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Method and apparatus for illumination adjustment
Grant 11,429,029 - Van Der Schaar , et al. August 30, 2 | 2022-08-30 |
Improvements In Metrology Targets
App 20220260929 - MEHTA; Nikhil ; et al. | 2022-08-18 |
Metrology system and method for determining a characteristic of one or more structures on a substrate
Grant 11,415,900 - Tinnemans , et al. August 16, 2 | 2022-08-16 |
Metrology method, patterning device, apparatus and computer program
Grant 11,385,553 - Zhou , et al. July 12, 2 | 2022-07-12 |
Target For Measuring A Parameter Of A Lithographic Process
App 20220035255 - VAN DER SCHAAR; Maurits ; et al. | 2022-02-03 |
Metrology Apparatus And Method For Determining A Characteristic Of One Or More Structures On A Substrate
App 20210389365 - TINNEMANS; Patricius Aloysius Jacobus ; et al. | 2021-12-16 |
Method of determining a value of a parameter of interest of a patterning process, device manufacturing method
Grant 11,181,828 - Warnaar , et al. November 23, 2 | 2021-11-23 |
Computational Metrology
App 20210349395 - WARNAAR; Patrick ; et al. | 2021-11-11 |
Metrology Apparatus And Method For Determining A Characteristic Of One Or More Structures On A Substrate
App 20210325174 - TINNEMANS; Patricius Aloysius Jacobus ; et al. | 2021-10-21 |
Metrology apparatus and method for determining a characteristic of one or more structures on a substrate
Grant 11,125,806 - Tinnemans , et al. September 21, 2 | 2021-09-21 |
Metrology Method, Patterning Device, Apparatus And Computer Program
App 20210255553 - ZHOU; Zili ; et al. | 2021-08-19 |
Computational metrology
Grant 11,067,902 - Warnaar , et al. July 20, 2 | 2021-07-20 |
Method of measuring a structure, inspection apparatus, lithographic system and device manufacturing method
Grant 11,022,892 - Warnaar , et al. June 1, 2 | 2021-06-01 |
Method Of Determining Control Parameters Of A Device Manufacturing Process
App 20210149312 - TEL; Wim Tjibbo ; et al. | 2021-05-20 |
Metrology apparatus and method for determining a characteristic of one or more structures on a substrate
Grant 11,009,343 - Tinnemans , et al. May 18, 2 | 2021-05-18 |
Method and apparatus for design of a metrology target
Grant 11,003,099 - Van Der Schaar , et al. May 11, 2 | 2021-05-11 |
Metrology method, patterning device, apparatus and computer program
Grant 10,996,570 - Zhou , et al. May 4, 2 | 2021-05-04 |
Method And Apparatus For Illumination Adjustment
App 20210055663 - VAN DER SCHAAR; Maurits ; et al. | 2021-02-25 |
Metrology System and Method For Determining a Characteristic of one or More Structures on a Substrate
App 20210003924 - TINNEMANS; Patricius Aloysius Jacobus ; et al. | 2021-01-07 |
Metrology Method And Apparatus, Substrate, Lithographic System And Device Manufacturing Method
App 20200379359 - SMILDE; Hendrik Jan Hidde ; et al. | 2020-12-03 |
Metrology system and method for determining a characteristic of one or more structures on a substrate
Grant 10,816,909 - Tinnemans , et al. October 27, 2 | 2020-10-27 |
Metrology method and apparatus, substrate, lithographic system and device manufacturing method
Grant 10,739,687 - Smilde , et al. A | 2020-08-11 |
Computational Metrology
App 20200249576 - Kind Code | 2020-08-06 |
Method Of Determining A Value Of A Parameter Of Interest Of A Patterning Process, Device Manufacturing Method
App 20200133140 - WARNAAR; Patrick ; et al. | 2020-04-30 |
Metrology Method, Patterning Device, Apparatus and Computer Program
App 20200110342 - ZHOU; Zili ; et al. | 2020-04-09 |
Method of Measuring a Structure, Inspection Apparatus, Lithographic System and Device Manufacturing Method
App 20200064744 - WARNAAR; Patrick ; et al. | 2020-02-27 |
Method of Measuring a Structure, Inspection Apparatus, Lithographic System and Device Manufacturing Method
App 20200050114 - Bozkurt; Murat ; et al. | 2020-02-13 |
