loadpatents
Patent applications and USPTO patent grants for Watts; Michael P. C..The latest application filed is for "low-k dielectric functional imprinting materials".
Patent | Date |
---|---|
Low-K dielectric functional imprinting materials Grant 8,889,332 - Xu , et al. November 18, 2 | 2014-11-18 |
Method to arrange features on a substrate to replicate features having minimal dimensional variability Grant 8,349,241 - Sreenivasan , et al. January 8, 2 | 2013-01-08 |
Step and repeat imprint lithography process Grant 8,318,066 - Sreenivasan , et al. November 27, 2 | 2012-11-27 |
Materials for imprint lithography Grant 8,076,386 - Xu , et al. December 13, 2 | 2011-12-13 |
Forming a layer on a substrate Grant 8,066,930 - Sreenivasan , et al. November 29, 2 | 2011-11-29 |
Low-k Dielectric Functional Imprinting Materials App 20110256355 - Xu; Frank Y. ;   et al. | 2011-10-20 |
Step and Repeat Imprint Lithography Process App 20110221095 - Sreenivasan; Sidlgata V. ;   et al. | 2011-09-15 |
Method for controlling distribution of fluid components on a body Grant 7,981,481 - Xu , et al. July 19, 2 | 2011-07-19 |
Composition for an Etching Mask Comprising a Silicon-Containing Material App 20110140306 - Xu; Frank Y. ;   et al. | 2011-06-16 |
Step and repeat imprint lithography processes Grant 7,943,081 - Sreenivasan , et al. May 17, 2 | 2011-05-17 |
Method to provide a layer with uniform etch characteristics Grant 7,939,131 - Xu , et al. May 10, 2 | 2011-05-10 |
Bifurcated contact printing technique Grant 7,906,058 - GanapathiSubramanian , et al. March 15, 2 | 2011-03-15 |
Composition for an etching mask comprising a silicon-containing material Grant 7,906,180 - Xu , et al. March 15, 2 | 2011-03-15 |
Polymerization technique to attenuate oxygen inhibition of solidification of liquids and composition therefor Grant 7,845,931 - Xu , et al. December 7, 2 | 2010-12-07 |
Step and Repeat Imprint Lithography Processes App 20100201042 - Sreenivasan; Sidlgata V. ;   et al. | 2010-08-12 |
Forming a Layer on a Substrate App 20100181289 - Sreenivasan; Sidlgata V. ;   et al. | 2010-07-22 |
Step and repeat imprint lithography processes Grant 7,727,453 - Sreenivasan , et al. June 1, 2 | 2010-06-01 |
Imprint Fluid Control App 20080303187 - Stacey; Nicholas A. ;   et al. | 2008-12-11 |
Capillary imprinting technique Grant 7,442,336 - Choi , et al. October 28, 2 | 2008-10-28 |
Composition for an etching mask comprising a silicon-containing material App 20080097065 - Xu; Frank Y. ;   et al. | 2008-04-24 |
Polymerization Technique to Attenuate Oxygen Inhibition of Solidification of Liquids and Composition Therefor App 20080085465 - Xu; Frank Y. ;   et al. | 2008-04-10 |
Formation of discontinuous films during an imprint lithography process Grant 7,338,275 - Choi , et al. March 4, 2 | 2008-03-04 |
Scatterometry alignment for imprint lithography Grant 7,281,921 - Watts , et al. October 16, 2 | 2007-10-16 |
Method of forming a compliant template for UV imprinting Grant 7,279,113 - Watts , et al. October 9, 2 | 2007-10-09 |
System for dispensing liquids Grant 7,252,715 - Watts , et al. August 7, 2 | 2007-08-07 |
Method For Controlling Distribution Of Fluid Components On A Body App 20070141271 - Xu; Frank ;   et al. | 2007-06-21 |
Bifurcated contact printing technique App 20070126150 - GanapathiSubramanian; Mahadevan ;   et al. | 2007-06-07 |
Imprint lithography substrate processing tool for modulating shapes of substrates Grant 7,224,443 - Choi , et al. May 29, 2 | 2007-05-29 |
Method to reduce adhesion between a conformable region and a pattern of a mold Grant 7,157,036 - Choi , et al. January 2, 2 | 2007-01-02 |
Method for providing desirable wetting and release characteristics between a mold and a polymerizable composition App 20060279024 - Choi; Byung-Jin ;   et al. | 2006-12-14 |
Imprint lithography template having a coating to reflect and/or absorb actinic energy App 20060266916 - Miller; Michael N. ;   et al. | 2006-11-30 |
