Patent | Date |
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Illumination system and filter system Grant 8,269,179 - Wassink , et al. September 18, 2 | 2012-09-18 |
Lithographic apparatus and radiation system Grant 8,018,572 - Wassink September 13, 2 | 2011-09-13 |
Contamination prevention system, a lithographic apparatus, a radiation source and a method for manufacturing a device Grant 8,018,576 - Wassink September 13, 2 | 2011-09-13 |
Apparatus Comprising A Rotating Contaminant Trap App 20110096308 - FRANKEN; Johannes Christiaan Leonardus ;   et al. | 2011-04-28 |
Apparatus comprising a rotating contaminant trap Grant 7,889,312 - Franken , et al. February 15, 2 | 2011-02-15 |
Method for removal of deposition on an optical element, lithographic apparatus, device manufacturing method, and device manufactured thereby Grant 7,868,304 - Bakker , et al. January 11, 2 | 2011-01-11 |
Apparatus comprising a rotating contaminant trap App 20100259733 - Franken; Johannes Christiaan ;   et al. | 2010-10-14 |
Radiation System And Lithographic Apparatus App 20100141909 - Wassink; Arnoud Cornelis ;   et al. | 2010-06-10 |
Radiation system and lithographic apparatus Grant 7,696,492 - Wassink , et al. April 13, 2 | 2010-04-13 |
Lithographic apparatus, contaminant trap, and device manufacturing method Grant 7,612,353 - Sjmaenok , et al. November 3, 2 | 2009-11-03 |
Contamination prevention system, lithographic apparatus, radiation source, and method for manufacturing a device Grant 7,602,472 - Buis , et al. October 13, 2 | 2009-10-13 |
Illumination system and filter system App 20090115980 - Wassink; Arnoud Cornelis ;   et al. | 2009-05-07 |
Contamination barrier and lithographic apparatus comprising same App 20090045357 - Wassink; Arnoud Cornelis | 2009-02-19 |
Lithographic apparatus, illumination system, filter system and method for cooling a support of such a filter system Grant 7,485,881 - Wassink , et al. February 3, 2 | 2009-02-03 |
Contamination prevention system, lithographic apparatus, radiation source, and method for manufacturing a device App 20080309893 - Buis; Edwin Johan ;   et al. | 2008-12-18 |
Lithographic apparatus and radiation system App 20080304028 - Wassink; Arnoud Cornelis | 2008-12-11 |
Contamination barrier and lithographic apparatus comprising same Grant 7,453,071 - Wassink November 18, 2 | 2008-11-18 |
Contamination barrier and lithographic apparatus Grant 7,442,948 - Wassink October 28, 2 | 2008-10-28 |
Contamination prevention system, a lithographic apparatus, a radiation source and a method for manufacturing a device App 20080231820 - Wassink; Arnoud Cornelis | 2008-09-25 |
Lithographic apparatus, illumination system and filter system Grant 7,426,018 - Wassink September 16, 2 | 2008-09-16 |
Lithographic apparatus, contaminant trap, and device manufacturing method Grant 7,397,056 - Sjmaenok , et al. July 8, 2 | 2008-07-08 |
Radiation system and lithographic apparatus App 20080142736 - Wassink; Arnoud Cornelis ;   et al. | 2008-06-19 |
Lithographic apparatus, radiation system and filter system Grant 7,365,345 - Wassink April 29, 2 | 2008-04-29 |
Contamination barrier and lithographic apparatus App 20080067454 - Wassink; Arnoud Cornelis | 2008-03-20 |
Radiation system and lithographic apparatus Grant 7,233,010 - Van Herpen , et al. June 19, 2 | 2007-06-19 |
Lithographic apparatus, contaminant trap, and device manufacturing method App 20070023706 - Sjmaenok; Leonid Aizikovitch ;   et al. | 2007-02-01 |
Lithographic apparatus, contaminant trap, and device manufacturing method App 20070018118 - Sjmaenok; Leonid Aizikovitch ;   et al. | 2007-01-25 |
Radiation system and lithographic apparatus App 20060261290 - Wilhelmus Van Herpen; Maarten Marinus Johannes ;   et al. | 2006-11-23 |
Contamination barrier and lithographic apparatus comprising same App 20060219958 - Wassink; Arnoud Cornelis | 2006-10-05 |
Lithographic apparatus, radiation system and filter system App 20060186353 - Wassink; Arnoud Cornelis | 2006-08-24 |
Method for removal of deposition on an optical element, lithographic apparatus, device manufacturing method, and device manufactured thereby App 20060175558 - Bakker; Levinus Pieter ;   et al. | 2006-08-10 |
Lithographic apparatus, illumination system and filter system App 20060169929 - Wassink; Arnoud Cornelis | 2006-08-03 |
Lithographic apparatus, illumination system, filter system and method for cooling a support of such a filter system App 20060139604 - Wassink; Arnoud Cornelis ;   et al. | 2006-06-29 |