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Patent applications and USPTO patent grants for Watanabe; Tateki.The latest application filed is for "charged-particle beam pattern writing method and apparatus and software program for use therein".
Patent | Date |
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Charged-particle beam pattern writing method and apparatus and software program for use therein Grant 7,589,335 - Matsukawa , et al. September 15, 2 | 2009-09-15 |
Charged beam drawing apparatus and charged beam drawing method Grant 7,476,881 - Hattori , et al. January 13, 2 | 2009-01-13 |
Charged-particle Beam Pattern Writing Method And Apparatus And Software Program For Use Therein App 20080011965 - Matsukawa; Takuya ;   et al. | 2008-01-17 |
Charged Beam Drawing Apparatus And Charged Beam Drawing Method App 20070114461 - HATTORI; Kiyoshi ;   et al. | 2007-05-24 |
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