Compliant hard template for UV imprinting Grant 7,140,861 - Watts , et al. November 28, 2 | 2006-11-28 |
Methods for fabricating patterned features utilizing imprint lithography Grant 7,122,482 - Xu , et al. October 17, 2 | 2006-10-17 |
Composition for an etching mask comprising a silicon-containing material Grant 7,122,079 - Xu , et al. October 17, 2 | 2006-10-17 |
Single phase fluid imprint lithography method Grant 7,090,716 - McMackin , et al. August 15, 2 | 2006-08-15 |
Chucking system for modulating shapes of substrates App 20060176466 - Choi; Byung J. ;   et al. | 2006-08-10 |
Scatterometry alignment for imprint lithography App 20060158651 - Watts; Michael P.C. ;   et al. | 2006-07-20 |
Step and repeat imprint lithography processes Grant 7,077,992 - Sreenivasan , et al. July 18, 2 | 2006-07-18 |
Method for fabricating bulbous-shaped vias Grant 7,071,088 - Watts , et al. July 4, 2 | 2006-07-04 |
Alignment systems for imprint lithography Grant 7,070,405 - Sreenivasan , et al. July 4, 2 | 2006-07-04 |
Method to improve the flow rate of imprinting material employing an absorption layer App 20060125154 - Watts; Michael P.C. ;   et al. | 2006-06-15 |
Method of forming a compliant template for UV imprinting App 20060096949 - Watts; Michael P.C. ;   et al. | 2006-05-11 |
Low-k dielectric functional imprinting materials App 20060081557 - Xu; Frank Y. ;   et al. | 2006-04-20 |
Step and repeat imprint lithography processes App 20060076717 - Sreenivasan; Sidlgata V. ;   et al. | 2006-04-13 |
Step and repeat imprint lithography systems App 20060077374 - Sreenivasan; Sidlgata V. ;   et al. | 2006-04-13 |
Scatterometry alignment for imprint lithography Grant 7,027,156 - Watts , et al. April 11, 2 | 2006-04-11 |
Chucking system for modulating shapes of substrates Grant 7,019,819 - Choi , et al. March 28, 2 | 2006-03-28 |
Method and system to measure characteristics of a film disposed on a substrate Grant 7,019,835 - McMackin , et al. March 28, 2 | 2006-03-28 |
Formation of discontinuous films during an imprint lithography process App 20060062867 - Choi; Byung Jin ;   et al. | 2006-03-23 |
Polymerization technique to attenuate oxygen inhibition of solidification of liquids and composition therefor App 20060062922 - Xu; Frank Y. ;   et al. | 2006-03-23 |
Method to provide a layer with uniform etch characteristics App 20060035029 - Xu; Frank Y. ;   et al. | 2006-02-16 |
Displays and method for fabricating displays App 20060017876 - Watts; Michael P.C. | 2006-01-26 |
Chucking system for modulating shapes of substrates Grant 6,982,783 - Choi , et al. January 3, 2 | 2006-01-03 |
Method for modulating shapes of substrates Grant 6,980,282 - Choi , et al. December 27, 2 | 2005-12-27 |
Compliant hard template for UV imprinting App 20050236360 - Watts, Michael P.C. ;   et al. | 2005-10-27 |
Method of forming a deep-featured template employed in imprint lithography App 20050230882 - Watts, Michael P.C. ;   et al. | 2005-10-20 |
Composition for an etching mask comprising a silicon-containing material App 20050192421 - Xu, Frank Y. ;   et al. | 2005-09-01 |
Functional patterning material for imprint lithography processes Grant 6,936,194 - Watts August 30, 2 | 2005-08-30 |
Materials for imprint lithography App 20050187339 - Xu, Frank Y. ;   et al. | 2005-08-25 |
Method and system to measure characteristics of a film disposed on a substrate App 20050185169 - McMackin, Ian M. ;   et al. | 2005-08-25 |
Formation of discontinuous films during an imprint lithography process Grant 6,932,934 - Choi , et al. August 23, 2 | 2005-08-23 |
System and method for dispensing liquids Grant 6,926,929 - Watts , et al. August 9, 2 | 2005-08-09 |
Method to improve the flow rate of imprinting material App 20050156353 - Watts, Michael P.C. ;   et al. | 2005-07-21 |
Alignment methods for imprint lithography Grant 6,916,584 - Sreenivasan , et al. July 12, 2 | 2005-07-12 |
