Wang; Yuhou

Patent Applications and Registrations

Patent applications and USPTO patent grants for Wang; Yuhou.The latest application filed is for "rf pulsing within pulsing for semiconductor rf plasma processing".

Company Profile

14.8.14

Wang; Yuhou - Fremont CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Frequency tuning for a matchless plasma source Grant 11,437,219 - Long , et al. September 6, 2	2022-09-06
Rf Pulsing Within Pulsing For Semiconductor Rf Plasma Processing App 20220254608 - Long; Maolin ; et al.	2022-08-11
Dual-frequency, Direct-drive Inductively Coupled Plasma Source App 20220199365 - Long; Maolin ; et al.	2022-06-23
RF pulsing within pulsing for semiconductor RF plasma processing Grant 11,342,159 - Long , et al. May 24, 2	2022-05-24
Substrate Location Detection And Adjustment App 20220126454 - Martin; Michael John ; et al.	2022-04-28
Matchless Plasma Source For Semiconductor Wafer Fabrication App 20220117074 - Long; Maolin ; et al.	2022-04-14
Matchless plasma source for semiconductor wafer fabrication Grant 11,224,116 - Long , et al. January 11, 2	2022-01-11
Direct Frequency Tuning For Matchless Plasma Source In Substrate Processing Systems App 20210210314 - WANG; Yuhou ; et al.	2021-07-08
Image based plasma sheath profile detection on plasma processing tools Grant 10,957,521 - Wang , et al. March 23, 2	2021-03-23
Auxiliary circuit in RF matching network for frequency tuning assisted dual-level pulsing Grant 10,879,044 - Wang , et al. December 29, 2	2020-12-29
Rf Pulsing Within Pulsing For Semiconductor Rf Plasma Processing App 20200335305 - Long; Maolin ; et al.	2020-10-22
Frequency Tuning for a Matchless Plasma Source App 20200286713 - Long; Maolin ; et al.	2020-09-10
Matchless Plasma Source For Semiconductor Wafer Fabrication App 20200253034 - Kind Code	2020-08-06
Frequency tuning for a matchless plasma source Grant 10,672,590 - Long , et al.	2020-06-02
Matchless plasma source for semiconductor wafer fabrication Grant 10,638,593 - Long , et al.	2020-04-28
Image Based Plasma Sheath Profile Detection On Plasma Processing Tools App 20190371581 - Wang; Yuhou ; et al.	2019-12-05
Frequency Tuning for a Matchless Plasma Source App 20190287764 - Long; Maolin ; et al.	2019-09-19
Matchless Plasma Source For Semiconductor Wafer Fabrication App 20190215942 - Long; Maolin ; et al.	2019-07-11
Matchless Plasma Source for Semiconductor Wafer Fabrication App 20190116656 - Long; Maolin ; et al.	2019-04-18
Matchless plasma source for semiconductor wafer fabrication Grant 10,264,663 - Long , et al.	2019-04-16
Auxiliary Circuit In Rf Matching Network For Frequency Tuning Assisted Dual-level Pulsing App 20180294566 - Wang; Yuhou ; et al.	2018-10-11
Detection System for Tunable/Replaceable Edge Coupling Ring App 20170263478 - McCHESNEY; Jon ; et al.	2017-09-14

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