Watahiki; Shinichiro
Patent Applications and Registrations
Patent applications and USPTO patent grants for Watahiki; Shinichiro.The latest application filed is for "treatment object conveyor apparatus, semiconductor manufacturing apparatus, and treatment object treatment method".
- Watahiki; Shinichiro - Tokyo JP
| Patent | Date |
|---|---|
| Treatment object conveyor apparatus, semiconductor manufacturing apparatus, and treatment object treatment method Grant 6,190,104 - Ikeda , et al. February 20, 2 | 2001-02-20 |
| Substrate transferring mechanism Grant 6,143,083 - Yonemitsu , et al. November 7, 2 | 2000-11-07 |
| Substrate processing apparatus with a processing chamber, transfer chamber, intermediate holding chamber, and an atmospheric pressure section Grant 6,066,210 - Yonemitsu , et al. May 23, 2 | 2000-05-23 |
| Substrate processing apparatus Grant 5,788,447 - Yonemitsu , et al. August 4, 1 | 1998-08-04 |
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