Step and repeat imprint lithography systems Grant 6,900,881 - Sreenivasan , et al. May 31, 2 | 2005-05-31 |
Methods for fabricating patterned features utilizing imprint lithography App 20050100830 - Xu, Frank Y. ;   et al. | 2005-05-12 |
Single phase fluid imprint lithography method App 20050072755 - McMackin, Ian M. ;   et al. | 2005-04-07 |
Method of creating a turbulent flow of fluid between a mold and a substrate App 20050072757 - McMackin, Ian M. ;   et al. | 2005-04-07 |
System for creating a turbulent flow of fluid between a mold and a substrate App 20050074512 - McMackin, Ian M. ;   et al. | 2005-04-07 |
Capillary imprinting technique App 20050061773 - Choi, Byung-Jin ;   et al. | 2005-03-24 |
Method to reduce adhesion between a conformable region and a pattern of a mold App 20040256764 - Choi, Byung Jin ;   et al. | 2004-12-23 |
System for dispensing liquids App 20040241324 - Watts, Michael P.C. ;   et al. | 2004-12-02 |
Chucking system for modulating shapes of substrates App 20040223131 - Choi, Byung J. ;   et al. | 2004-11-11 |
Step and repeat imprint lithography processes App 20040124566 - Sreenivasan, Sidlgata V. ;   et al. | 2004-07-01 |
Method for modulating shapes of substrates App 20040112861 - Choi, Byung J. ;   et al. | 2004-06-17 |
Chucking system for modulating shapes of substrates App 20040090611 - Choi, Byung J. ;   et al. | 2004-05-13 |
Method and a mold to arrange features on a substrate to replicate features having minimal dimensional variability App 20040065976 - Sreenivasan, Sidlgata V. ;   et al. | 2004-04-08 |
Method of forming a layer on a substrate to facilitate fabrication of metrology standards App 20040065252 - Sreenivasan, Sidlgata V. ;   et al. | 2004-04-08 |
Functional patterning material for imprint lithography processes App 20040046271 - Watts, Michael P.C. | 2004-03-11 |
Method For Fabricating Bulbous-shaped Vias App 20040038552 - Watts, Michael P.C. ;   et al. | 2004-02-26 |
Alignment methods for imprint lithography App 20040021254 - Sreenivasan, Sidlgata V. ;   et al. | 2004-02-05 |
Scatterometry alignment for imprint lithography App 20040021866 - Watts, Michael P.C. ;   et al. | 2004-02-05 |
Alignment systems for imprint lithography App 20040022888 - Sreenivasan, Sidlgata V. ;   et al. | 2004-02-05 |
Formation of discontinuous films during an imprint lithography process App 20040007799 - Choi, Byung Jin ;   et al. | 2004-01-15 |
System and method for dispensing liquids App 20040010341 - Watts, Michael P.C. ;   et al. | 2004-01-15 |
Step and repeat imprint lithography systems App 20040008334 - Sreenivasan, Sidlgata V. ;   et al. | 2004-01-15 |
Low viscosity high resolution patterning material App 20030235787 - Watts, Michael P.C. ;   et al. | 2003-12-25 |
Dual network with distributed firewall for network security App 20020129276 - Watts, Michael P.C. | 2002-09-12 |
Methods and apparatus for a stereoscopic graphic user interface Grant 6,344,860 - Watts February 5, 2 | 2002-02-05 |
High-speed, high-resolution, large area inspection using multiple optical fourier transform cells Grant 5,966,212 - Hendler , et al. October 12, 1 | 1999-10-12 |
Prober and tester with contact interface for integrated circuits-containing wafer held docked in a vertical plane Grant 5,656,942 - Watts , et al. August 12, 1 | 1997-08-12 |
Defect detection using fourier optics and a spatial separator for simultaneous optical computing of separated fourier transform components Grant 5,506,676 - Hendler , et al. April 9, 1 | 1996-04-09 |
Method for film thickness and refractive index determination Grant 4,909,631 - Tan , et al. March 20, 1 | 1990-03-20 |
Absorption measurements of materials Grant 4,857,738 - Myers , et al. August 15, 1 | 1989-08-15 |
Multilayer photoresist process utilizing an absorbant dye Grant 4,362,809 - Chen , et al. December 7, 1 | 1982-12-07 |
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