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Patent applications and USPTO patent grants for WANG; Zhonghui Alex.The latest application filed is for "method and apparatus of growing metal-free and low stress thick film of diamond-like carbon".
Patent | Date |
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Method and Apparatus of Growing Metal-free and Low Stress Thick Film of Diamond-like Carbon App 20150104648 - WANG; Zhonghui Alex | 2015-04-16 |
Thermal methods for cleaning post-CMP wafers Grant 7,884,017 - Wang , et al. February 8, 2 | 2011-02-08 |
Thermal Methods For Cleaning Post-cmp Wafers App 20100136788 - Wang; Zhonghui Alex ;   et al. | 2010-06-03 |
Thermal methods for cleaning post-CMP wafers Grant 7,709,400 - Wang , et al. May 4, 2 | 2010-05-04 |
Thermal methods for cleaning post-CMP wafers App 20080280456 - Wang; Zhonghui Alex ;   et al. | 2008-11-13 |
Method of annealing metal layers Grant 7,109,111 - Wang , et al. September 19, 2 | 2006-09-19 |
Method for regulating the electrical power applied to a substrate during an immersion process Grant 6,911,136 - Zheng , et al. June 28, 2 | 2005-06-28 |
method for regulating the electrical power applied to a substrate during an immersion process App 20030201166 - Zheng, Bo ;   et al. | 2003-10-30 |
Method of annealing metal layers App 20030162392 - Wang, Zhonghui Alex ;   et al. | 2003-08-28 |
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