Weaver; William T.
Patent Applications and Registrations
Patent applications and USPTO patent grants for Weaver; William T..The latest application filed is for "multi-wafer volume single transfer chamber facet".
Company Profile
16.47.48
- Weaver; William T. - Austin TX
- Weaver; William T - Austin TX
Patent Activity
| Patent | Date |
|---|---|
| Batch heating and cooling chamber or loadlock Grant 11,315,806 - Schaller , et al. April 26, 2 | 2022-04-26 |
| Buffer chamber wafer heating mechanism and supporting robots Grant 11,264,258 - Weaver , et al. March 1, 2 | 2022-03-01 |
| Multi-Wafer Volume Single Transfer Chamber Facet App 20210090917 - Weaver; William T. ; et al. | 2021-03-25 |
| Buffer Chamber Wafer Heating Mechanism And Supporting Robots App 20200279763 - Weaver; William T. ; et al. | 2020-09-03 |
| Buffer chamber wafer heating mechanism and supporting robots Grant 10,699,930 - Weaver , et al. | 2020-06-30 |
| Susceptor position and rational apparatus and methods of use Grant 10,597,779 - Weaver , et al. | 2020-03-24 |
| Wafer processing systems including multi-position batch load lock apparatus with temperature control capability Grant 10,586,720 - Weaver , et al. | 2020-03-10 |
| Substrate Deposition Systems, Robot Transfer Apparatus, And Methods For Electronic Device Manufacturing App 20190375105 - Weaver; William T. ; et al. | 2019-12-12 |
| Transfer chamber and method of using a transfer chamber Grant 10,446,710 - Webb , et al. Oc | 2019-10-15 |
| Substrate handling and heating system Grant 10,443,934 - Evans , et al. Oc | 2019-10-15 |
| Substrate deposition systems, robot transfer apparatus, and methods for electronic device manufacturing Grant 10,427,303 - Weaver , et al. October 1, 2 | 2019-10-01 |
| Batch Heating and Cooling Chamber or Loadlock App 20190259638 - Schaller; Jason M. ; et al. | 2019-08-22 |
| Wafer Processing Systems Including Multi-position Batch Load Lock Apparatus With Temperature Control Capability App 20190198368 - Weaver; William T. ; et al. | 2019-06-27 |
| Batch LED heating and cooling chamber or loadlock Grant 10,283,379 - Schaller , et al. | 2019-05-07 |
| Wafer processing systems including multi-position batch load lock apparatus with temperature control capability Grant 10,256,125 - Weaver , et al. | 2019-04-09 |
| Apparatus and methods for wafer rotation to improve spatial ALD process uniformity Grant 10,186,449 - Weaver , et al. Ja | 2019-01-22 |
| Buffer Chamber Wafer Heating Mechanism And Supporting Robots App 20190019708 - Weaver; William T. ; et al. | 2019-01-17 |
| Buffer chamber wafer heating mechanism and supporting robot Grant 10,103,046 - Weaver , et al. October 16, 2 | 2018-10-16 |
| Apparatus And Methods For Wafer Rotation To Improve Spatial ALD Process Uniformity App 20180190535 - Weaver; William T. ; et al. | 2018-07-05 |
| Device and method for substrate heating during transport Grant 9,899,242 - Schaller , et al. February 20, 2 | 2018-02-20 |
| Electrostatic chuck with LED heating Grant 9,728,430 - Schaller , et al. August 8, 2 | 2017-08-08 |
| Complementary traveling masks Grant 9,722,129 - Bateman , et al. August 1, 2 | 2017-08-01 |
| Workpiece handling system and methods of workpiece handling Grant 9,694,989 - Schaller , et al. July 4, 2 | 2017-07-04 |
| Shielding device for substrate edge protection and method of using same Grant 9,659,677 - Webb , et al. May 23, 2 | 2017-05-23 |
| Mask alignment system for semiconductor processing Grant 9,570,309 - Webb , et al. February 14, 2 | 2017-02-14 |
