loadpatents
Patent applications and USPTO patent grants for Warren; Ronald A..The latest application filed is for "etch apparatus".
Patent | Date |
---|---|
Etch Apparatus App 20080066864 - Ballantine; Arne W. ;   et al. | 2008-03-20 |
Etch apparatus Grant 7,332,054 - Ballantine , et al. February 19, 2 | 2008-02-19 |
Etch process and apparatus therefor App 20040144750 - Ballantine, Arne W. ;   et al. | 2004-07-29 |
Metal oxide temperature monitor Grant 6,759,260 - Ballantine , et al. July 6, 2 | 2004-07-06 |
Etch process and apparatus therefor Grant 6,699,400 - Ballantine , et al. March 2, 2 | 2004-03-02 |
Metal oxide temperature monitor App 20030183897 - Ballantine, Arne W. ;   et al. | 2003-10-02 |
Enhanced collimated sputtering apparatus and its method of use Grant 6,036,821 - Warren March 14, 2 | 2000-03-14 |
Wear-through detector for multilayered parts and methods of using same Grant 5,947,053 - Burnham , et al. September 7, 1 | 1999-09-07 |
Method for extended ion implanter source lifetime with control mechanism Grant 5,943,594 - Bailey , et al. August 24, 1 | 1999-08-24 |
Method for extended ion implanter source lifetime Grant 5,940,724 - Warren August 17, 1 | 1999-08-17 |
Apparatus for uniform cleaning of wafers using megasonic energy Grant 5,579,792 - Stanasolovich , et al. December 3, 1 | 1996-12-03 |
Apparatus for uniform cleaning of wafers using megasonic energy Grant 5,533,540 - Stanasolovich , et al. July 9, 1 | 1996-07-09 |
Remote controlled shutdown for hazardous material transport vehicle Grant 5,263,824 - Waldbeser , et al. November 23, 1 | 1993-11-23 |
Self-aligned contact studs for semiconductor structures Grant 5,216,282 - Cote , et al. June 1, 1 | 1993-06-01 |
Process for fabrication of a semiconductor structure and contact stud Grant 5,187,121 - Cote , et al. February 16, 1 | 1993-02-16 |
Process for fabricating self-aligned contact studs for semiconductor structures Grant 5,166,096 - Cote , et al. November 24, 1 | 1992-11-24 |
SEC | 0001303994 | WARREN RONALD A |
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