Ward; Christopher Charles

Patent Applications and Registrations

Patent applications and USPTO patent grants for Ward; Christopher Charles.The latest application filed is for "patterning device cooling apparatus".

Company Profile

2.16.17

Ward; Christopher Charles - Somerville MA
Ward; Christopher Charles - Kensington CA
Ward; Christopher Charles - Wilton CT

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Lithographic apparatus Grant 10,788,763 - Westerlaken , et al. September 29, 2	2020-09-29
Patterning device cooling apparatus Grant 10,642,166 -	2020-05-05
Patterning Device Cooling Apparatus App 20190346777 - NAK BOGLU; Gunes ; et al.	2019-11-14
Reticle cooling by non-uniform gas flow Grant 10,423,081 - Venturino , et al. Sept	2019-09-24
Patterning device cooling apparatus Grant 10,394,139 - A	2019-08-27
Patterning device cooling systems in a lithographic apparatus Grant 10,281,830 - Van Bokhoven , et al.	2019-05-07
Patterning Device Cooling Apparatus App 20190121248 - NAKIBOGLU; Gunes ; et al.	2019-04-25
Gas flow optimization in reticle stage environment Grant 10,031,428 - Cuypers , et al. July 24, 2	2018-07-24
Patterning Device Cooling Systems In A Lithographic Apparatus App 20180196360 - VAN BOKHOVEN; Laurentius Johannes Adrianus ; et al.	2018-07-12
Patterning device support, lithographic apparatus, and method of controlling patterning device temperature Grant 9,977,351 - Ebert , et al. May 22, 2	2018-05-22
Patterning device manipulating system and lithographic apparatuses Grant 9,910,368 - Valentin , et al. March 6, 2	2018-03-06
Estimating deformation of a patterning device and/or a change in its position Grant 9,857,694 - Moest , et al. January 2, 2	2018-01-02
Reticle Cooling by Non-Uniform Gas Flow App 20170363973 - VENTURINO; Thomas ; et al.	2017-12-21
Patterning Device Support, Lithographic Apparatus, And Method Of Controlling Patterning Device Temperature App 20170307986 - EBERT; Earl William ; et al.	2017-10-26
Patterning device support, lithographic apparatus, and method of controlling patterning device temperature Grant 9,766,557 - Ebert , et al. September 19, 2	2017-09-19
Patterning device support and lithographic apparatus Grant 9,740,112 - Sinharoy , et al. August 22, 2	2017-08-22
Patterning Device Support, Lithographic Apparatus, And Method Of Controlling Patterning Device Temperature App 20170160652 - EBERT; Earl William ; et al.	2017-06-08
Patterning device support, lithographic apparatus, and method of controlling patterning device temperature Grant 9,632,433 - Ebert, Jr. , et al. April 25, 2	2017-04-25
Reticle cooling system in a lithographic apparatus Grant 9,632,434 - Ebert, Jr. , et al. April 25, 2	2017-04-25
Real-time reticle curvature sensing Grant 9,632,429 - Ward , et al. April 25, 2	2017-04-25
Estimating Deformation of a Patterning Device and/or a Change in Its Position App 20170068171 - MOEST; Bearrach ; et al.	2017-03-09
Lithographic Apparatus App 20170068175 - WESTERLAKEN; Jan Steven Christiaan ; et al.	2017-03-09
Lithographic apparatus Grant 9,513,568 - Westerlaken , et al. December 6, 2	2016-12-06
Lithographic apparatuses and methods for compensating for eigenmode coupling Grant 9,329,502 - Ward , et al. May 3, 2	2016-05-03
Gas Flow Optimization in Reticle Stage Environment App 20150355557 - CUYPERS; Koen ; et al.	2015-12-10
Patterning Device Support, Lithographic Apparatus, And Method Of Controlling Patterning Device Temperature App 20150301456 - EBERT, JR.; Earl William ; et al.	2015-10-22
Patterning Device Support and Lithographic Apparatus App 20150277240 - Sinharoy; Arindam ; et al.	2015-10-01
Patterning Device Manipulating System and Lithographic Apparatuses App 20150277241 - Valentin; Christiaan Louis ; et al.	2015-10-01
Reticle Cooling System In A Lithographic Apparatus App 20150241796 - EBERT, JR.; Earl William ; et al.	2015-08-27
Real-Time Reticle Curvature Sensing App 20150220005 - Ward; Christopher Charles ; et al.	2015-08-06
Heating and Cooling Systems in a Lithographic Apparatus App 20150192856 - Onvlee; Johannes ; et al.	2015-07-09
Lithographic Apparatus App 20150168854 - Westerlaken; Jan Steven Christiaan ; et al.	2015-06-18
Lithographic Apparatuses and Methods for Compensating For Eigenmode Coupling App 20130278915 - WARD; Christopher Charles ; et al.	2013-10-24

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