| Electrostatic Chuck With LED Heating App 20160379853 - Schaller; Jason M. ; et al. | 2016-12-29 |
| Vacuum Compatible LED Substrate Heater App 20160379854 - Vopat; Robert Brent ; et al. | 2016-12-29 |
| Susceptor Position and Rotation Apparatus and Methods of Use App 20160355927 - Weaver; William T. ; et al. | 2016-12-08 |
| Substrate Handling And Heating System App 20160329458 - Evans; Morgan D. ; et al. | 2016-11-10 |
| Linkage conduit for vacuum chamber applications Grant 9,484,183 - Hermanson , et al. November 1, 2 | 2016-11-01 |
| Buffer Chamber Wafer Heating Mechanism And Supporting Robot App 20160307782 - Weaver; William T. ; et al. | 2016-10-20 |
| Device And Method For Substrate Heating During Transport App 20160293458 - Schaller; Jason M. ; et al. | 2016-10-06 |
| Wafer Processing Systems Including Multi-position Batch Load Lock Apparatus With Temperature Control Capability App 20160284578 - Weaver; William T. ; et al. | 2016-09-29 |
| High-throughput ion implanter Grant 9,437,392 - Weaver , et al. September 6, 2 | 2016-09-06 |
| Batch Heating and Cooling Chamber or Loadlock App 20160218028 - Schaller; Jason M. ; et al. | 2016-07-28 |
| Multi-position batch load lock apparatus and systems and methods including same Grant 9,378,994 - Weaver , et al. June 28, 2 | 2016-06-28 |
| Dynamic heating method and system for wafer processing Grant 9,287,148 - Evans , et al. March 15, 2 | 2016-03-15 |
| Linkage Conduit For Vacuum Chamber Applications App 20160071686 - Hermanson; Eric D. ; et al. | 2016-03-10 |
| Workpiece alignment device Grant 9,240,338 - Daniel , et al. January 19, 2 | 2016-01-19 |
| Shielding Device For Substrate Edge Protection And Method Of Using Same App 20150380116 - Webb; Aaron P. ; et al. | 2015-12-31 |
| Optimization of conveyor belts used for workpiece processing Grant 9,145,271 - Vopat , et al. September 29, 2 | 2015-09-29 |
| Complementary Traveling Masks App 20150228842 - Bateman; Nicholas PT ; et al. | 2015-08-13 |
| System and method for 2D workpiece alignment Grant 9,082,799 - Weaver , et al. July 14, 2 | 2015-07-14 |
| High throughput, low volume clamshell load lock Grant 9,016,998 - Blahnik , et al. April 28, 2 | 2015-04-28 |
| Techniques for processing a substrate Grant 9,000,446 - Riordon , et al. April 7, 2 | 2015-04-07 |
| Aligning successive implants with a soft mask Grant 8,921,149 - Bateman , et al. December 30, 2 | 2014-12-30 |
| Workpiece Alignment Device App 20140366358 - Daniel; Malcolm N. ; et al. | 2014-12-18 |
| Implant alignment through a mask Grant 8,912,082 - Bateman , et al. December 16, 2 | 2014-12-16 |
| Temperature Control Systems And Methods For Small Batch Substrate Handling Systems App 20140271057 - Weaver; William T. ; et al. | 2014-09-18 |
| High Throughput, Low Volume Clamshell Load Lock App 20140271048 - Blahnik; Jeffrey C. ; et al. | 2014-09-18 |
| Substrate Deposition Systems, Robot Transfer Apparatus, And Methods For Electronic Device Manufacturing App 20140271055 - Weaver; William T. ; et al. | 2014-09-18 |
| Multi-position Batch Load Lock Apparatus And Systems And Methods Including Same App 20140271054 - Weaver; William T. ; et al. | 2014-09-18 |
| Electric Switchable Magnet Slitvalve App 20140241848 - Vopat; Robert Brent ; et al. | 2014-08-28 |
| Workpiece alignment device Grant 8,813,338 - Daniel , et al. August 26, 2 | 2014-08-26 |
| System And Method For Handling Multiple Workpieces For Matrix Configuration Processing App 20140225007 - Weaver; William T. ; et al. | 2014-08-14 |