Metrology Apparatus and Method for Determining a Characteristic of One or More Structures On a Substrate
App 20200041563 - TINNEMANS; Patricius Aloysius Jacobus ; et al. | 2020-02-06 |
Method and Apparatus for Design of a Metrology Target
App 20200033741 - Van Der Schaar; Maurits ; et al. | 2020-01-30 |
Metrology Apparatus and Method for Determining a Characteristic of One or More Structures on a Substrate
App 20190378012 - Tripodi; Lorenzo ; et al. | 2019-12-12 |
Method of measuring a structure, inspection apparatus, lithographic system and device manufacturing method
Grant 10,481,506 - Bozkurt , et al. Nov | 2019-11-19 |
Method of measuring a property of a substrate, inspection apparatus, lithographic system and device manufacturing method
Grant 10,474,043 - Warnaar , et al. Nov | 2019-11-12 |
Method of measuring a structure, inspection apparatus, lithographic system and device manufacturing method
Grant 10,466,594 - Warnaar , et al. No | 2019-11-05 |
Method and apparatus for design of a metrology target
Grant 10,437,163 - Van Der Schaar , et al. O | 2019-10-08 |
Metrology Apparatus and Method for Determining a Characteristic of One or More Structures on a Substrate
App 20190265028 - TINNEMANS; Patricius Aloysius Jacobus ; et al. | 2019-08-29 |
Metrology method and apparatus, computer program and lithographic system
Grant 10,261,427 - Zeng , et al. | 2019-04-16 |
Metrology System and Method For Determining a Characteristic of One or More Structures on a Substrate
App 20190107781 - TINNEMANS; Patricius Aloysius Jacobus ; et al. | 2019-04-11 |
Metrology Method And Apparatus, Substrate, Lithographic System And Device Manufacturing Method
App 20190094712 - SMILDE; Hendrik Jan Hidde ; et al. | 2019-03-28 |
Metrology method and apparatus, substrate, lithographic system and device manufacturing method
Grant 10,162,271 - Smilde , et al. Dec | 2018-12-25 |
Polarization Tuning In Scatterometry
App 20180364590 - VAN DER SCHAAR; Maurits ; et al. | 2018-12-20 |
Method of Measuring a Structure, Inspection Apparatus, Lithographic System and Device Manufacturing Method
App 20180321599 - BOZKURT; Murat ; et al. | 2018-11-08 |
Method of Measuring a Property of a Substrate, Inspection Apparatus, Lithographic System and Device Manufacturing Method
App 20180173105 - Warnaar; Patrick ; et al. | 2018-06-21 |
Metrology Method And Apparatus, Computer Program And Lithographic System
App 20180136570 - ZENG; Si-Han ; et al. | 2018-05-17 |
Metrology method and inspection apparatus, lithographic system and device manufacturing method
Grant 9,946,167 - Smilde , et al. April 17, 2 | 2018-04-17 |
Method and Apparatus for Design of a Metrology Target
App 20180017881 - VAN DER SCHAAR; Maurits ; et al. | 2018-01-18 |
Metrology method and apparatus, computer program and lithographic system
Grant 9,869,940 - Zeng , et al. January 16, 2 | 2018-01-16 |
Inspection apparatus and methods, methods of manufacturing devices
Grant 9,753,379 - Singh , et al. September 5, 2 | 2017-09-05 |
Method of Measuring a Structure, Inspection Apparatus, Lithographic System and Device Manufacturing Method
App 20170248852 - WARNAAR; Patrick ; et al. | 2017-08-31 |
Metrology method and apparatus, and device manufacturing method
Grant 9,535,342 - Smilde , et al. January 3, 2 | 2017-01-03 |
Metrology Method and Apparatus, Computer Program and Lithographic System
App 20160313654 - ZENG; Si-Han ; et al. | 2016-10-27 |
Substrate and Patterning Device for Use in Metrology, Metrology Method and Device Manufacturing Method
App 20160179019 - VAN DER SCHAAR; Maurits ; et al. | 2016-06-23 |
Substrate and patterning device for use in metrology, metrology method and device manufacturing method
Grant 9,331,022 - Van Der Schaar , et al. May 3, 2 | 2016-05-03 |
Metrology Method and Inspection Apparatus, Lithographic System and Device Manufacturing Method
App 20160033877 - SMILDE; Hendrik Jan Hidde ; et al. | 2016-02-04 |
