Patent | Date |
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Single crystal substrate with undulating ridges and silicon carbide substrate Grant 11,404,269 - Watanabe , et al. August 2, 2 | 2022-08-02 |
Method for producing single crystal substrate having a plurality of grooves using a pair of masks Grant 11,142,821 - Watanabe , et al. October 12, 2 | 2021-10-12 |
Single Crystal Substrate, Method For Producing Single Crystal Substrate, And Silicon Carbide Substrate App 20200140998 - WATANABE; Yukimune ;   et al. | 2020-05-07 |
Single Crystal Substrate And Silicon Carbide Substrate App 20200135461 - WATANABE; Yukimune ;   et al. | 2020-04-30 |
Photoelectric Conversion Element, Photoelectric Conversion Module, And Electronic Device App 20190280141 - TAKEUCHI; Masahiro ;   et al. | 2019-09-12 |
Silicon carbide substrate and method for producing silicon carbide substrate Grant 9,882,010 - Watanabe January 30, 2 | 2018-01-30 |
Method for producing 3C-SiC epitaxial layer, 3C-SiC epitaxial substrate, and semiconductor device Grant 9,758,902 - Watanabe , et al. September 12, 2 | 2017-09-12 |
Method of forming a laminate of epitaxially grown cubic silicon carbide layers, and method of forming a substrate-attached laminate of epitaxially grown cubic silicon carbide layers Grant 9,732,439 - Watanabe August 15, 2 | 2017-08-15 |
Substrate with silicon carbide film, semiconductor device, and method for producing substrate with silicon carbide film Grant 9,536,954 - Watanabe January 3, 2 | 2017-01-03 |
Silicon Carbide Substrate And Method For Producing Silicon Carbide Substrate App 20160343570 - WATANABE; Yukimune | 2016-11-24 |
Substrate with silicon carbide film, method for producing substrate with silicon carbide film, and semiconductor device Grant 9,362,368 - Watanabe June 7, 2 | 2016-06-07 |
Substrate With Silicon Carbide Film, Semiconductor Device, And Method For Producing Substrate With Silicon Carbide Film App 20160126320 - WATANABE; Yukimune | 2016-05-05 |
Substrate With Silicon Carbide Film, Method For Producing Substrate With Silicon Carbide Film, And Semiconductor Device App 20160126321 - WATANABE; Yukimune | 2016-05-05 |
Cubic Silicon Carbide Film Manufacturing Method, Cubic Silicon Carbide Film-attached Substrate Manufacturing Method, And Power Device By Use Of The Cubic Silicon Carbide Film App 20150275394 - WATANABE; Yukimune | 2015-10-01 |
Method of manufacturing semiconductor device and semiconductor device having oxide film crystallized by a thermal treatment Grant 9,064,802 - Watanabe June 23, 2 | 2015-06-23 |
Method For Producing 3c-sic Epitaxial Layer, 3c-sic Epitaxial Substrate, And Semiconductor Device App 20150108504 - WATANABE; Yukimune ;   et al. | 2015-04-23 |
Semiconductor substrate and method for producing semiconductor substrate Grant 8,986,464 - Watanabe March 24, 2 | 2015-03-24 |
Semiconductor substrate and semiconductor substrate manufacturing method Grant 8,847,236 - Watanabe September 30, 2 | 2014-09-30 |
Semiconductor Substrate And Semiconductor Substrate Manufacturing Method App 20130181230 - WATANABE; Yukimune | 2013-07-18 |
Semiconductor Substrate And Method For Producing Semiconductor Substrate App 20120235163 - WATANABE; Yukimune | 2012-09-20 |
Cubic Silicon Carbide Film Manufacturing Method, And Cubic Silicon Carbide Film-attached Substrate Manufacturing Method App 20120037067 - WATANABE; Yukimune | 2012-02-16 |
Semiconductor device and manufacturing method of the semiconductor device Grant 7,968,396 - Watanabe , et al. June 28, 2 | 2011-06-28 |
Method of nickel disilicide formation and method of nickel disilicate source/drain formation Grant 7,947,560 - Watanabe , et al. May 24, 2 | 2011-05-24 |
Method of manufacturing semiconductor device that includes forming metal oxide film on semiconductor wafer Grant 7,713,884 - Ito , et al. May 11, 2 | 2010-05-11 |
Semiconductor device and manufacturing method of the semiconductor device App 20100072551 - Watanabe; Yukimune ;   et al. | 2010-03-25 |
Semiconductor device and manufacturing method of the semiconductor device Grant 7,645,655 - Watanabe , et al. January 12, 2 | 2010-01-12 |
Method Of Manufacturing Semiconductor Device App 20080318439 - Ito; Hiromi ;   et al. | 2008-12-25 |
Method Of Manufacturing Semiconductor Device And Semiconductor Device App 20080303119 - WATANABE; Yukimune | 2008-12-11 |
Semiconductor device and manufacturing method of the same App 20080067590 - Mise; Nobuyuki ;   et al. | 2008-03-20 |
Method for forming silicide and method for fabricating semiconductor device App 20070202692 - Watanabe; Yukimune ;   et al. | 2007-08-30 |
Semiconductor device and manufacturing method of the semiconductor device App 20060284220 - Watanabe; Yukimune ;   et al. | 2006-12-21 |
Semiconductor device and manufacturing method of the semiconductor device App 20060281273 - Watanabe; Yukimune ;   et al. | 2006-12-14 |