| Mask Alignment System For Semiconductor Processing App 20140170783 - Webb; Aaron P. ; et al. | 2014-06-19 |
| Transfer Chamber And Method Of Using A Transfer Chamber App 20140165908 - Webb; Aaron P. ; et al. | 2014-06-19 |
| Temperature Monitor For Devices In An Ion Implant Apparatus App 20140169402 - Webb; Aaron P. ; et al. | 2014-06-19 |
| System and method for handling multiple workpieces for matrix configuration processing Grant 8,698,104 - Weaver , et al. April 15, 2 | 2014-04-15 |
| Technique for processing a substrate Grant 8,685,846 - Low , et al. April 1, 2 | 2014-04-01 |
| Optimization Of Conveyor Belts Used For Workpiece Processing App 20140076688 - Vopat; Robert Brent ; et al. | 2014-03-20 |
| System and Method for 2D Workpiece Alignment App 20140077431 - Weaver; William T. ; et al. | 2014-03-20 |
| Handling beam glitches during ion implantation of workpieces Grant 8,598,547 - Low , et al. December 3, 2 | 2013-12-03 |
| Ion source having a shutter assembly Grant 8,497,486 - Blahnik , et al. July 30, 2 | 2013-07-30 |
| Mask health monitor using a faraday probe Grant 8,455,847 - Riordon , et al. June 4, 2 | 2013-06-04 |
| High-throughput Ion Implanter App 20130108799 - Weaver; William T. ; et al. | 2013-05-02 |
| High-throughput Workpiece Handling App 20130108406 - Schaller; Jason ; et al. | 2013-05-02 |
| Workpiece Handling System And Methods Of Workpiece Handling App 20130108401 - Schaller; Jason M. ; et al. | 2013-05-02 |
| Implant mask with moveable hinged mask segments Grant 8,330,128 - Vopat , et al. December 11, 2 | 2012-12-11 |
| Workpiece Alignment Device App 20120227233 - Daniel, JR.; Malcolm N. ; et al. | 2012-09-13 |
| Mask Health Monitor Using A Faraday Probe App 20120181443 - RIORDON; Benjamin B. ; et al. | 2012-07-19 |
| Mask health monitor using a faraday probe Grant 8,164,068 - Riordon , et al. April 24, 2 | 2012-04-24 |
| Platen Cleaning App 20120017938 - Weaver; William T. ; et al. | 2012-01-26 |
| Masking apparatus for an ion implanter Grant 8,101,927 - Carlson , et al. January 24, 2 | 2012-01-24 |
| Handling Beam Glitches During Ion Implantation Of Workpieces App 20110315899 - LOW; Russell J. ; et al. | 2011-12-29 |
| Implant Alignment Through A Mask App 20110237022 - BATEMAN; Nicholas P.T. ; et al. | 2011-09-29 |
| Aligning Successive Implants With A Soft Mask App 20110217810 - BATEMAN; Nicholas P.T. ; et al. | 2011-09-08 |
| System And Method For Handling Multiple Workpieces For Matrix Configuration Processing App 20110108742 - Weaver; William T. ; et al. | 2011-05-12 |
| Mask Health Monitor Using A Faraday Probe App 20110031408 - Riordon; Benjamin B. ; et al. | 2011-02-10 |
| Workpiece Handling System App 20110027463 - Riordon; Benjamin B. ; et al. | 2011-02-03 |
| Implant Mask With Moveable Mask Segments App 20100314559 - Vopat; Robert B. ; et al. | 2010-12-16 |
| Masking Apparatus For An Ion Implanter App 20100308236 - Carlson; Charles T. ; et al. | 2010-12-09 |
| Techniques For Processing A Substrate App 20100297782 - Riordon; Benjamin B. ; et al. | 2010-11-25 |
| Cartesian cluster tool configuration for lithography type processes Grant 7,819,079 - Englhardt , et al. October 26, 2 | 2010-10-26 |
| Cartesian Cluster Tool Configuration For Lithography Type Processes App 20070144439 - Englhardt; Eric A. ; et al. | 2007-06-28 |
| Robot App 20030145674 - Weaver, William T. | 2003-08-07 |
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