Inspection Apparatus and Methods, Methods of Manufacturing Devices
App 20160011523 - SINGH; Amandev ; et al. | 2016-01-14 |
Metrology method and inspection apparatus, lithographic system and device manufacturing method
Grant 9,140,998 - Smilde , et al. September 22, 2 | 2015-09-22 |
Metrology method and apparatus, and device manufacturing method
Grant 9,069,264 - Warnaar , et al. June 30, 2 | 2015-06-30 |
Lithographic apparatus and device manufacturing method to determine improved absolute position of exposure fields using mark structures
Grant 8,908,152 - Bijnen , et al. December 9, 2 | 2014-12-09 |
Metrology method and apparatus, and device manufacturing method
Grant 8,867,020 - Smilde , et al. October 21, 2 | 2014-10-21 |
Metrology Method and Apparatus, and Device Manufacturing Method
App 20140204397 - SMILDE; Hendrik Jan Hidde ; et al. | 2014-07-24 |
Substrate and patterning device for use in metrology, metrology method and device manufacturing method
Grant 8,709,687 - Van Der Schaar , et al. April 29, 2 | 2014-04-29 |
Marker Structure And Method Of Forming The Same
App 20130070226 - Van Haren; Richard Johannes Franciscus ; et al. | 2013-03-21 |
Substrate and Patterning Device for Use in Metrology, Metrology Method and Device Manufacturing Method
App 20130059240 - Van Der Schaar; Maurits ; et al. | 2013-03-07 |
Metrology Method and Apparatus, and Device Manufacturing Method
App 20130050501 - WARNAAR; Patrick ; et al. | 2013-02-28 |
Marker structure and method of forming the same
Grant 8,319,967 - Van Haren , et al. November 27, 2 | 2012-11-27 |
Metrology Method and Apparatus, and Device Manufacturing Method
App 20120242970 - SMILDE; Hendrik Jan Hidde ; et al. | 2012-09-27 |
Alignment system and alignment marks for use therewith
Grant 8,208,140 - Hulsebos , et al. June 26, 2 | 2012-06-26 |
Alignment system and alignment marks for use therewith
Grant 8,208,139 - Hulsebos , et al. June 26, 2 | 2012-06-26 |
Alignment mark and a method of aligning a substrate comprising such an alignment mark
Grant 8,208,121 - Bijnen , et al. June 26, 2 | 2012-06-26 |
Method For Coarse Wafer Alignment In A Lithographic Apparatus
App 20120127452 - WARNAAR; Patrick ; et al. | 2012-05-24 |
Metrology Method and Inspection Apparatus, Lithographic System and Device Manufacturing Method
App 20120123581 - SMILDE; Hendrik Jan Hidde ; et al. | 2012-05-17 |
Method for coarse wafer alignment in a lithographic apparatus
Grant 8,130,366 - Warnaar , et al. March 6, 2 | 2012-03-06 |
Mark structure for coarse wafer alignment and method for manufacturing such a mark structure
Grant 8,080,462 - Warnaar December 20, 2 | 2011-12-20 |
Mark Structure for Coarse Wafer Alignment and Method for Manufacturing Such a Mark Structure
App 20110244647 - WARNAAR; Patrick | 2011-10-06 |
Mark structure for coarse wafer alignment and method for manufacturing such a mark structure
Grant 7,989,966 - Warnaar August 2, 2 | 2011-08-02 |
Alignment System and Alignment Marks for Use Therewith
App 20100214550 - HULSEBOS; Edo Maria ; et al. | 2010-08-26 |
Lithographic Apparatus and Device Manufacturing Method
App 20100123886 - BIJNEN; Franciscus Godefridus Casper ; et al. | 2010-05-20 |
Method For Coarse Wafer Alignment In A Lithographic Apparatus
App 20090237637 - Warnaar; Patrick ; et al. | 2009-09-24 |
Mark Structure for Coarse Wafer Alignment and Method for Manufacturing Such a Mark Structure
App 20090212447 - WARNAAR; Patrick | 2009-08-27 |
Alignment Mark and a Method of Aligning a Substrate Comprising Such an Alignment Mark
App 20090195768 - Bijnen; Franciscus Godefridus Casper ; et al. | 2009-08-06 |
Alignment System and Alignment Marks for Use Therewith
App 20090176167 - HULSEBOS; Edo Maria ; et al. | 2009-07-09 |
Marker Structure And Method Of Forming The Same
App 20090147232 - Van Haren; Richard Johannes Franciscus ; et al. | 2009-06-11 |
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