a projection exposure facility Grant 7,304,717 - Hummel , et al. December 4, 2 | 2007-12-04 |
Holding and positioning apparatus for an optical element App 20070223116 - Weber; Ulrich ;   et al. | 2007-09-27 |
Support Device for Positioning an Optical Element App 20070216888 - Kugler; Jens ;   et al. | 2007-09-20 |
Positioning unit and alignment device for an optical element App 20070206297 - WEBER; Ulrich ;   et al. | 2007-09-06 |
Device for preventing the displacement of an optical element App 20070183063 - Zengerling; Christian ;   et al. | 2007-08-09 |
Apparatus for positioning an optical element in a structure Grant 7,251,086 - Weber , et al. July 31, 2 | 2007-07-31 |
Holding and positioning apparatus for an optical element Grant 7,242,537 - Weber , et al. July 10, 2 | 2007-07-10 |
Objective with at least one optical element Grant 7,239,462 - Rau , et al. July 3, 2 | 2007-07-03 |
Optical element module App 20070146906 - Kugler; Jens ;   et al. | 2007-06-28 |
Reflecting optical element with eccentric optical passageway App 20060262704 - Scherle; Hans-Jurgen ;   et al. | 2006-11-23 |
Imaging device in a projection exposure machine App 20060164619 - Back; Stephan ;   et al. | 2006-07-27 |
Device for holding a beam splitter element Grant 7,079,331 - Weber , et al. July 18, 2 | 2006-07-18 |
Apparatus for positioning an optical element in a structure App 20060072217 - Weber; Ulrich ;   et al. | 2006-04-06 |
Apparatus for tilting a carrier for optical elements Grant 7,014,328 - Weber , et al. March 21, 2 | 2006-03-21 |
Objective, in particular a projection objective in microlithography App 20060012893 - Weber; Ulrich ;   et al. | 2006-01-19 |
Holding and positioning apparatus for an optical element App 20060007563 - Weber; Ulrich ;   et al. | 2006-01-12 |
Objective, especially a projection objective for microlithography App 20050286121 - Weber, Ulrich ;   et al. | 2005-12-29 |
Apparatus for positioning an optical element in a structure Grant 6,967,792 - Weber , et al. November 22, 2 | 2005-11-22 |
Device for holding a beam splitter element App 20050248858 - Weber, Ulrich ;   et al. | 2005-11-10 |
Objective with at least one optical element App 20050190462 - Rau, Johannes ;   et al. | 2005-09-01 |
Device for manipulating the angular position of an object relative to a fixed structure App 20050110447 - Weber, Ulrich ;   et al. | 2005-05-26 |
Ion beam scanner system and operating method Grant 6,891,177 - Kraft , et al. May 10, 2 | 2005-05-10 |
Device for the low-deformation mounting of a rotationally asymmetric optical element App 20050052760 - Weber, Ulrich | 2005-03-10 |
Energy filter device App 20050029471 - Kraft, Gerhard ;   et al. | 2005-02-10 |
Catadioptric objective Grant 6,842,294 - Holderer , et al. January 11, 2 | 2005-01-11 |
Imaging device in a projection exposure facility App 20040263812 - Hummel, Wolfgang ;   et al. | 2004-12-30 |
Bearing arrangement comprising an optical element and a mount App 20040257681 - Weber, Ulrich ;   et al. | 2004-12-23 |
Mount for an optical element in an optical imaging device Grant 6,744,574 - Weber , et al. June 1, 2 | 2004-06-01 |
Objective, in particular a projection lens for microlithography Grant 6,724,548 - Weber April 20, 2 | 2004-04-20 |
Device for irradiating a tumor tissue Grant 6,710,362 - Kraft , et al. March 23, 2 | 2004-03-23 |
Ion beam therapy system and a method for operating the system Grant 6,683,318 - Haberer , et al. January 27, 2 | 2004-01-27 |
Apparatus for positioning an optical element in a structure App 20030231412 - Weber, Ulrich ;   et al. | 2003-12-18 |
Objective, in particular a projection lens for microlithography App 20030169517 - Weber, Ulrich | 2003-09-11 |
Device for irradiating a tumor tissue App 20030136924 - Kraft, Gerhard ;   et al. | 2003-07-24 |
Mount for an optical element in an optical imaging device App 20030058551 - Weber, Ulrich ;   et al. | 2003-03-27 |
Catadioptric objective App 20020181125 - Holderer, Hubert ;   et al. | 2002-12-05 |
Apparatus for tilting a carrier for optical elements App 20020171952 - Weber, Ulrich ;   et al. | 2002-11-21 |
Process for the production of rigid foams containing urethane and isocyanurate groups Grant 5,367,000 - Wiedermann , et al. November 22, 1 | 1994-11-22 |
Electron-beam Micro-analyzer With An Auger Electron Detector Grant 3,760,180 - Weber September 18, 1 | 1973-09-18 |
Apparatus For Improving The Signal Information In The Electron Beam Examination Of Sample Topography Grant 3,736,422 - Weber , et al. May 29, 1 | 1973-05-29 |
Apparatus For Improving The Signal Information In The Examination Of Samples By Scanning Electron Microscopy Or Electron Probe Microanalysis Grant 3,714,424 - Weber January 30, 1 | 1973-01-30 |
Method And Apparatus For Producing A Stereo Image By Electron Microscopy Grant 3,629,577 - Weber , et al. December 21, 1 | 1971-12-21 |